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    Optical-based validation of orientations of internal facets
    1.
    发明授权
    Optical-based validation of orientations of internal facets 有权

    公开(公告)号：US12078476B2

    公开(公告)日：2024-09-03

    申请号：US18226781

    申请日：2023-07-27

    Applicant: LUMUS LTD.

    Inventor： Ido Eisenberg

    IPC: G01B11/26 ,  G01C9/06 ,  G01M11/02 ,  G01N21/95

    CPC classification number: G01B11/26 ,  G01C9/06 ,  G01M11/0242 ,  G01C2009/066 ,  G01N2021/9511

    Abstract: Disclosed herein is a method including: providing a light guiding arrangement (LGA) configured to redirect light, incident thereon in a direction perpendicular to an external surface of the sample, into or onto the sample, such that light impinges on an internal facet of the sample nominally normally thereto; generating a first incident light beam (LB), directed at the external surface normally thereto, and a second incident LB, parallel to the first incident LB and directed at the LGA; obtaining a first returned LB by reflection of the first incident LB off the external surface, and a second returned LB by redirection by the LGA of the second incident LB into or onto the sample, reflection thereof off the internal facet, and inverse redirection by the LGA; measuring an angular deviation between the returned LBs and deducing therefrom an actual inclination angle of the internal facet relative to the external surface.

    OPTICAL-BASED VALIDATION OF ORIENTATIONS OF INTERNAL FACETS
    2.
    发明公开
    OPTICAL-BASED VALIDATION OF ORIENTATIONS OF INTERNAL FACETS 审中-公开

    公开(公告)号：US20230366675A1

    公开(公告)日：2023-11-16

    申请号：US18226781

    申请日：2023-07-27

    Applicant: LUMUS LTD.

    Inventor： Ido EISENBERG

    IPC: G01B11/26 ,  G01C9/06 ,  G01M11/02 ,  G01N21/95

    CPC classification number: G01B11/26 ,  G01C9/06 ,  G01M11/0242 ,  G01N2021/9511 ,  G01C2009/066

    Abstract: Disclosed herein is a method including: providing a light guiding arrangement (LGA) configured to redirect light, incident thereon in a direction perpendicular to an external surface of the sample, into or onto the sample, such that light impinges on an internal facet of the sample nominally normally thereto; generating a first incident light beam (LB), directed at the external surface normally thereto, and a second incident LB, parallel to the first incident LB and directed at the LGA; obtaining a first returned LB by reflection of the first incident LB off the external surface, and a second returned LB by redirection by the LGA of the second incident LB into or onto the sample, reflection thereof off the internal facet, and inverse redirection by the LGA; measuring an angular deviation between the returned LBs and deducing therefrom an actual inclination angle of the internal facet relative to the external surface.

    Automated defect detection and mapping for optical filters
    4.
    发明授权
    Automated defect detection and mapping for optical filters 有权

    公开(公告)号：US09927369B2

    公开(公告)日：2018-03-27

    申请号：US15172592

    申请日：2016-06-03

    Applicant: Materion Corporation

    Inventor： Robert Sprague

    IPC: G01N21/88 ,  G01M11/02 ,  G01N21/958 ,  G01N21/25 ,  G01N21/95

    CPC classification number: G01N21/8806 ,  G01M11/0278 ,  G01M11/0285 ,  G01N21/255 ,  G01N21/958 ,  G01N2021/9511 ,  G01N2201/061 ,  G01N2201/068

    Abstract: Devices and methods are disclosed for characterizing point flaws (including pinholes and point defects) of an optical filter. A passband test is performed, including: illuminating the optical filter with passband illumination whose spectral range at least overlaps a passband of the optical filter; acquiring a passband map of the optical filter using a two-dimensional array of photodetectors while illuminating the optical filter with the passband illumination; and identifying point defects of the optical filter as low intensity locations of the passband map. A stopband test is performed, including: illuminating the optical filter with stopband illumination whose spectral range lies entirely outside of the passband of the optical filter; acquiring a stopband map of the optical filter using the two-dimensional array of photodetectors while illuminating the optical filter with the stopband illumination; and identifying pinholes of the optical filter as high intensity locations of the stopband map.

