公开(公告)号：US06873163B2

公开(公告)日：2005-03-29

申请号：US10052024

申请日：2002-01-18

Applicant: Dawn A. Bonnell ,  Sergei V. Kalinin ,  Rodolfo Antonio Alvarez

Inventor： Dawn A. Bonnell ,  Sergei V. Kalinin ,  Rodolfo Antonio Alvarez

IPC: G01Q60/54 ,  G01R1/07 ,  G01R33/038 ,  G01R31/26

CPC classification number: G01Q60/54 ,  G01R1/071 ,  G01R33/0385 ,  Y10S977/852

Abstract: A scanning probe detects phase changes of a cantilevered tip proximate to a sample, the oscillations of the cantilevered tip are induced by a lateral bias applied to the sample to quantify the local impedance of the interface normal to the surface of the sample. An ac voltage having a frequency is applied to the sample. The sample is placed at a fixed distance from the cantilevered tip and a phase angle of the cantilevered tip is measured. The position of the cantilevered tip is changed relative to the sample and another phase angle is measured. A phase shift of the deflection of the cantilevered tip is determined based on the phase angles. The impedance of the grain boundary, specifically interface capacitance and resistance, is calculated based on the phase shift and the frequency of the ac voltage. Magnetic properties are measured by applying a dc bias to the tip that cancels electrostatic forces, thereby providing direct measurement of magnetic forces.

Abstract translation: 扫描探针检测靠近样品的悬臂尖端的相变，悬臂尖端的振荡由施加到样品的横向偏压引起，以量化与样品表面垂直的界面的局部阻抗。 对样品施加具有频率的交流电压。 将样品放置在与悬臂尖一定距离处，并测量悬臂尖的相位角。 悬臂尖端的位置相对于样品而改变，另外测量相位角。 基于相位角确定悬臂尖端偏转的相移。 基于相移和交流电压的频率计算晶界的阻抗，特别是界面电容和电阻。 通过将直流偏压施加到尖端以消除静电力来测量磁性，从而提供对磁力的直接测量。

公开(公告)号：US20220065895A1

公开(公告)日：2022-03-03

申请号：US17414207

申请日：2019-09-23

Applicant: IMEC VZW ,  Katholieke Universiteit Leuven, KU LEUVEN R&D

Inventor： Kristof Paredis ,  Jonathan Op de Beeck ,  Claudia Fleischmann ,  Wilfried Vandervorst

IPC: G01Q10/06 ,  G01Q60/54 ,  G01Q20/02

Abstract: Example embodiments relate to methods and apparatuses for aligning a probe for scanning probe microscopy (SPM) to the tip of a pointed sample. One embodiments includes a method for aligning an SPM probe to an apex area of a free-standing tip of a pointed sample. The method includes providing an SPM apparatus that includes the SPM probe; a sample holder; a drive mechanism; and detection, control, and representation tools for acquiring and representing an image of a surface scanned by the SPM probe. The method also includes mounting the sample on the sample holder. Further, the method includes positioning the probe tip of the SPM, determining a 2-dimensional area that includes the pointed sample, performing an SPM acquisition scan, evaluating and acquired image, and placing the SPM probe in a position where it is aligned with an apex area of the free-standing tip of the pointed sample.

公开(公告)号：US10234479B2

公开(公告)日：2019-03-19

申请号：US15482734

申请日：2017-04-08

Applicant: BEIHANG UNIVERSITY

Inventor： Zhaowen Yan ,  Jianwei Wang ,  Wei Zhang ,  Donglin Su

IPC: G01Q60/54

Abstract: The resonance structure is that two rows of ground via holes are placed symmetrically along two sides of the CB-CPW central conductor; each row of the via holes are equally spaced; every via hole connects a top shield plane layer, a first middle layer and a bottom shield plane layer of the magnetic probe; every via hole is placed out of a rectangle gap at the bottom of the magnetic probe; the via holes form a fence. The construction method: 1. constructing a simulation model formed by the magnetic probe and a 50Ω microstrip in a CST® microwave studio; 2. simulation setting; 3. placing via holes along two sides of the central conductor; 4. connecting a 50Ω matching load to the second end of the microstrip and defining the first end as microstrip port1; defining the end on which mount a SMA connector as probe port2; simulating S21.

