公开(公告)号：US20160071690A1

公开(公告)日：2016-03-10

申请号：US14888414

申请日：2014-05-14

Applicant: OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION

Inventor： Tsumoru SHINTAKE

IPC: H01J37/244 ,  H01J37/295

CPC classification number: H01J37/244 ,  G01N23/20 ,  H01J37/2955 ,  H01J2237/2449 ,  H01J2237/24578 ,  H01J2237/2544 ,  H01J2237/2803

Abstract: A low energy electron diffraction (LEED) detection module (100) includes: a first vacuum chamber for receiving diffracted electrons from a specimen (109); a larger second vacuum chamber connected to the first vacuum chamber to receive the diffracted electrons that have been transported through the first vacuum chamber; a two-dimensional electron detector disposed in the second vacuum chamber to detect the diffracted electrons; a potential shield (106) disposed generally along an inner surface of the first vacuum chamber and an inner surface of the second vacuum chamber; a magnetic lens (105) to expand a beam of the diffracted electrons that have been transported through the first vacuum chamber towards the two-dimensional electron detector; and a generally plane-shaped energy filter (103) to repel electrons having an energy lower than the probe beam (203) of electrons that impinges on the specimen (109).

Abstract translation: 低能电子衍射（LEED）检测模块（100）包括：用于从样品（109）接收衍射电子的第一真空室; 连接到第一真空室的较大的第二真空室，以接收已经传送通过第一真空室的衍射电子; 设置在第二真空室中以检测衍射电子的二维电子检测器; 大致沿第一真空室的内表面设置的电位屏蔽件（106）和第二真空室的内表面; 用于将已经通过第一真空室传送的衍射电子束朝向二维电子检测器扩大的磁性透镜（105）; 和大致平面状的能量过滤器（103），以排斥能量低于碰撞在样本（109）上的电子的探针光束（203）的能量的电子。

公开(公告)号：US09202670B2

公开(公告)日：2015-12-01

申请号：US14574179

申请日：2014-12-17

Applicant: FEI Company

Inventor： Bart Jozef Janssen ,  Gijs van Duinen ,  Uwe Luecken ,  Ross Savage ,  Stephanus H.L. van den Boom ,  Ivan Lazic

IPC: G21K5/04 ,  H01J37/28 ,  H01J37/26 ,  H01J37/20 ,  H01J37/244 ,  H01J37/295

CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J37/265 ,  H01J37/295 ,  H01J2237/12 ,  H01J2237/14 ,  H01J2237/226 ,  H01J2237/24507 ,  H01J2237/2614 ,  H01J2237/2802 ,  H01J2237/2806

Abstract: A method of investigating a wavefront of a charged-particle beam that is directed from a source through an illuminator so as to traverse a sample plane and land upon a detector, an output of the detector being used in combination with a mathematical reconstruction technique so as to calculate at least one of phase information and amplitude information for the wavefront at a pre-defined location along its path to the detector, in which method: Said beam is caused to traverse a particle-optical lens system disposed between said sample plane and said detector; At a selected location in the path from said source to said detector, a modulator is used to locally produce a given modulation of the wavefront; In a series of measurement sessions, different such modulations are employed, and the associated detector outputs are collectively used in said mathematical reconstruction.

Abstract translation: 一种调查带电粒子束的波前的方法，该波前从源通过照明器引导以遍历采样平面并落在检测器上，检测器的输出与数学重建技术结合使用，以便 沿着其到达检测器的路径的预定位置处计算波前的相位信息和幅度信息中的至少一个，其中：所述光束被穿过设置在所述样品平面和所述检测器之间的粒子 - 光学透镜系统 探测器; 在从所述源到所述检测器的路径中的选定位置处，使用调制器来本地产生波前的给定调制; 在一系列测量会话中，使用不同的这种调制，并且相关联的检测器输出在所述数学重建中被统一使用。

