公开(公告)号：US12051561B2

公开(公告)日：2024-07-30

申请号：US18345618

申请日：2023-06-30

Applicant: Axcelis Technologies, Inc.

Inventor： Neil K. Colvin ,  Neil Bassom ,  Edward Moore

IPC: H01J37/08 ,  H01J37/317

CPC classification number: H01J37/08 ,  H01J37/3171 ,  H01J2237/006 ,  H01J2237/05

Abstract: An ion implantation system, ion source, and method are provided having a gaseous aluminum-based ion source material. The gaseous aluminum-based ion source material can be, or include, dimethylaluminum chloride (DMAC), where the DMAC is a liquid that transitions into vapor phase at room temperature. An ion source receives and ionizes the gaseous aluminum-based ion source material to form an ion beam. A low-pressure gas bottle supplies the DMAC as a gas to an arc chamber of the ion source by a primary gas line. A separate, secondary gas line supplies a co-gas, such as a fluorine-containing molecule, to the ion source, where the co-gas and DMAC reduce an energetic carbon cross-contamination and/or increase doubly charged aluminum.

公开(公告)号：US20190198292A1

公开(公告)日：2019-06-27

申请号：US15850184

申请日：2017-12-21

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Bon-Woong Koo ,  Robert C. Lindberg ,  Eric D. Hermanson ,  Frank Sinclair ,  Antonella Cucchetti ,  Randy Martin ,  Michael D. Johnson ,  Ana Samolov ,  Svetlana B. Radovanov

IPC: H01J37/317 ,  H01L21/04

CPC classification number: H01J37/3171 ,  H01J2237/04926 ,  H01J2237/05 ,  H01J2237/31713 ,  H01L21/0415

Abstract: A system and method for optimizing a ribbon ion beam in a beam line implantation system is disclosed. The system includes a mass resolving apparatus having a resolving aperture, in which the resolving aperture may be moved in the X and Z directions. Additionally, a controller is able to manipulate the mass analyzer and quadrupole lenses so that the crossover point of desired ions can also be moved in the X and Z directions. By manipulating the crossover point and the resolving aperture, the parameters of the ribbon ion beam may be manipulated to achieve a desired result. Movement of the crossover point in the X direction may affect the mean horizontal angle of the beamlets, while movement of the crossover point in the Z direction may affect the horizontal angular spread and beam current.

公开(公告)号：US09966220B2

公开(公告)日：2018-05-08

申请号：US15411194

申请日：2017-01-20

Applicant: Gatan, Inc.

Inventor： Colin Trevor ,  Matthew Lent ,  Alexander Jozef Gubbens ,  Edward James ,  Ray Dudley Twesten ,  Roice Joseph ,  SanJay Parekh ,  Thomas Sha

IPC: H01J37/05 ,  H01J37/244 ,  H01J37/26 ,  H01J47/00 ,  G21K7/00 ,  G01N23/00 ,  H01J37/22 ,  H01J37/256 ,  H01J37/28

CPC classification number: H01J37/05 ,  H01J37/222 ,  H01J37/244 ,  H01J37/256 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/0432 ,  H01J2237/05 ,  H01J2237/057 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/24495 ,  H01J2237/24585 ,  H01J2237/2802

Abstract: An electron energy loss spectrometer is described having a direct detection sensor, a high speed shutter and a sensor processor wherein the sensor processor combines images from individual sensor read-outs and converts a two dimensional image from said sensor into a one dimensional spectrum and wherein the one dimensional spectrum is output to a computer and operation of the high speed shutter is integrated with timing of imaging the sensor. The shutter is controlled to allow reduction in exposure of images corresponding to the individual sensor readouts. A plurality of images are exposed by imaging less than the full possible exposure and wherein the plurality of images are combined to form a composite image. The plurality of images can be comprised of images created by exposing the sensor for different exposure times.

公开(公告)号：US09355814B2

公开(公告)日：2016-05-31

申请号：US14390583

申请日：2013-03-04

Applicant: Hitachi High-Technologies Corporation

Inventor： Tsunenori Nomaguchi ,  Toshihide Agemura

IPC: H01J37/244 ,  H01J37/10 ,  H01J37/26

CPC classification number: H01J37/244 ,  H01J37/10 ,  H01J37/26 ,  H01J2237/05 ,  H01J2237/2446 ,  H01J2237/24495

Abstract: Aiming for easily carrying out an energy discrimination or an angle discrimination of a secondary particle emitted from a sample or easily setting an optimal observation condition, a charged particle beam apparatus is provided with a charged particle source for emitting a charged particle beam, a lens for focusing the charged particle beam to a sample, a detector for detecting a secondary particle emitted from the sample, and an orbit simulator for calculating a position at which the secondary particle emitted from the sample arrives; and in this structure, the orbit simulator calculates an orbit of a secondary particle that satisfies a predetermined condition, and a sample image is formed by using a signal detected at a position where the secondary particle satisfying the predetermined condition arrives at the detector.