公开(公告)号：US10203354B2

公开(公告)日：2019-02-12

申请号：US15850430

申请日：2017-12-21

Applicant: National University Corporation Nagoya Institute of Technology ,  OLYMPUS CORPORATION

Inventor： Masashi Kitazawa ,  Michitsugu Arima ,  Masaki Tanemura

IPC: G01Q60/54 ,  G01Q60/56 ,  G01Q70/12 ,  G01Q70/10

Abstract: The present invention provides a cantilever for a scanning type probe microscope, the cantilever including a support portion, a lever portion extending from the support portion, a protrusion portion formed on a free end side of the lever portion, an apex angle of the protrusion portion being an acute angle, and a probe in which a fine wire formed at a distal end of the protrusion portion is coated with a functional film, and a major axis/minor axis ratio of a cross-sectional shape of the probe is smaller than a major axis/minor axis ratio of a cross-sectional shape of the fine wire.

公开(公告)号：US20180246143A1

公开(公告)日：2018-08-30

申请号：US15965175

申请日：2018-04-27

Applicant: PRESIDENT AND FELLOWS OF HARVARD COLLEGE

Inventor： Michael S. GRINOLDS ,  Sungkun HONG ,  Patrick MALETINSKY ,  Amir YACOBY

IPC: G01Q70/14 ,  G01N21/64 ,  G01R33/60 ,  G01R33/12 ,  G01Q60/54 ,  G01Q60/38

CPC classification number: G01Q70/14 ,  G01N21/645 ,  G01N24/10 ,  G01N2201/10 ,  G01Q30/025 ,  G01Q60/08 ,  G01Q60/38 ,  G01Q60/54 ,  G01R33/022 ,  G01R33/032 ,  G01R33/1284 ,  G01R33/323 ,  G01R33/60

Abstract: A sensing probe may be formed of a diamond material comprising one or more spin defects that are configured to emit fluorescent light and are located no more than 50 nm from a sensing surface of the sensing probe. The sensing probe may include an optical outcoupling structure formed by the diamond material and configured to optically guide the fluorescent light toward an output end of the optical outcoupling structure. An optical detector may detect the fluorescent light that is emitted from the spin defects and that exits through the output end of the optical outcoupling structure after being optically guided therethrough. A mounting system may hold the sensing probe and control a distance between the sensing surface of the sensing probe and a surface of a sample while permitting relative motion between the sensing surface and the sample surface.

公开(公告)号：US20110225684A1

公开(公告)日：2011-09-15

申请号：US13024589

申请日：2011-02-10

Applicant: TSUNEO NAKAGOMI ,  NORIMITSU MATSUSITA

Inventor： TSUNEO NAKAGOMI ,  NORIMITSU MATSUSITA

IPC: G01Q60/54 ,  G01Q60/50

CPC classification number: G11B5/455 ,  G11B5/3173 ,  Y10T428/11 ,  Y10T428/1179

Abstract: A magnetic head inspection method is provided with the step that an area smaller than a half of a scanning and measurement area of a magnetic probe in a cantilever unit of the MFM is set as a scanning and measurement area on a surface of a recording portion of the magnetic head that is scanned by the AFM, so as to greatly reduce the inspection time (tact time) of the AFM.

Abstract translation: 磁头检查方法具有以下步骤：将MFM的悬臂单元中的磁性探针的扫描和测量区域的一半以下的面积设定为扫描和测量区域在记录部分的记录部分的表面上 由AFM扫描的磁头，大大缩短了AFM的检查时间（节拍时间）。

