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    Inspection Apparatus and Method, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method
    71.
    发明申请
    Inspection Apparatus and Method, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method 有权
    检验仪器和方法，平版印刷设备，平版印刷加工单元和器件制造方法

    公开(公告)号：US20160377990A1

    公开(公告)日：2016-12-29

    申请号：US14901993

    申请日：2014-06-13

    申请人： ASML NETHERLANDS B.V.

    发明人： Richard QUINTANILHA

    IPC分类号： G03F7/20 ,  G01N21/956

    CPC分类号： G03F7/70625 ,  G01N21/95623 ,  G01N2201/061 ,  G01N2201/08 ,  G01N2201/12 ,  G03F7/70633

    摘要： The present invention determines property of a target (30) on a substrate (W), such as a grating on a wafer. An inspection apparatus has an illumination source (702, 710) with two or more illumination beams (716, 716′, 716″, 716′″) in the pupil plane of a high numerical aperture objective lens (L3). The substrate and target are illuminated via the objective lens from different angles of incidence with respect to the plane of the substrate. In the case of four illumination beams, a quad wedge optical device (QW) is used to separately redirect diffraction orders of radiation scattered from the substrate and separates diffraction orders from the two or more illumination beams. For example four 0th diffraction orders are separated for four incident directions. After capture in multimode fibers (MF), spectrometers (S1-S4) are used to measure the intensity of the separately redirected 0th diffraction orders as a function of wavelength. This may then be used in determining a property of a target.

    摘要翻译： 本发明确定了诸如晶片上的光栅的衬底（W）上的靶（30）的性质。 检查装置具有在高数值孔径物镜（L3）的光瞳平面内具有两个或更多个照明光束（716,716'，716“，716”）的照明源（702,710）。 通过物镜相对于衬底的平面从不同的入射角度照射衬底和靶。 在四个照明光束的情况下，使用四楔形光学器件（QW）分别重新引导从衬底散射的辐射的衍射级，并将衍射级与两个或更多个照明光束分离。 例如，对于四个入射方向，分离第四个第零衍射级。 在多模光纤（MF）中捕获之后，使用光谱仪（S1-S4）来测量作为波长的函数的单独重定向的第0衍射级的强度。 这可以用于确定目标的属性。

    APPARATUS, METHOD, AND PROGRAM FOR COMPONENT MEASUREMENT
    72.
    发明申请
    APPARATUS, METHOD, AND PROGRAM FOR COMPONENT MEASUREMENT 审中-公开
    用于组件测量的装置，方法和程序

    公开(公告)号：US20160377634A1

    公开(公告)日：2016-12-29

    申请号：US15261674

    申请日：2016-09-09

    申请人： TERUMO KABUSHIKI KAISHA

    发明人： Shouji Ochiai ,  Takeyuki Moriuchi ,  Masao Takinami

    IPC分类号： G01N33/72 ,  G01N21/35 ,  G01N21/31 ,  C12Q1/54

    CPC分类号： G01N33/721 ,  C12Q1/54 ,  C12Y101/03004 ,  C12Y111/01 ,  G01N21/27 ,  G01N21/274 ,  G01N21/31 ,  G01N21/35 ,  G01N21/78 ,  G01N21/783 ,  G01N21/8483 ,  G01N33/66 ,  G01N2201/061 ,  G01N2201/12 ,  G01N2333/805 ,  G01N2333/904 ,  G01N2333/908

    摘要： Provided is a component measuring apparatus configured to determine a functional form that describes wavelength characteristics of a variation attributable to scattering (S (λ)). The apparatus then determines unknown one or more coefficients (p, q) based on a first relational expression that involves a variation attributable to absorption (H (λ1)) and a group of second relational expressions that do not involve variations attributable to absorption (H (λ2a), H (λ2b), H (λ2c)). The apparatus then corrects an absorbance measured at an arbitrary wavelength (λ) using a function where the one or more coefficients (p, q) are applied to the functional form so as to reduce or eliminate at least the effects of scattering of light.

    摘要翻译： 提供了一种配置成确定描述由散射（S（λ））引起的变化的波长特性的函数形式的分量测量装置。 然后，该装置基于涉及归因于吸收的变化的第一关系表达式（H（λ1））和不涉及归因于吸收的变化的第二关系表达式（H（λ1））来确定未知的一个或多个系数（p，q） （λ2a），H（λ2b），H（λ2c））。 然后，该装置使用将一个或多个系数（p，q）应用于功能形式的功能来校正在任意波长（λ）处测量的吸光度，以便至少减少或消除光散射的影响。

    SURFACE FEATURES MAPPING
    73.
    发明申请
    SURFACE FEATURES MAPPING 审中-公开
    表面特征绘图

