公开(公告)号：US20240088217A1

公开(公告)日：2024-03-14

申请号：US17940195

申请日：2022-09-08

Applicant: Intel Corporation

Inventor： Tao Chu ,  Minwoo Jang ,  Chia-Ching Lin ,  Yanbin Luo ,  Ting-Hsiang Hung ,  Feng Zhang ,  Guowei Xu

IPC: H01L29/06 ,  H01L21/762 ,  H01L29/78

CPC classification number: H01L29/0649 ,  H01L21/76224 ,  H01L29/7856

Abstract: Techniques are provided herein to form semiconductor devices that include a layer across an upper surface of a dielectric fill between devices and configured to prevent or otherwise reduce recessing of the dielectric fill. In this manner, the layer may be referred to as a barrier layer or recess-inhibiting layer. The semiconductor regions of the devices extend above a subfin region that may be native to the substrate. These subfin regions are separated from one another using a dielectric fill that acts as a shallow trench isolation (STI) structure to electrically isolate devices from one another. A barrier layer is formed over the dielectric fill early in the fabrication process to prevent or otherwise reduce the dielectric fill from recessing during subsequent processing. The layer may include oxygen and a metal, such as aluminum.

公开(公告)号：US11769789B2

公开(公告)日：2023-09-26

申请号：US16368450

申请日：2019-03-28

Applicant: Intel Corporation

Inventor： Nazila Haratipour ,  Chia-Ching Lin ,  Sou-Chi Chang ,  Ashish Verma Penumatcha ,  Owen Loh ,  Mengcheng Lu ,  Seung Hoon Sung ,  Ian A. Young ,  Uygar Avci ,  Jack T. Kavalieros

IPC: H01G4/30 ,  H10B51/00 ,  H01L23/522 ,  H01L49/02 ,  H01G4/012

CPC classification number: H01L28/56 ,  H01G4/012 ,  H01G4/30 ,  H01L23/5226 ,  H10B51/00

Abstract: A capacitor is disclosed. The capacitor includes a first metal layer, a second metal layer on the first metal layer, a ferroelectric layer on the second metal layer, and a third metal layer on the ferroelectric layer. The second metal layer includes a first non-reactive barrier metal and the third metal layer includes a second non-reactive barrier metal. A fourth metal layer is on the third metal layer.

公开(公告)号：US20230284457A1

公开(公告)日：2023-09-07

申请号：US17688495

申请日：2022-03-07

Applicant: Intel Corporation

Inventor： Hai Li ,  Dmitri Evgenievich Nikonov ,  Chia-Ching Lin ,  Punyashloka Debashis ,  Ian Alexander Young ,  Julien Sebot

IPC: H01L27/22 ,  H01L43/04 ,  H01L43/06

CPC classification number: H01L27/22 ,  H01L43/04 ,  H01L43/06

Abstract: In one embodiment, a first integrated circuit component, a second integrated circuit component, and an electrical interconnect coupling the first integrated circuit component and the second integrated circuit component. The interconnect comprises one or more spintronic logic devices.

公开(公告)号：US20230253444A1

公开(公告)日：2023-08-10

申请号：US17666745

申请日：2022-02-08

Applicant: Intel Corporation

Inventor： Arnab Sen Gupta ,  Kaan Oguz ,  Chia-Ching Lin ,  I-Cheng Tung ,  Sudarat Lee ,  Sou-Chi Chang ,  Matthew V. Metz ,  Scott B. Clendenning ,  Uygar E. Avci ,  Ian A. Young ,  Jason C. Retasket ,  Edward O. Johnson, JR.

IPC: H01L49/02 ,  H01L27/108

CPC classification number: H01L28/65 ,  H01L28/75 ,  H01L27/10829

Abstract: Described herein are capacitor devices formed using perovskite insulators. In one example, a perovskite templating material is formed over an electrode, and a perovskite insulator layer is grown over the templating material. The templating material improves the crystal structure and electrical properties in the perovskite insulator layer. One or both electrodes may be ruthenium. In another example, a perovskite insulator layer is formed between two layers of indium tin oxide (ITO), with the ITO layers forming the capacitor electrodes.

公开(公告)号：US11626475B2

公开(公告)日：2023-04-11

申请号：US16441905

申请日：2019-06-14

Applicant: INTEL CORPORATION

Inventor： Nazila Haratipour ,  Chia-Ching Lin ,  Sou-Chi Chang ,  Ian A. Young ,  Uygar E. Avci ,  Jack T. Kavalieros

IPC: H01L21/02 ,  H01L49/02 ,  H01G4/018 ,  H01L23/64

Abstract: An improved trench capacitor structure is disclosed that allows for the formation of narrower capacitors. An example capacitor structure includes a first conductive layer on the sidewalls of an opening through a thickness of a dielectric layer, a capacitor dielectric layer on the first conductive layer, a second conductive layer on the capacitor dielectric layer, and a conductive fill material on the second conductive layer. The capacitor dielectric layer laterally extends above the opening and along a top surface of the dielectric layer, and the conductive fill material fills a remaining portion of the opening.