公开(公告)号：US06917198B2

公开(公告)日：2005-07-12

申请号：US10857368

申请日：2004-05-21

Applicant: Mark B. Johnson ,  Michael Miller ,  Brian Bennett

Inventor： Mark B. Johnson ,  Michael Miller ,  Brian Bennett

IPC: G01B7/14 ,  G01Q60/54 ,  G01R33/07

CPC classification number: G01R33/07 ,  Y10S977/853 ,  Y10S977/865

Abstract: A modified hybrid Hall effect device is provided which is the combination of a conventional Hall effect device and a second Hall effect device having a Hall plate coupled to a ferromagnetic layer. The hybrid Hall effect device can be used to determine the independent magnetic field vector components comprising a vector magnetic field, such as for determining the {circumflex over (x)} and the {circumflex over (z)} components of a magnetic field, or for measuring the total magnitude of a vector magnetic field of any orientation. The modified Hall Effect device can be adapted for use as a magnetic field sensor for the detection of macroscopic objects that have associated magnetic fields, or for microscopic objects that have been tagged by microscopic magnetic particles. In one specific form, a plurality of hybrid Hall devices are electrically connected together to form an array in which a plurality of rows of hybrid Hall devices are electrically coupled to each other along a current axis, and the array is used for the detection of microscopic objects.

公开(公告)号：US06878444B2

公开(公告)日：2005-04-12

申请号：US10391763

申请日：2003-03-20

Applicant: Shuichi Suzuki ,  Kishio Hidaka ,  Mistuo Hayashibara

Inventor： Shuichi Suzuki ,  Kishio Hidaka ,  Mistuo Hayashibara

IPC: C01B31/02 ,  G01Q60/54 ,  G01Q60/56 ,  G01Q70/12 ,  G01Q80/00 ,  G11B5/00 ,  G11B5/127 ,  G11B5/187 ,  G11B9/00 ,  H01F1/00 ,  B32B5/16

CPC classification number: H01F1/0072 ,  C01B32/16 ,  C01B32/168 ,  C01B2202/02 ,  C01B2202/06 ,  C01B2202/20 ,  G01Q60/54 ,  G01Q70/12 ,  G11B5/127 ,  G11B5/1278 ,  G11B5/187 ,  G11B9/1409 ,  G11B2005/0002 ,  Y10S428/90 ,  Y10S977/742 ,  Y10S977/838 ,  Y10T428/2933 ,  Y10T428/2958 ,  Y10T428/2991 ,  Y10T428/30 ,  Y10T428/31

Abstract: A carbon nanotube which exhibits ferromagnetism without a ferromagnetic metal imparted thereto and also has high thermal stability is provided. The carbon nanotube is characterized by being doped with nitrogen (which differs from carbon in valence electron) such that the doped nitrogen is segregated in a strip form at one end of the carbon nanotube. The thus doped nitrogen causes the carbon nanotube to have a difference in electron density and to exhibit ferromagnetism. The present invention makes it possible to provide a carbon nanotube exhibiting ferromagnetism without the necessity of imparting any magnetic metal thereto.

Abstract translation: 提供了表现出不赋予铁磁性金属并且具有高热稳定性的铁磁性的碳纳米管。 碳纳米管的特征在于掺杂有氮（与价电子中的碳不同），使得掺杂的氮在碳纳米管的一端分离成带状。 这样掺杂的氮导致碳纳米管具有电子密度的差异并显示出铁磁性。 本发明使得可以提供显示铁磁性的碳纳米管，而不需要赋予其任何磁性金属。

公开(公告)号：US6081115A

公开(公告)日：2000-06-27

申请号：US49995

申请日：1998-03-30

Applicant: Koichi Mukasa ,  Kazunobu Hayakawa ,  Kazuhisa Sueoka ,  Kohji Nakamura ,  Yuichi Tazuke ,  Hideo Hasegawa ,  Tamio Oguchi

Inventor： Koichi Mukasa ,  Kazunobu Hayakawa ,  Kazuhisa Sueoka ,  Kohji Nakamura ,  Yuichi Tazuke ,  Hideo Hasegawa ,  Tamio Oguchi

IPC: G01R33/12 ,  G01N27/00 ,  G01N37/00 ,  G01Q30/20 ,  G01Q60/00 ,  G01Q60/24 ,  G01Q60/50 ,  G01Q60/54 ,  H01F41/30 ,  G01R33/02 ,  G01N24/00