公开(公告)号：US08785850B2

公开(公告)日：2014-07-22

申请号：US12930749

申请日：2011-01-15

Applicant: Marek Malac ,  Marco Beleggia ,  Masahiro Kawasaki ,  Ray Egerton

Inventor： Marek Malac ,  Marco Beleggia ,  Masahiro Kawasaki ,  Ray Egerton

IPC: H01J37/295 ,  B82Y35/00

CPC classification number: H01J37/26 ,  H01J37/04 ,  H01J2237/2614

Abstract: New methods for phase contrast imaging in transmission electron microscopy use the imaging electron beam itself to prepare a hole-free thin film for use as an effective phase plate, in some cases eliminating the need for ex-situ fabrication of a hole and reducing requirements for the precision of the ZPP hardware. The electron optical properties of the ZPP hardware are modified primarily in two ways: by boring a hole using the electron beam; and/or by modifying the electro-optical properties by charging induced by the primary beam. Furthermore a method where the sample is focused by a lens downstream from the ZPP hardware is disclosed. A method for transferring a back focal plane of the objective lens to a selected area aperture plane and any plane conjugated with the back focal plane of the objective lens is also provided.

Abstract translation: 透射电子显微镜中相位成像的新方法使用成像电子束本身来制备无孔薄膜，用作有效的相位板，在某些情况下消除了对孔的非原位制造的需要，并减少了对 ZPP硬件的精度。 ZPP硬件的电子光学特性主要通过两种方式进行修改：通过使用电子束钻孔; 和/或通过由主光束引起的充电来改变电光特性。 此外，公开了一种通过ZPP硬件下游的透镜来聚焦样品的方法。 还提供了将物镜的后焦平面转移到选定的区域孔径平面和与物镜的后焦平面共轭的任何平面的方法。

公开(公告)号：US20110315876A1

公开(公告)日：2011-12-29

申请号：US13168415

申请日：2011-06-24

Applicant: Bart Buijsse ,  Peter Christiaan Tiemeijer

Inventor： Bart Buijsse ,  Peter Christiaan Tiemeijer

IPC: H01J37/295

CPC classification number: H01J37/263 ,  H01J37/09 ,  H01J2237/043 ,  H01J2237/223 ,  H01J2237/2614 ,  H01J2237/2802

Abstract: The invention relates to a blocking member to be placed in the diffraction plane of a TEM. It resembles the knife edge used for single sideband imaging, but blocks only electrons deflected over a small angle. As a result the Contrast Transfer Function of the TEM according to this invention will equal that of a single sideband microscope at low frequencies and that of a normal microscope for high frequencies. Preferable the highest frequency blocked by the blocking member is such that a microscope without the blocking member would show a CTF of 0.5.

Abstract translation: 本发明涉及一种放置在TEM衍射平面中的阻挡构件。 它类似于用于单边带成像的刀刃，但仅阻挡在小角度偏转的电子。 结果，根据本发明的TEM的对比度传递函数将等于低频下的单边带显微镜的对比度传递函数，而与正常显微镜在低频下相同。 优选地，阻挡构件阻挡的最高频率使得没有阻挡构件的显微镜将显示为0.5的CTF。

公开(公告)号：US20110266439A1

公开(公告)日：2011-11-03

申请号：US13096865

申请日：2011-04-28

Applicant: Uwe Luecken ,  Alan Frank de Jong ,  Gerrit Cornelis van Hoften ,  Frank Jeroen Pieter Schuurmans

Inventor： Uwe Luecken ,  Alan Frank de Jong ,  Gerrit Cornelis van Hoften ,  Frank Jeroen Pieter Schuurmans

IPC: H01J37/295

CPC classification number: H01J37/244 ,  H01J37/256 ,  H01J37/26 ,  H01J37/265 ,  H01J37/2955 ,  H01J2237/05 ,  H01J2237/221 ,  H01J2237/2446

Abstract: A method of using a direct electron detector in a TEM, in which an image with a high intensity peak, such as a diffractogram or an EELS spectrum, is imaged on said detector. As known the high intensity peak may damage the detector. To avoid this damage, the centre of the image is moved, as a result of which not one position of the detector is exposed to the high intensity, but the high intensity is smeared over the detector, displacing the high intensity peak before damage results.