公开(公告)号：US11626451B2

公开(公告)日：2023-04-11

申请号：US16442767

申请日：2019-06-17

Applicant: INTEL CORPORATION

Inventor： Emily Walker ,  Carl H. Naylor ,  Kaan Oguz ,  Kevin L. Lin ,  Tanay Gosavi ,  Christopher J. Jezewski ,  Chia-Ching Lin ,  Benjamin W. Buford ,  Dmitri E. Nikonov ,  John J. Plombon ,  Ian A. Young ,  Noriyuki Sato

IPC: H01L27/22 ,  H01L43/12 ,  G11C11/16 ,  H01L43/08 ,  H01L43/02 ,  H01L43/10

Abstract: A magnetic memory device comprising a plurality of memory cells is disclosed. The memory device includes an array of memory cells where each memory cell includes a first material layer having a ferromagnetic material, a second material layer having ruthenium, and a third material layer having bismuth and/or antimony. The second material layer is sandwiched between the first material layer and the third material in a stacked configuration.

公开(公告)号：US20230100649A1

公开(公告)日：2023-03-30

申请号：US17485265

申请日：2021-09-24

Applicant: Intel Corporation

Inventor： Hai Li ,  Chia-Ching Lin ,  Dmitri Evgenievich Nikonov ,  Ian Alexander Young

IPC: H01L43/02 ,  H01L43/10 ,  H01L43/12

Abstract: Magnetoelectric magnetic tunnel junction (MEMTJ) logic devices comprise a magnetoelectric switching capacitor coupled to a pair of magnetic tunnel junctions (MTJs) by an insulating layer. The logic state of the MEMTJ is represented by the magnetization orientation of the ferromagnetic layer of the magnetoelectric capacitor and can be switched through the application of an input voltage to the MEMTJ that causes the magnetoelectric switching capacitor to switch states. The magnetization orientation of the magnetoelectric capacitor ferromagnetic layer is read out by the MTJs. The magnetization orientation of a ferromagnetic free layer common to the MTJs is coupled to the ferromagnetic layer of the magnetoelectric capacitor. The potential of the ferromagnetic free layer is based on the power supply voltage applied to the ferromagnetic reference layer of the MTJ having a magnetization orientation parallel to that of the ferromagnetic free layer.

公开(公告)号：US11502188B2

公开(公告)日：2022-11-15

申请号：US16009110

申请日：2018-06-14

Applicant: Intel Corporation

Inventor： Chia-Ching Lin ,  Sasikanth Manipatruni ,  Dmitri Nikonov ,  Ian A. Young ,  Benjamin Buford ,  Tanay Gosavi ,  Kaan Oguz ,  John J. Plombon

IPC: H01L29/66 ,  H03K19/18 ,  H01L43/06 ,  H01F10/32 ,  H01F41/30 ,  H03K19/0944 ,  H01L27/02 ,  B82Y25/00

Abstract: An apparatus is provided to improve spin injection efficiency from a magnet to a spin orbit coupling material. The apparatus comprises: a first magnet; a second magnet adjacent to the first magnet; a first structure comprising a tunneling barrier; a third magnet adjacent to the first structure; a stack of layers, a portion of which is adjacent to the third magnet, wherein the stack of layers comprises spin-orbit material; and a second structure comprising magnetoelectric material, wherein the second structure is adjacent to the first magnet.

公开(公告)号：US20220199812A1

公开(公告)日：2022-06-23

申请号：US17129486

申请日：2020-12-21

Applicant: Intel Corporation

Inventor： Carl Naylor ,  Chelsey Dorow ,  Kevin O'Brien ,  Sudarat Lee ,  Kirby Maxey ,  Ashish Verma Penumatcha ,  Tanay Gosavi ,  Patrick Theofanis ,  Chia-Ching Lin ,  Uygar Avci ,  Matthew Metz ,  Shriram Shivaraman

IPC: H01L29/76 ,  H01L29/24 ,  H01L27/092 ,  H01L21/8256 ,  H01L21/02

Abstract: Transistor structures with monocrystalline metal chalcogenide channel materials are formed from a plurality of template regions patterned over a substrate. A crystal of metal chalcogenide may be preferentially grown from a template region and the metal chalcogenide crystals then patterned into the channel region of a transistor. The template regions may be formed by nanometer-dimensioned patterning of a metal precursor, a growth promoter, a growth inhibitor, or a defected region. A metal precursor may be a metal oxide suitable, which is chalcogenated when exposed to a chalcogen precursor at elevated temperature, for example in a chemical vapor deposition process.

公开(公告)号：US11264558B2

公开(公告)日：2022-03-01

申请号：US16128426

申请日：2018-09-11

Applicant: Intel Corporation

Inventor： Sasikanth Manipatruni ,  Kaan Oguz ,  Chia-Ching Lin ,  Christopher Wiegand ,  Tanay Gosavi ,  Ian Young

IPC: H01L43/02 ,  H01F10/32 ,  G11C11/16 ,  H01L43/10 ,  H01L27/22

Abstract: An apparatus is provided which comprises: a magnetic junction including: a stack of structures including: a first structure comprising a magnet with an unfixed perpendicular magnetic anisotropy (PMA) relative to an x-y plane of a device, wherein the first structure has a first dimension along the x-y plane and a second dimension in the z-plane, wherein the second dimension is substantially greater than the first dimension. The magnetic junction includes a second structure comprising one of a dielectric or metal; and a third structure comprising a magnet with fixed PMA, wherein the third structure has an anisotropy axis perpendicular to the plane of the device, and wherein the third structure is adjacent to the second structure such that the second structure is between the first and third structures; and an interconnect adjacent to the third structure, wherein the interconnect comprises a spin orbit material.