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公开(公告)号：US12209854B2
公开(公告)日：2025-01-28
申请号：US17725339
申请日：2022-04-20
Applicant: KLA Corporation
Inventor： Stilian Ivanov Pandev , Min-Yeong Moon
Abstract: Methods and systems for measurement of wafer tilt and overlay are described herein. In some embodiments, the measurements are based on the value of an asymmetry response metric and known wafer statistics. Spectral measurements are performed at two different azimuth angles, preferably separated by one hundred eighty degrees. A sub-range of wavelengths is selected with significant signal sensitivity to wafer tilt or overlay. An asymmetry response metric is determined based on a difference between the spectral signals measured at the two different azimuth angles within the selected sub-range of wavelengths. The value of the asymmetry response metric is mapped to an estimated value of wafer tilt or overlay. In some other embodiments, the measurement of wafer tilt or overlay is based on a trained measurement model. Training data may be programmed or determined based on one or more asymmetry response metrics at two different azimuth angles.
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公开(公告)号：US12196779B2
公开(公告)日：2025-01-14
申请号：US17888500
申请日：2022-08-16
Applicant: MPI CORPORATION
Inventor： Stojan Kanev , Mei-Ting Lu , Sebastian Giessmann
Abstract: A probe system and a machine apparatus thereof are provided. The machine apparatus can be configured for optionally carrying at least one probe assembly. The machine apparatus includes a temperature control carrier module, a machine frame structure and a temperature shielding structure. The temperature control carrier module can be configured for carrying at least one predetermined object. The machine frame structure can be configured for partially covering the temperature control carrier module, and the machine frame structure has a frame opening for exposing the temperature control carrier module. The temperature shielding structure can be disposed on the machine frame structure for partially covering the frame opening, and the temperature shielding structure has a detection opening for exposing the at least one predetermined object. The temperature shielding structure has a gas guiding channel formed thereinside for allowing a predetermined gas in the gas guiding channel.
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公开(公告)号：US20240393108A1
公开(公告)日：2024-11-28
申请号：US18793875
申请日：2024-08-04
Applicant: LUMUS LTD.
Inventor： Ido EISENBERG
Abstract: Disclosed herein is a method including: providing a light guiding arrangement (LGA) configured to redirect light, incident thereon in a direction perpendicular to an external surface of the sample, into or onto the sample, such that light impinges on an internal facet of the sample nominally normally thereto; generating a first incident light beam (LB), directed at the external surface normally thereto, and a second incident LB, parallel to the first incident LB and directed at the LGA; obtaining a first returned LB by reflection of the first incident LB off the external surface, and a second returned LB by redirection by the LGA of the second incident LB into or onto the sample, reflection thereof off the internal facet, and inverse redirection by the LGA; measuring an angular deviation between the returned LBs and deducing therefrom an actual inclination angle of the internal facet relative to the external surface.
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公开(公告)号：US20240385704A1
公开(公告)日：2024-11-21
申请号：US18559903
申请日：2021-12-13
Applicant: GOERTEK INC.
Inventor： Li TIAN , Shumin TAN , Zongxu YANG , Jingyang LIU
IPC: G06F3/0362 , G01B11/26 , G01B15/00 , G06F1/16
Abstract: Some embodiments of the present disclosure disclose a wrist-worn device, including a micro control unit, a distance sensor and a rotating shaft arranged on a side surface of the wrist-worn device, an outer circumferential surface of the rotating shaft is provided with a plurality of protrusions; wherein the distance sensor is configured to collect distance data and send the distance data to the micro control unit, and the distance data includes a distance between the distance sensor and the rotating shaft; and the micro control unit is configured to obtain distance changing information on a distance between the distance sensor and the rotating shaft during a preset time according to the distance data, and determine a rotation angle of the rotating shaft according to the distance changing information on the distance.
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公开(公告)号：US20240369386A1
公开(公告)日：2024-11-07
申请号：US18685825
申请日：2022-08-19
Inventor： Hideo YAMAGUCHI , Shinichi TAKIGAWA
Abstract: An encoder includes: a rotary plate including a pattern for detecting rotational displacement; a light source that emits light onto the pattern; a light-receiving part including a light-receiving region that receives the light that is emitted from the light source and travels via the rotary plate; a fixed body in which the light-receiving part is provided; and an opposing component that opposes the pattern. The opposing component is disposed between the rotary plate and the fixed body.