Abstract translation: 为了容易地进行从样品发射的二次粒子的能量鉴别或角度辨别或容易设定最佳观察条件，带电粒子束装置设置有用于发射带电粒子束的带电粒子源，用于 将带电粒子束聚焦到样品，用于检测从样品发射的二次粒子的检测器和用于计算从样品发射的二次粒子到达的位置的轨道模拟器; 并且在该结构中，轨道模拟器计算满足预定条件的二次粒子的轨道，并且通过使用在满足预定条件的二次粒子到达检测器的位置处检测到的信号来形成样本图像。

公开(公告)号：US20150083910A1

公开(公告)日：2015-03-26

申请号：US14390583

申请日：2013-03-04

Applicant: Hitachi High-Technologies Corporation

Inventor： Tsunenori Nomaguchi ,  Toshihide Agemura

IPC: H01J37/244 ,  H01J37/10 ,  H01J37/26

CPC classification number: H01J37/244 ,  H01J37/10 ,  H01J37/26 ,  H01J2237/05 ,  H01J2237/2446 ,  H01J2237/24495

Abstract: Aiming for easily carrying out an energy discrimination or an angle discrimination of a secondary particle emitted from a sample or easily setting an optimal observation condition, a charged particle beam apparatus is provided with a charged particle source for emitting a charged particle beam, a lens for focusing the charged particle beam to a sample, a detector for detecting a secondary particle emitted from the sample, and an orbit simulator for calculating a position at which the secondary particle emitted from the sample arrives; and in this structure, the orbit simulator calculates an orbit of a secondary particle that satisfies a predetermined condition, and a sample image is formed by using a signal detected at a position where the secondary particle satisfying the predetermined condition arrives at the detector.

Abstract translation: 为了容易地进行从样品发射的二次粒子的能量鉴别或角度辨别或容易设定最佳观察条件，带电粒子束装置设置有用于发射带电粒子束的带电粒子源，用于 将带电粒子束聚焦到样品，用于检测从样品发射的二次粒子的检测器和用于计算从样品发射的二次粒子到达的位置的轨道模拟器; 并且在该结构中，轨道模拟器计算满足预定条件的二次粒子的轨道，并且通过使用在满足预定条件的二次粒子到达检测器的位置处检测到的信号来形成样本图像。

公开(公告)号：US20150076341A1

公开(公告)日：2015-03-19

申请号：US14551397

申请日：2014-11-24

Applicant: MICROMASS UK LIMITED

Inventor： Emmanuelle Claude ,  Mark Williams Towers ,  Kieran Neeson ,  Richard Denny ,  Jeffrey M. Brown ,  Paul R. Murray ,  Mark McDowall

IPC: H01J49/00 ,  G01N27/62 ,  H01J49/40

CPC classification number: H01J49/0031 ,  G01N27/622 ,  H01J49/0027 ,  H01J49/0036 ,  H01J49/004 ,  H01J49/005 ,  H01J49/26 ,  H01J49/40 ,  H01J49/446 ,  H01J2237/05

Abstract: The present invention relates to a method of mass spectrometry, an apparatus adapted to perform the method and a mass spectrometer. More particularly, but not exclusively, the present invention relates to a method of mass spectrometry comprising the step of associating parent and fragmentation ions from a sample by measuring the parent and fragmentation ions from two or more different areas of the sample and identifying changes in the number of parent ions between the areas in the sample, and corresponding changes in the number of fragmentation ions between the two areas.

Abstract translation: 本发明涉及一种质谱法，一种适于执行该方法的设备和一种质谱仪。 更具体地但非唯一地，本发明涉及一种质谱方法，其包括通过测量来自样品的两个或多个不同区域的亲和和离子离子并鉴定样品中的变化的步骤，从样品中分离亲本和断裂离子 样品中区域之间的亲本离子数，以及两个区域之间的分离离子数量的相应变化。

公开(公告)号：US20150076339A1

公开(公告)日：2015-03-19

申请号：US14483204

申请日：2014-09-11

Applicant: Georgia Tech Research Corporation

Inventor： Andrei G. Fedorov ,  Peter Arthur Kottke

IPC: H01J49/04 ,  H01J49/00 ,  H01J37/28

CPC classification number: H01J49/0431 ,  H01J37/28 ,  H01J49/0004 ,  H01J2237/05 ,  H01J2237/2803 ,  H01J2237/2809 ,  H01J2237/285

Abstract: SMS probe imaging systems, methods of use thereof, and the like are disclosed. Embodiments of the present disclosure can use direct interrogation of objects (e.g., cells or tissue) within a small pool/droplet of liquid, optional thermal, mechanical, electrical, optical and chemical manipulation, followed immediately by liquid sampling, optional sample conditioning, and soft ionization of biomolecules.