    公开(公告)号：US20160363540A1

    公开(公告)日：2016-12-15

    申请号：US15245049

    申请日：2016-08-23

    申请人： Seagate Technology LLC

    发明人： Joachim W. Ahner ,  S. Keith McLaurin

    IPC分类号： G01N21/88 ,  G01N21/95 ,  G01N21/94

    CPC分类号： G01N21/8806 ,  G01N21/47 ,  G01N21/8851 ,  G01N21/94 ,  G01N21/95 ,  G01N21/9501 ,  G01N21/9506 ,  G01N2021/8864 ,  G01N2201/061 ,  G01N2201/12

    摘要： Provided herein is an apparatus, including a light source configured to illuminate a surface of an article. In addition, the apparatus includes a light detector array. The light detector array includes a number of light sensors configured to simultaneously receive scattered light from features about the entire surface. The light detector array is configured to provide information for qualitatively and quantitatively characterizing the features.

    摘要翻译： 本文提供了一种装置，包括被配置为照亮物品表面的光源。 另外，该装置包括一个光检测器阵列。 光检测器阵列包括多个光传感器，其被配置为同时从特征围绕整个表面接收散射光。 光检测器阵列被配置为提供用于定性和定量地表征特征的信息。

    Engraved gemstone viewer for personal communications devices
    74.
    发明授权
    Engraved gemstone viewer for personal communications devices 有权
    用于个人通信设备的雕刻宝石查看器

    公开(公告)号：US09518929B2

    公开(公告)日：2016-12-13

    申请号：US14723046

    申请日：2015-05-27

    申请人： GemEx Systems, Inc.

    发明人： Randall Wagner ,  Kurt Schoeckert

    IPC分类号： G02B27/02 ,  G02B7/02 ,  G01N21/87 ,  G01N21/03 ,  G02B25/00

    CPC分类号： G01N21/87 ,  G01N21/03 ,  G01N2021/0339 ,  G01N2201/0221 ,  G01N2201/061 ,  G02B7/026 ,  G02B25/002 ,  G02B25/008 ,  G02B27/024 ,  G02B27/027

    摘要： A gemstone viewer for personal communications devices for viewing a gemstone surface on which has been formed an image or inscription such as an identification number. In one embodiment, the viewer is mounted to employ the camera and LED light source of the personal communications device. The viewer directs the light from the light source as a light beam along a path incident to the surface of the gemstone containing the inscription. The gemstone spectrally reflects the light beam along a path back toward and through a magnifying lens to the camera lens of the personal communications device thereby enhancing the magnifying properties of the camera lens to produce a viewable light image that reveals the inscription on the viewing screen of the personal communications device. In another embodiment, the viewer is aligned to the front facing camera of the personal communications device, and includes its own light source.

    摘要翻译： 一种用于个人通信设备的宝石查看器，用于观察宝石表面上已形成图像或铭文如识别号码。 在一个实施例中，观看者被安装以使用个人通信设备的照相机和LED光源。 观众将来自光源的光作为光束沿着入射到含有铭文的宝石表面的路径。 宝石将光束沿着路径反射回并通过放大透镜到个人通信设备的相机镜头，从而增强了相机镜头的放大特性，以产生可见的光图像，该可见光图像显示在观看屏幕上的铭文 个人通信设备。 在另一个实施例中，观看者与个人通信设备的前置相机对准，并且包括其自己的光源。

    AUTOMATED DEFECT DETECTION AND MAPPING FOR OPTICAL FILTERS
    75.
    发明申请
    AUTOMATED DEFECT DETECTION AND MAPPING FOR OPTICAL FILTERS 有权
    用于光过滤器的自动缺陷检测和映射

    公开(公告)号：US20160356724A1

    公开(公告)日：2016-12-08

    申请号：US15172592

    申请日：2016-06-03

    申请人： Materion Corporation

    发明人： Robert Sprague

    IPC分类号： G01N21/88

    CPC分类号： G01N21/8806 ,  G01M11/0278 ,  G01M11/0285 ,  G01N21/255 ,  G01N21/958 ,  G01N2021/9511 ,  G01N2201/061 ,  G01N2201/068

    摘要： Devices and methods are disclosed for characterizing point flaws (including pinholes and point defects) of an optical filter. A passband test is performed, including: illuminating the optical filter with passband illumination whose spectral range at least overlaps a passband of the optical filter; acquiring a passband map of the optical filter using a two-dimensional array of photodetectors while illuminating the optical filter with the passband illumination; and identifying point defects of the optical filter as low intensity locations of the passband map. A stopband test is performed, including: illuminating the optical filter with stopband illumination whose spectral range lies entirely outside of the passband of the optical filter; acquiring a stopband map of the optical filter using the two-dimensional array of photodetectors while illuminating the optical filter with the stopband illumination; and identifying pinholes of the optical filter as high intensity locations of the stopband map.