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Patent Agency Ranking
公开(公告)号：US20240369346A1
公开(公告)日：2024-11-07
申请号：US18032342
申请日：2021-11-25
Applicant: Sun Yat-sen University
Inventor： Xia YANG , Junyou QIN , Guisong GUO , Xiaohu ZHANG
Abstract: The present disclosure provides a method and system for high-precision localization of a surface of an object, the method including: making marks with a pre-set distribution density on the surface of the object; photographing the marked object and numbering the marks in the image; acquiring relative position information about each mark on the surface of the object and establishing a corresponding relationship between mark numbers and mark position information; acquiring a real-time to-be-measured image and detecting marks in the real-time to-be-measured image; and calculating to obtain a position of the surface of the object corresponding to the current real-time to-be-measured image. The system includes: a mark making module, a numbering module, a mark position relationship module, a to-be-measured image module and a physical quantity calculation module.
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7.发明公开公开(公告)号：US20240363307A1
公开(公告)日：2024-10-31
申请号：US18638862
申请日：2024-04-18
Applicant: NuFlare Technology, Inc.
Inventor： Hiroshi SATO
IPC: H01J37/304 , G01B11/14 , G01B11/26 , H01J37/317
CPC classification number: H01J37/304 , G01B11/14 , G01B11/26 , H01J37/3174 , H01J2237/31754
Abstract: A mark-position-measurement-apparatus includes a stage with an object having plural marks thereon, a sensor including an irradiator irradiating beams to the object, and a photoreceiver receiving a reflected light from the object and outputting a height-position distribution of the object surface, a position-calculation-circuit to calculate, for each mark, a position of a mark-candidate-signal acquired in a scanned region, by using the height-position distribution, for each mark, obtained by scanning the beam over the plural marks to be intersected with one of the plural marks, a combination-generation-circuit to generate plural combinations by combining mark-candidate-signals selected from the plural marks when plural mark-candidate-signals are acquired, in a scanning direction, for at least one mark, and a selection-circuit to select a combination of mark-candidate-signals, being mark signals of the plural marks, from the plural combinations, by comparing, with a predetermined reference value, relative position information regarding mark-candidate-signals in the same combination.
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公开(公告)号：US12092658B2
公开(公告)日：2024-09-17
申请号：US17871978
申请日：2022-07-24
Applicant: MPI CORPORATION
Inventor： Sebastian Giessmann , Po-Yi Ting
CPC classification number: G01R1/06772 , G01B11/26 , G01R1/18 , G01R31/2891 , G06T7/33 , G06T11/00 , H04N5/272 , G06T2210/62
Abstract: An optical detection system and an alignment method for a predetermined target object are provided. The optical detection system includes a chuck stage, an optical detection module, a vision inspection module and a control module. The chuck stage includes a chuck configured for carrying a plurality of predetermined objects to be tested. The optical detection module includes an optical probe device, and the optical probe device is configured to be disposed above the chuck for optically detecting the predetermined object. The vision inspection module includes an image capturing device and an image display device. The image capturing device is configured for capturing a real-time image of the predetermined object in real time, and the image display device is configured for displaying the real-time image of the predetermined object in real time. The control module is configured to execute the alignment method for the predetermined target object.
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公开(公告)号：US12085478B1
公开(公告)日：2024-09-10
申请号：US18295293
申请日：2023-04-04
Inventor： Daniel Gillaugh , Alexander Kaszynski , Jeffrey Brown
CPC classification number: G01M15/14 , G01B11/0691 , G01B11/26 , G01L1/22
Abstract: The present disclosure is directed to a method and system to develop finite element (FE) models of as-manufactured turbomachinery blades using a combination of optical topography measurements, mesh morphing and strain gauge measurements. The method and system improves strain gauge to blade tip timing correlation using as-manufactured blade dimensions with finite element modeling.
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公开(公告)号：US12066285B2
公开(公告)日：2024-08-20
申请号：US17650358
申请日：2022-02-08
Applicant: Goodrich Corporation
Inventor： Chuang-Chia Lin
Abstract: An assembly includes a hoist or a winch, a cable, and a fleet angle sensor. The fleet angle sensor includes a frame disposed around an opening and the cable extends through the opening. A first photodetector with multiple light-receiving zones is mounted on the frame. A first light source is mounted on the frame opposite the first photodetector. A shield device is under the frame and includes a shield frame and a cover. The shield frame is around the cable and the cover extends from the shield frame toward the cable, with the cable extending through the cover.
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