A mark-position-measurement-apparatus includes a stage with an object having plural marks thereon, a sensor including an irradiator irradiating beams to the object, and a photoreceiver receiving a reflected light from the object and outputting a height-position distribution of the object surface, a position-calculation-circuit to calculate, for each mark, a position of a mark-candidate-signal acquired in a scanned region, by using the height-position distribution, for each mark, obtained by scanning the beam over the plural marks to be intersected with one of the plural marks, a combination-generation-circuit to generate plural combinations by combining mark-candidate-signals selected from the plural marks when plural mark-candidate-signals are acquired, in a scanning direction, for at least one mark, and a selection-circuit to select a combination of mark-candidate-signals, being mark signals of the plural marks, from the plural combinations, by comparing, with a predetermined reference value, relative position information regarding mark-candidate-signals in the same combination.