Abstract translation: 在TEM中使用直接电子检测器的方法，其中具有高强度峰的图像，例如衍射图或EELS光谱，在所述检测器上成像。 众所周知，高强度峰值可能会损坏检测器。 为了避免这种损伤，图像的中心被移动，结果是检测器的一个位置没有暴露于高强度，但是高强度被污染在检测器上，在损坏结果之前移位高强度峰值。

公开(公告)号：US07486773B2

公开(公告)日：2009-02-03

申请号：US11431490

申请日：2006-05-09

Applicant: Jonathan S. Maltz ,  Zirao Zheng ,  Michelle M. Svatos

Inventor： Jonathan S. Maltz ,  Zirao Zheng ,  Michelle M. Svatos

IPC: G01B15/02 ,  G01N23/20 ,  G01N23/201 ,  H01L27/146 ,  H01J37/295

CPC classification number: A61B6/463 ,  A61B6/4233 ,  A61B6/5282 ,  A61B6/583 ,  A61N5/1049 ,  A61N2005/1054 ,  G21K1/04

Abstract: A system may include emission of megavoltage radiation from a megavoltage radiation source, acquisition of a first image using an imaging device while first megavoltage radiation is emitted from the megavoltage radiation source and while a plurality of elements is between the megavoltage radiation source and the imaging device, and determination of an amount of scatter radiation based at least on areas of the acquired image corresponding to the plurality of elements. In some aspects, at least one of the plurality of elements is substantially pointed toward a focal spot of the megavoltage radiation source.

Abstract translation: 系统可以包括从兆伏辐射源发射兆伏辐射，在从兆伏辐射源发射第一兆伏特辐射的同时使用成像装置获取第一图像，并且当多个元件位于兆伏辐射源和成像装置之间时 以及基于与所述多个元素对应的所获取的图像的至少一个区域来确定散射辐射量。 在一些方面，多个元件中的至少一个元件基本上指向兆伏辐射源的焦斑。

公开(公告)号：US06878509B2

公开(公告)日：2005-04-12

申请号：US10806969

申请日：2004-03-23

Applicant: Tomohide Takami

Inventor： Tomohide Takami

IPC: G01N23/201 ,  G02B5/00 ,  G02B5/20 ,  G02B27/00 ,  G21K1/10 ,  H01J37/22 ,  H01J37/244 ,  H01J37/295 ,  G03C7/33

CPC classification number: G02B5/1809 ,  G02B27/0018 ,  G21K1/10

Abstract: An image analysis device 1 is equipped with the photoreceptive means 11 that optically acquires diffraction pattern A that appears on the fluorescent screen 24 in order to obtain the diffraction pattern resulting from reflection high-energy electron diffraction, and the halation-prevention filter 12 provided so as to transmit the visible light emitted from the diffraction pattern A of the fluorescent screen 24, along the light path connecting the photoreceptive means 11 and the fluorescent screen 24. Also, the filter 12 is varied so that the transmittance of the visible light transmitted through the filter 12 is minimum at the filter center and increases with the distance from the center.

Abstract translation: 图像分析装置1配备有感光装置11，其光学地获取出现在荧光屏24上的衍射图案A，以获得由反射高能电子衍射产生的衍射图案，并且防止滤光器12设置为 从连接光接收装置11和荧光屏24的光路透射从荧光屏24的衍射图案A发射的可见光。另外，滤光器12变化，使透过的可见光的透过率 过滤器12在过滤器中心处最小，并且随着距离中心的距离而增加。

公开(公告)号：US5654547A

公开(公告)日：1997-08-05

申请号：US617655

申请日：1996-03-15

Applicant: Willem M. J. Coene ,  Augustus J. E. M. Janssen

Inventor： Willem M. J. Coene ,  Augustus J. E. M. Janssen

IPC: G01Q20/02 ,  G01Q30/04 ,  G01Q60/00 ,  G02B7/38 ,  G02B21/00 ,  G03F7/20 ,  H01J37/22 ,  H01J37/295 ,  H01J37/26

CPC classification number: G03F7/705 ,  H01J37/222 ,  H01J2237/223

Abstract: In a method for the iterative formation of an image of a specimen in a particle-optical apparatus a series of experimental images (the experimental series) is recorded with each time a different setting of an imaging parameter (for example, the focal distance), and a comparable series of images is calculated on the basis of the electron wave at the specimen (the estimation). The two series are compared and on the basis thereof an electron wave is calculated (the feedback) with which a new series of images is calculated which better approximates the experimental series. This iteration step is repeated until the correspondence between the experimental series and the calculated series is sufficient, after which the associated electron wave is considered to be the desired image of the specimen. A substantial gain as regards calculation time can be achieved during the estimation step as well as during the feedback step by executing the operation of the invention by means of FFTs. This is possible by writing the correlation expressions to be calculated in both steps in accordance with the invention in such a manner that they occur as pure correlation integrals which can be calculated by means of FFTs. The calculation time required when use is made of FFTs is substantially shorter than in the case of explicit calculation of the correlation expressions in conformity with the state of the art. The calculation time can thus be reduced by a factor of the order of magnitude of 50,000.