CPC classification number: G01Q60/08 ,  B82Y35/00 ,  B82Y40/00 ,  G01Q60/32 ,  G01Q60/38 ,  G01Q60/54 ,  H01F41/303 ,  B82Y25/00 ,  Y10S977/852

Abstract: In a method of measuring an exchange force between a specimen and a probe, the specimen and probe are faced to each other with a distance within a close proximity or RKKY-type exchange interaction region from a distance at which conduction electron clouds begin to be overlapped with each other to a distance at which localized electron clouds are not substantially overlapped with each other, a relative displacement of the specimen and probe is detected to measure a first force under such a condition that directions of magnetic moments of said specimen surface and probe are in parallel with each other to derive a first force and under such a condition that directions of magnetic moments of said specimen surface and probe are in anti-parallel with each other to derive a second force. An exchange force is derived as a difference between said first and second forces. Magnetic property of the specimen can be evaluated on the basis of the thus measured exchange force.

Abstract translation: 在测量样品和探针之间的交换力的方法中，样品和探针彼此面对彼此，距离传导电子云开始重叠的距离在距离近的距离或RKKY型交换相互作用区 彼此相距一定距离，在该距离处局部电子云彼此基本不重叠，检测样本和探针的相对位移，以便在所述样本表面和探针的磁矩方向为 彼此平行地导出第一力并且在所述样本表面和探针的磁矩的方向彼此反平行以导出第二力的条件下。 交换力被导出为所述第一和第二力之间的差。 可以基于如此测量的交换力来评估样品的磁性。

公开(公告)号：US5900729A

公开(公告)日：1999-05-04

申请号：US821985

申请日：1997-03-20

Applicant: Andreas Moser ,  Dieter Klaus Weller

Inventor： Andreas Moser ,  Dieter Klaus Weller

IPC: G01B7/34 ,  G01B7/00 ,  G01N37/00 ,  G01Q60/54 ,  G01Q60/56 ,  G01R33/038 ,  G01R33/12 ,  G01N33/02

CPC classification number: G01Q60/56 ,  B82Y35/00 ,  G01Q60/54 ,  G01R33/0385 ,  B82Y25/00 ,  Y10S977/849 ,  Y10S977/86 ,  Y10S977/865 ,  Y10S977/873 ,  Y10S977/887

Abstract: A probe for use in an alternating current magnetic force microscopy (MFM) system is located on the free end of a cantilever in the MFM system. The probe has a pair of magnetic poles that form part of a magnetic yoke and a patterned electrically conductive coil wound through the yoke. The probe includes a probe tip that has a magnetic surface layer that is magnetically coupled to one of the poles and extends from it. When alternating current from the MFM system is passed through the probe coil the magnetization direction of the probe tip correspondingly alternates. The interaction of these alternating magnetic fields from the probe tip with the magnetic fields emanating from the sample whose magnetic fields are to be measured causes the cantilever to deflect between two extreme positions. The probe can be formed from a portion of a disk drive air-bearing slider with a patterned thin film inductive write head on its trailing end by growing the probe tip from the slider's air-bearing surface so as to be in contact with the gap and one of the poles of the write head. The probe can also be part of an integrated single-piece structure that includes the cantilever, probe body and probe tip which are formed using conventional thin film deposition and lithographic processes.

Abstract translation: 用于交流磁力显微镜（MFM）系统的探头位于MFM系统中悬臂的自由端。 探头具有形成磁轭的一部分的一对磁极和缠绕在磁轭上的图案化的导电线圈。 探针包括具有磁性表面层的探针尖端，磁性表面层磁耦合到一个极并从其延伸。 当来自MFM系统的交流电流通过探针线圈时，探针尖端的磁化方向相应地交替。 来自探针尖端的这些交变磁场与要测量磁场的样品发出的磁场的相互作用导致悬臂在两个极限位置之间偏转。 探头可以由具有图案化的薄膜感应写头的盘驱动器空气轴承滑块的一部分形成，通过从滑块的空气轴承表面生长探针尖端以便与间隙接触，并且 写头的极点之一。 探头也可以是集成的单片结构的一部分，其包括使用常规薄膜沉积和光刻工艺形成的悬臂，探针体和探针尖端。