    EVALUATION METHOD OF DEFECT SIZE OF PHOTOMASK BLANK, SELECTION METHOD, AND MANUFACTURING METHOD
    7.
    发明申请
    EVALUATION METHOD OF DEFECT SIZE OF PHOTOMASK BLANK, SELECTION METHOD, AND MANUFACTURING METHOD 有权
    光电薄膜缺陷尺寸的评估方法，选择方法和制造方法

    公开(公告)号：US20160116837A1

    公开(公告)日：2016-04-28

    申请号：US14921076

    申请日：2015-10-23

    Applicant: SHIN-ETSU CHEMICAL CO., LTD.

    Inventor： Tsuneo TERASAWA ,  Takahiro KISHITA ,  Daisuke IWAI ,  Hiroshi FUKUDA ,  Atsushi YOKOHATA

    IPC: G03F1/84 ,  G01N21/95 ,  G03F1/50 ,  G01N21/88

    CPC classification number: G03F1/84 ,  G01N21/8851 ,  G01N21/956 ,  G01N2021/8874 ,  G01N2021/9511 ,  G01N2021/95676 ,  G03F1/50

    Abstract: The defect size of a photomask blank is evaluated. An inspection-target photomask blank is irradiated with inspection light and reflected light of the region of the inspection-target photomask blank irradiated with the inspection light is collected through an objective lens of an inspection optical system as a magnified image of the region. Then, an intensity change part in the light intensity distribution profile of the magnified image is identified. Next, a difference in the light intensity of the intensity change part is obtained and the width of the intensity change part is obtained as the apparent width of the defect. Then, the width of the defect is calculated on the basis of a predetermined conversion expression showing the relationship among the difference in the light intensity, the apparent width of the defect, and the actual width of the defect, and the width of the defect is estimated.

    Abstract translation: 评估光掩模坯料的缺陷尺寸。 用检查光照射检查对象的光掩模坯料，通过作为该区域的放大图像的检查光学系统的物镜来收集被检查用光照射的检查对象光掩模坯料的区域的反射光。 然后，识别放大图像的光强度分布曲线中的强度变化部分。 接下来，获得强度变化部分的光强度的差异，并且获得强度变化部分的宽度作为缺陷的视在宽度。 然后，基于表示光强差异，缺陷的表观宽度与缺陷的实际宽度之间的关系的预定转换表达式计算缺陷的宽度，并且缺陷的宽度为 估计。

    System and method of high resolution fiber optic inspection
    8.
    发明授权
    System and method of high resolution fiber optic inspection 有权
    高分辨率光纤检测系统及方法

    公开(公告)号：US09151694B2

    公开(公告)日：2015-10-06

    申请号：US13785940

    申请日：2013-03-05

    Applicant: FiberQA, LLC

    Inventor： Douglas H. Wilson ,  Jan R. Endresen

    IPC: G01M11/00 ,  G02B6/38 ,  B08B1/00 ,  B08B11/00 ,  G01B11/30 ,  G01N21/88 ,  G01N21/94 ,  G01N21/95

    CPC classification number: G01M11/31 ,  B08B1/00 ,  B08B11/00 ,  G01B11/30 ,  G01M11/3145 ,  G01N21/88 ,  G01N21/94 ,  G01N2021/9511 ,  G02B6/385 ,  G02B6/3866

    Abstract: This disclosure concerns a cleaning and inspection system for fiber optics that is rapid, reliable and useful for various types of fiber optics. In an embodiment, the system includes a wide field of view (FOV) camera to image the ferrule and rapidly locate the fiber ends and a narrow FOV camera to provide detailed inspection of fiber ends. A cleaning module with a cleaning tip and a cleaning media that is drawn through the tip is used to clean the fiber ends. Images captured by the dual cameras are automatically enhanced and analyzed to determine the effectiveness of the cleaning process and to identify the types and quantity of defects present. In another embodiment, a single higher resolution camera is provided with a lens that can image an entire fiber array and yet enable defects to be detected by analysis of sub-images of each fiber in the fiber array.

