STACKED COMPLEMENTARY FIELD EFFECT TRANSISTOR (CFET) AND METHOD OF MANUFACTURE

    公开(公告)号:US20240021586A1

    公开(公告)日:2024-01-18

    申请号:US17812300

    申请日:2022-07-13

    Inventor: Xia Li Bin Yang

    CPC classification number: H01L25/074 H01L25/50 H01L24/80

    Abstract: A stacked gate-all-around (GAA) complementary field-effect transistor (CFET) includes a first GAA FET of a first type and a second GAA FET of a second type. Each of the first GAA FET and the second GAA ITT includes at least one three-dimensional (3D) semiconductor slab with a channel region and a first surface. A first gate structure surrounds the channel region in the first GAA FET, and a second gate structure surrounds the channel region in the second GAA FET. The first gate structure is stacked opposite the second gate structure in a direction orthogonal to the first surface. In some examples, a first crystal structure of the 3D semiconductor slab in the first GAA FET has a first orientation, and a second crystal structure of the 3D semiconductor slab in the second GAA FET has a different orientation for improved carrier mobility.

    III-V compound semiconductor dies with stress-treated inactive surfaces to avoid packaging-induced fractures, and related methods

    公开(公告)号:US11545404B2

    公开(公告)日:2023-01-03

    申请号:US16868147

    申请日:2020-05-06

    Abstract: Before a semiconductor die of a brittle III-V compound semiconductor is encapsulated with a molding compound during package fabrication, side surfaces of the semiconductor die are treated to avoid or prevent surface imperfections from propagating and fracturing the crystal structure of the substrate of the III-V compound semiconductor under the stresses applied as the molding compound solidifies. Surfaces are treated to form a passivation layer, which may be a passivated layer of the substrate or a passivation material on the substrate. In a passivated layer, imperfections of an external layer are transformed to be less susceptible to fracture. Passivation material, such as a poly-crystalline layer on the substrate surface, diffuses stresses that are applied by the molding compound. Semiconductor dies in flip-chip and wire-bond chip packages with treated side surfaces as disclosed have a reduced incidence of failure caused by die fracturing.

    Gate all around transistors with high charge mobility channel materials

    公开(公告)号:US11222952B2

    公开(公告)日:2022-01-11

    申请号:US16749897

    申请日:2020-01-22

    Abstract: A semiconductor device comprising an N-type metal oxide semiconductor (NMOS) gate-all-around (GAA) transistor and a P-type metal oxide semiconductor (PMOS) GAA transistor with high charge mobility channel materials is disclosed. The semiconductor device may include a substrate. The semiconductor device may also include an NMOS GAA transistor on the substrate, wherein the NMOS GAA transistor comprises a first channel material. The semiconductor device may further include a PMOS GAA transistor on the substrate, wherein the PMOS GAA transistor comprises a second channel material. The first channel material may have an electron mobility greater than an electron mobility of Silicon (Si) and the second channel material may have a hole mobility greater than a hole mobility of Si.

    Thermal paths for glass substrates
    85.
    发明授权

    公开(公告)号:US11177065B2

    公开(公告)日:2021-11-16

    申请号:US16835227

    申请日:2020-03-30

    Abstract: Examples herein include thermally conductive pathways for glass substrates such as used by passive on glass devices that may be used to enhance the thermal conductivity of an integrated POG device. By using a thermally conductive material for passivation of the device pathways during manufacturing, the device pathways may be able to conduct heat away from the device. For example, by using a selected poly (p-phenylene benzobisoxazole) (PBO) based material (e.g., poly-p-phenylene-2, 6-benzobisoxazole) instead of conventional polyimide (PI) materials during a Cu pattern passivation process, the overall thermal performance of the device, may be enhanced.

    Integration of vertical GaN varactor with HEMT

    公开(公告)号:US10886266B1

    公开(公告)日:2021-01-05

    申请号:US16511099

    申请日:2019-07-15

    Abstract: Aspects generally relate to a P−N junction varactor that can be integrated with high electron mobility transistor (HEMT) in a single device or die. The varactor and HEMT are fabricated with different materials forming various layers of the varactor and HEMT. Using different material stack-up to form the varactor and HEMT allows characteristics of the varactor and HEMT to be varied for improved performance in different operating scenarios. The integrated varactor and HEMT device may be used for RF circuits, such as radio frequency front end (RFFE) devices for use in 5G.

    HIGH ELECTRON MOBILITY TRANSISTOR (HEMT) FIN FIELD-EFFECT TRANSISTOR (FINFET)

    公开(公告)号:US20200251582A1

    公开(公告)日:2020-08-06

    申请号:US16266267

    申请日:2019-02-04

    Abstract: Certain aspects of the present disclosure generally relate to a high electron mobility transistor and techniques for fabricating the same. Certain aspects of the present disclosure are directed to a semiconductor device. The semiconductor device generally includes a substrate; a channel region having a fin disposed above the substrate; a first barrier layer disposed adjacent to a first side and a second side of the first fin, wherein the first side and the second side of the first fin are opposite sides, the first barrier layer forming a heterojunction with the fin; a first dielectric layer disposed adjacent to a first side and a second side of the first barrier layer, wherein the first side and the second side of the first barrier layer are opposite sides; and a first gate region disposed adjacent to the first dielectric layer.

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