Abstract translation: 在用于在粒子光学装置中迭代形成样本的图像的方法中，每次成像参数的不同设置（例如，焦距）记录一系列实验图像（实验系列）， 并根据样品的电子波（估计）计算出可比较的一系列图像。 比较两个系列，并且基于此计算电子波（反馈），利用该电子波计算更接近实验系列的新系列图像。 重复该迭代步骤，直到实验系列和计算出的系列之间的对应关系是足够的，之后相关的电子波被认为是样品的期望图像。 关于计算时间的实质增益可以在估计步骤期间以及在反馈步骤期间通过FFT执行本发明的操作来实现。 这可以通过根据本发明的两个步骤中计算的相关表达式以使它们作为可以通过FFT计算的纯相关积分的方式出现。 当使用FFT时所需的计算时间基本上比根据现有技术的显式计算相关表达式的情况更短。 因此，计算时间可以降低5万个数量级。

公开(公告)号：US5010250A

公开(公告)日：1991-04-23

申请号：US462376

申请日：1990-01-09

Applicant: Hani E. Elsayed-Ali

Inventor： Hani E. Elsayed-Ali

IPC: G01Q30/02 ,  G01Q30/16 ,  G01Q60/58 ,  H01J37/295

CPC classification number: H01J37/2955

Abstract: A system for measuring the thermal characteristic of the surface-lattice of solid state materials with picosecond time resolution uses a picosecond laser pulse which is synchronized with a picosecond electron pulse; the electron pulse being generated by splitting the laser pulse into two beams one of which interacts with the surface under test and the second activates the cathode of an electron gun creating an electron pulse which is, collimated, focused and incident at a small acute angle (1-3 degrees) on the surface. The electron pulse generates a reflection high energy electron diffraction pattern (RHEED) which provides information on the surface temperature in accordance with the Debye-Waller effect. Time resolved measurements are made by using electron pulses which are delayed with respect to the laser pulses by successively greater time intervals.

Abstract translation: 用皮秒时间分辨率测量固体材料的表面晶格的热特性的系统使用与皮秒电子脉冲同步的皮秒激光脉冲; 电子脉冲是通过将激光脉冲分成两个光束而产生的，其中一个光束与被测表面相互作用，第二个激活电子枪的阴极，产生电子脉冲，该电子脉冲被准直聚焦并以小的锐角入射（ 1-3度）。 电子脉冲产生反射高能电子衍射图（RHEED），其根据德拜沃勒效应提供关于表面温度的信息。 通过使用相对于激光脉冲延迟的电子脉冲通过连续更大的时间间隔来进行时间分辨测量。

公开(公告)号：US4639602A

公开(公告)日：1987-01-27

申请号：US699046

申请日：1985-02-07

Applicant: Martin Henzler

Inventor： Martin Henzler

IPC: H01J37/147 ,  H01J37/295 ,  G21K1/08 ,  H01J3/14

CPC classification number: H01J37/1477 ,  H01J37/2955

Abstract: The invention relates to a system for the deflection of a beam of charged particles, which deflects a particle beam entering at any point into the deflection system such that it impinges upon the entrance orifice of a detector disposed at the exit from the deflection system. The deflection system comprises eight rotationally symmetrically disposed deflection plates and preferably includes two sections in order to achive a large range of uniform field strength in the deflection and a perpendicular impingement of the beam on the detector orifice.

Abstract translation: 本发明涉及一种用于偏转带电粒子束的系统，其将在任何点处进入的粒子束偏转到偏转系统中，使得其撞击设置在偏转系统出口处的检测器的入口孔。 偏转系统包括八个旋转对称设置的偏转板，并且优选地包括两个部分，以便在偏转中获得大范围的均匀场强和在检测器孔上的垂直冲击。