PROBE CARD SYSTEM, METHOD OF MANUFACTURING PROBE CARD SYSTEM, METHOD OF USING PROBE CARD SYSTEM

    公开(公告)号:US20240027494A1

    公开(公告)日:2024-01-25

    申请号:US18355255

    申请日:2023-07-19

    IPC分类号: G01R1/073 G01R1/067 G01R3/00

    摘要: A probe card system is provided. The probe card system, including a tester assembly, a probe head body configured to couple with the tester assembly, a first interconnection structure on a first side of the probe head body, and a probe layer structure on the first interconnection structure on the first side of the probe head body which is configured to engage with a wafer under test (WUT). The probe layer structure includes a sacrificial layer in connection with the first interconnection structure, a bonding layer in connection with the sacrificial layer, and a plurality of probe tips each in connection with respective conductive patterns exposed from the bonding layer and electrically coupled to the first interconnection structure. The sacrificial layer allows removal of the bonding layer and the plurality of probe tips via an etching operation. A method of manufacturing a probe card system is also provided.