Abstract translation: 公开了SMS探针成像系统及其使用方法等。 本公开的实施例可以使用在小池/液滴中的物体（例如，细胞或组织）的直接询问，可选的热，机械，电学，光学和化学操作，随后通过液体取样，可选的样品调节和 生物分子的软电离。

公开(公告)号：US08723114B2

公开(公告)日：2014-05-13

申请号：US13679181

申请日：2012-11-16

Applicant: National University of Singapore

Inventor： Anjam Khursheed ,  Hung Quang Hoang

IPC: H01J37/26 ,  H01J3/26 ,  H01J49/48 ,  H01J49/44

CPC classification number: H01J49/48 ,  H01J3/26 ,  H01J37/244 ,  H01J37/26 ,  H01J37/28 ,  H01J49/44 ,  H01J2237/05 ,  H01J2237/0535 ,  H01J2237/24485

Abstract: A sequential radial mirror analyzer (RMA) (100) for facilitating rotationally symmetric detection of charged particles caused by a charged beam incident on a specimen (112) is disclosed. The RMA comprises a 0V equipotential exit grid (116), and a plurality of electrodes (119, 120a, 120b, 120c) electrically configured to generate corresponding electrostatic fields for deflecting at least some of the charged particles of a single energy level to exit through the exit grid (116) to form a second-order focal point on a detector (106). The second-order focal point is associated with the single energy level, and the detector (106) is disposed external to the corresponding electrostatic fields. A related method is also disclosed.

Abstract translation: 公开了一种用于促进由入射在样本（112）上的带电束引起的带电粒子的旋转对称检测的顺序径向镜分析器（RMA）（100）。 RMA包括0V等电位出口格栅（116），以及多个电极（119,120a，120b，120c），其被电配置为产生相应的静电场，用于偏转单个能级的至少一些带电粒子以便通过 出口格栅（116）以在检测器（106）上形成二阶焦点。 二阶焦点与单个能级相关联，并且检测器（106）设置在相应静电场的外部。 还公开了相关方法。

公开(公告)号：US20100327161A1

公开(公告)日：2010-12-30

申请号：US12823375

申请日：2010-06-25

Applicant: Paul Mooney

Inventor： Paul Mooney

IPC: G01N23/00

CPC classification number: H01J37/05 ,  H01J37/244 ,  H01J37/26 ,  H01J2237/05 ,  H01J2237/2441 ,  H01J2237/24455 ,  H01J2237/24485 ,  H01J2237/26 ,  H01J2237/2802

Abstract: Methods are disclosed for operating a device having a high energy particle detector wherein the particles create first incoming traversal events, outgoing backscatter events, higher-order in and out events and incoming events caused by particles which backscatter out of the device, hit nearby mechanical structures and are scattered back into the device. Exemplary method steps include discriminating incoming traversal events from outgoing backscatter events, higher-order in and out events and incoming events by limiting dose rate to a level at ensures that separate events do not overlap and discriminating events from background and from other events based on total energy in each event; discriminating backscatter events from incoming traversal events based on electron path shape; or determining that a first event and a second event are coincident with each other and separating incoming form backscatter events based on electron path shape and energy level.

Abstract translation: 公开了用于操作具有高能量粒子检测器的装置的方法，其中颗粒产生第一进入的穿越事件，出射的后向散射事件，高阶进入和离开事件以及由反向散射出装置的颗粒引起的进入事件，撞击附近的机械结构 并分散回设备。 示例性方法步骤包括通过将剂量率限制到一个水平来区分进入的遍历事件与输出的后向散射事件，高阶进入和离开事件以及进入的事件，以确保单独的事件不与基于总计的背景和来自其他事件的事件重叠和区分事件 每个事件的能量; 基于电子路径形状鉴别反向散射事件与进入的穿越事件; 或者确定第一事件和第二事件彼此重合，并基于电子路径形状和能级分离入射形式的反向散射事件。

公开(公告)号：US07692139B2

公开(公告)日：2010-04-06

申请号：US11872576

申请日：2007-10-15

Applicant: Bon Woong Koo ,  Frank Sinclair

Inventor： Bon Woong Koo ,  Frank Sinclair

IPC: H01J37/317

CPC classification number: H01J37/026 ,  H01J37/3171 ,  H01J2237/0042 ,  H01J2237/04 ,  H01J2237/05

Abstract: A system for ion beam neutralization includes a beamguide configured to transport an ion beam through a dipole field, a first array of magnets and a second array of magnets configured to generate a multi-cusp magnetic field, the first array of magnets being on a first side of the ion beam path and the second array of magnets being on a second side of the ion beam path. The system may further include a charged particle source having one or more apertures configured to inject charged particles into the ion beam. The system may furthermore align the one or more apertures with at least one of the first array of magnets and the second array of magnets to align the injected charged particles from the charged particle source with one or more magnetic regions for an effective charged particle diffusion into the ion beam.

Abstract translation: 用于离子束中和的系统包括被配置为将离子束传送通过偶极场的波导，第一磁体阵列和被配置为产生多尖点磁场的第二磁体阵列，第一磁体阵列位于第一 离子束路径的一侧和第二磁体阵列位于离子束路径的第二侧上。 该系统还可以包括具有一个或多个孔的带电粒子源，所述孔被配置为将带电粒子注入到离子束中。 该系统还可以将一个或多个孔与第一磁体阵列和第二磁体阵列中的至少一个对准，以使来自带电粒子源的注入的带电粒子与一个或多个磁性区域对准，以使有效的带电粒子扩散成 离子束。