    摘要翻译： 公开了用于表征光学滤波器的点缺陷（包括针孔和点缺陷）的装置和方法。 进行通带测试，包括：通过光谱范围至少与光学滤波器的通带重叠的通带照明来照射光学滤波器; 在通过所述通带照明照射所述滤光器的同时，使用光电检测器的二维阵列获取所述滤光器的通带图; 以及将该滤光器的点缺陷识别为通带图的低强度位置。 进行阻带测试，包括：用光谱范围完全在光滤波器的通带外的阻带照明照射光滤波器; 在利用所述阻挡带照明照射所述滤光器的同时，使用所述光电检测器的二维阵列获取所述滤光器的阻挡图; 并且将所述滤光器的针孔识别为所述阻带图的高强度位置。

    Method for quantitative determination of oxidant and apparatus for quantitative determination of oxidant
    76.
    发明授权
    Method for quantitative determination of oxidant and apparatus for quantitative determination of oxidant 有权
    氧化剂定量测定方法及氧化剂定量测定仪

    公开(公告)号：US09513227B2

    公开(公告)日：2016-12-06

    申请号：US14409956

    申请日：2014-04-21

    申请人： Panasonic Intellectual Property Management Co., Ltd.

    发明人： Mari Onodera ,  Shin-ichi Imai ,  Hironori Kumagai

    IPC分类号： G01N31/00 ,  G01N35/02 ,  G01N21/75 ,  G01N21/78 ,  G01N21/31 ,  G01N31/22

    CPC分类号： G01N21/75 ,  G01N21/31 ,  G01N21/78 ,  G01N31/005 ,  G01N31/228 ,  G01N2021/755 ,  G01N2201/061 ,  G01N2201/127

    摘要： The present invention provides a method for quantitative determination of oxidant which method is capable of accurately and rapidly performing quantitative determination of oxidant at low cost, and an apparatus for quantitative determination of oxidant used in the method. The method for quantitative determination of oxidant according to the present invention is a method for quantitative determination of oxidant performing quantitative determination of oxidant in a sample using a redox reaction, the method including: adding one kind of reducing agent to a sample solution containing one or a plurality of kinds of oxidants having different lifetimes; producing an absorbance curve by measuring a time change in absorbance of the post-color-change or post-coloring reducing agent; and performing the quantitative determination of the oxidant while identifying the oxidant in the sample solution based on the obtained absorbance curve.

    摘要翻译： 本发明提供了一种用于定量测定氧化剂的方法，该方法能够以低成本准确且快速地进行氧化剂的定量测定，并且该方法中用于定量测定氧化剂的装置。 本发明的氧化剂的定量测定方法是使用氧化还原反应对样品中的氧化剂进行定量测定的氧化剂的定量测定方法，该方法包括：将一种还原剂加入到含有一种或多种 多种具有不同寿命的氧化剂; 通过测量后变色或后着色还原剂的吸光度的时间变化来产生吸光度曲线; 并且基于所获得的吸光度曲线，在确定样品溶液中的氧化剂的同时进行氧化剂的定量测定。

    Illumination for Detecting Raindrops on a Pane by Means of a Camera
    79.
    发明申请
    Illumination for Detecting Raindrops on a Pane by Means of a Camera 有权
    通过相机检测平台上的雨滴的照明

    公开(公告)号：US20160305873A1

    公开(公告)日：2016-10-20

    申请号：US15102061

    申请日：2014-05-05

    申请人： Conti Temic microelectronic GmbH

    发明人： Stefan BIX

    IPC分类号： G01N21/47 ,  G01V8/12

    CPC分类号： G01N21/4738 ,  B60S1/0844 ,  G01N2201/061 ,  G01N2201/062 ,  G01V8/12 ,  G06K9/00791

    摘要： The invention relates to a device for detecting rain on a pane (2). The device comprises a camera (1) and an electrically drivable film (3) that actively emits light (h). The emitted light (h) emerges as a light sheet (s) from the film (3). The camera (1) and the film (3) are designed and arranged in such a way that the camera (1) can detect a signal from the light (h) or an imaging (i1, i2) of the light sheet (s), which is emitted by the film (3), impinges on the pane (2) and is reflected by the pane. In particular, in this case, the signal detected by the camera (1) or the light sheet(s) (i1, i2) correlate(s) with light which is emitted by the film (3) and reflected or scattered at the inner face (2.1) or outer face (2.2) of the pane and/or at a raindrop.

    摘要翻译： 本发明涉及一种用于检测窗格（2）上的雨的装置。 该装置包括相机（1）和主动发光（h）的电驱动膜（3）。 发射光（h）从薄膜（3）中作为光片出现。 照相机（1）和胶片（3）的设计和布置使得照相机（1）能够检测来自光（h）的信号或光板的成像（i1，i2） 由薄膜（3）发射，撞击在玻璃板（2）上并被玻璃板反射。 特别地，在这种情况下，由相机（1）或光片（i1，i2）检测到的信号与由薄膜（3）发射并在内部反射或散射的光相关联 （2.1）或外表面（2.2）和/或雨滴处。