    Abstract translation: 本公开涉及用于光纤的清洁和检查系统，其对于各种类型的光纤是快速，可靠和有用的。 在一个实施例中，该系统包括宽视野（FOV）照相机以对套圈成像并快速定位光纤端部和窄FOV照相机以提供光纤端部的详细检查。 使用具有清洁尖端和通过尖端拉出的清洁介质的清洁模块来清洁光纤端部。 自动增强和分析由双摄像头拍摄的图像，以确定清洁过程的有效性，并确定存在的缺陷的类型和数量。 在另一个实施例中，单个更高分辨率的相机设置有能够对整个光纤阵列成像的透镜，并且还通过分析光纤阵列中每个光纤的子图像来检测缺陷。

    USING REFLECTED AND TRANSMISSION MAPS TO DETECT RETICLE DEGRADATION
    9.
    发明申请
    USING REFLECTED AND TRANSMISSION MAPS TO DETECT RETICLE DEGRADATION 有权
    使用反射和传输方法来检测真实性降解

    公开(公告)号：US20150103351A1

    公开(公告)日：2015-04-16

    申请号：US14381304

    申请日：2013-03-07

    Applicant: KLA-Tencor Corporation

    Inventor： Carl E. Hess ,  Rui-fang Shi

    IPC: G01N21/95 ,  G01M11/00

    CPC classification number: G01N21/95 ,  G01M11/00 ,  G01N21/95607 ,  G01N2021/9511 ,  G01N2021/95676 ,  G01N2201/06113 ,  G01N2201/062 ,  G01N2201/10 ,  G03F1/84

    Abstract: An optical reticle inspection tool is used during an inspection to obtain, for each local area, an average of multiple reflected intensity values corresponding to light reflected from a plurality of sub-areas of each local area of the reticle. The optical reticle inspection tool is also used during the inspection to obtain, for each local area, an average of multiple transmitted intensity values corresponding to light transmitted through the sub-areas of each local area of the reticle. A combined intensity map is generated by combining, for each local area, the average of multiple reflected intensity values and the average of multiple transmitted intensity values such that a reticle pattern of the reticle is cancelled from the combined intensity map if the reticle has not degraded and such that the reticle pattern of the reticle is not cancelled out of the combined intensity map if the reticle has degraded.

    Abstract translation: 在检查期间使用光学掩模版检查工具，以针对每个局部区域获得对应于从掩模版的每个局部区域的多个子区域反射的光的多个反射强度值的平均值。 在检查期间还使用光学掩模版检查工具，以对于每个局部区域获得对应于透过分划板的每个局部区域的子区域的光的多个透射强度值的平均值。 通过对于每个局部区域组合多个反射强度值的平均值和多个透射强度值的平均值来产生组合强度图，使得如果标线没有退化，则从组合强度图中取消掩模版的掩模版图案 并且如果掩模版已劣化，则掩模版的掩模版图案不会从组合强度图中抵消。

    SYSTEM AND METHOD FOR DETECTING DETERIORATION OR A CUT IN A CABLE FOR CONVEYING SIGNALS
    10.
    发明申请
    SYSTEM AND METHOD FOR DETECTING DETERIORATION OR A CUT IN A CABLE FOR CONVEYING SIGNALS 审中-公开
    用于检测传感信号的电缆中的检测或切割的系统和方法

    公开(公告)号：US20140303906A1

    公开(公告)日：2014-10-09

    申请号：US14008534

    申请日：2012-03-22

    Applicant: Bernard Charlot

    Inventor： Bernard Charlot

    IPC: G01R31/08 ,  G01M11/00

    CPC classification number: G01R31/08 ,  G01M11/33 ,  G01N2021/9511 ,  G01R31/083 ,  G01R31/088

    Abstract: A system and a method for detecting deterioration of or cuts in a cable for transmitting signals, includes at least at a first end of the cable a transceiver, at least at a second end of the cable a transceiver, and means for synchronization of the signals transmitted by the transceivers, and the system further includes at least processing means adapted to determine the times of non-reception of the signal at each end of said cable.

    Abstract translation: 用于检测用于传输信号的电缆的劣化或切割的系统和方法包括至少在电缆的第一端处的收发器，至少在电缆的第二端处有收发器，以及用于信号同步的装置 并且所述系统还包括至少适合于确定在所述电缆的每一端处不接收信号的时间的处理装置。

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