公开(公告)号：US09482692B2

公开(公告)日：2016-11-01

申请号：US14777667

申请日：2014-03-28

Applicant: AKITA UNIVERSITY ,  OSAKA UNIVERSITY

Inventor： Hitoshi Saito ,  Satoru Yoshimura ,  Yukinori Kinoshita ,  Hikaru Nomura ,  Ryoichi Nakatani

IPC: G01Q60/52 ,  G01Q60/56 ,  G01Q60/50 ,  G01Q60/54

CPC classification number: G01Q60/52 ,  G01Q60/50 ,  G01Q60/54 ,  G01Q60/56

Abstract: A magnetic field measuring device including: a vibrational probe unit having a probe that includes one or more material(s) whose intensity of magnetization is proportionate to an external magnetic field, a mechanical vibration source for the probe; a vibration detector detecting a vibration frequency and amplitude of the probe; an alternating-current magnetic field generator applying to the probe an alternating-current magnetic field; a direct-current external magnetic field generator applying a direct-current external magnetic field to the probe; a frequency modulation detector detecting frequency modulation occurring to the mechanical vibration of the probe; a direct-current external magnetic field controller adjusting the intensity of the direct-current external magnetic field applied to the probe; and a direct-current magnetic field determination unit determining a value of the direct-current magnetic field originating from a specimen.

Abstract translation: 一种磁场测量装置，包括：振动探针单元，其具有探针，所述探针包括其强度与外部磁场成比例的一种或多种材料，所述探针的机械振动源; 检测探头的振动频率和振幅的振动检测器; 交流磁场发生器，向探头施加交流磁场; 将直流外部磁场施加到探针的直流外部磁场发生器; 检测对所述探针的机械振动发生的频率调制的频率调制检测器; 直流外部磁场控制器调节施加到探头的直流外部磁场的强度; 以及直流磁场确定单元，确定源自试样的直流磁场的值。

公开(公告)号：US6163519A

公开(公告)日：2000-12-19

申请号：US518104

申请日：2000-03-03

Applicant: Ryo Kuroda ,  Yasuhiro Shimada

Inventor： Ryo Kuroda ,  Yasuhiro Shimada

IPC: G01B11/30 ,  G01N37/00 ,  G01Q10/06 ,  G01Q30/02 ,  G01Q60/02 ,  G01Q60/16 ,  G01Q60/18 ,  G01Q60/22 ,  G01Q60/38 ,  G01Q60/56 ,  G01Q70/06 ,  G01Q80/00 ,  G02B6/122 ,  G11B7/005 ,  G11B7/12 ,  G11B7/14 ,  G11B7/22 ,  G11B9/00 ,  G11B9/14 ,  G11B11/00 ,  G11B11/03 ,  G11B7/00

CPC classification number: G01Q60/22 ,  G01Q70/06 ,  G01Q80/00 ,  G02B6/122 ,  G11B7/005 ,  G11B7/12 ,  G11B7/14 ,  G11B7/22 ,  G11B9/14 ,  G11B9/1409 ,  G11B11/03 ,  Y10S977/862

Abstract: In a method of manufacturing a probe with a minute aperture, the probe is coated with conductive material, a tip of the probe is brought into contact with a conductive substrate and a voltage is applied between the probe and the substrate to remove the coating material at the tip of the probe and form the minute aperture at the tip of the probe. The thus-fabricated probe can be used in a scanning near-field optical microscope for observing an object on the basis of a change in intensity of near-field light and an information recording and/or reproducing apparatus for reproducing information recorded in a record medium by using near-field light.

Abstract translation: 在制造具有微小孔径的探针的方法中，探针用导电材料涂覆，探针的尖端与导电基底接触，并且在探针和基底之间施加电压以除去涂层材料 探针的尖端，并在探针的尖端形成微小的孔。 这样制造的探针可以用于扫描近场光学显微镜，用于基于近场光强度的变化来观察物体，以及用于再现记录在记录介质中的信息的信息记录和/或再现装置 通过使用近场光。

公开(公告)号：US6078174A

公开(公告)日：2000-06-20

申请号：US59399

申请日：1998-04-14

Applicant: Koichi Mukasa ,  Kazunobu Hayakawa ,  Kazuhisa Sueoka ,  Kohji Nakamura ,  Yuichi Tazuke ,  Hideo Hasegawa ,  Tamio Oguchi

Inventor： Koichi Mukasa ,  Kazunobu Hayakawa ,  Kazuhisa Sueoka ,  Kohji Nakamura ,  Yuichi Tazuke ,  Hideo Hasegawa ,  Tamio Oguchi

IPC: G01B7/34 ,  G01B7/00 ,  G01N23/225 ,  G01N24/00 ,  G01N37/00 ,  G01Q10/06 ,  G01Q20/04 ,  G01Q60/24 ,  G01Q60/36 ,  G01Q60/40 ,  G01Q60/50 ,  G01Q60/54 ,  G01Q60/56 ,  G01R33/02

CPC classification number: G01Q60/08 ,  B82Y35/00 ,  G01Q60/32 ,  G01Q60/38 ,  G01Q60/54 ,  Y10S977/852

Abstract: In an apparatus for measuring an exchange force between a specimen and a probe, the specimen and probe are faced to each other with a distance within a close proximity or RKKY-type exchange interaction region from a distance at which conduction electron clouds begin to be overlapped with each other to a distance at which localized electron clouds are not substantially overlapped with each other. In order to prevent the probe from being attracted to the specimen by a force between the specimen and the force, a piezoelectric element is provided on a cantilever and a control signal supplied to the piezoelectric element is produced in accordance with a displacement of the cantilever to control a spring constant of the cantilever. The exchange force between the specimen and the probe is calculated from the control signal supplied to the piezoelectric element.

Abstract translation: 在用于测量样本和探针之间的交换力的装置中，样本和探针彼此面对彼此，距离传导电子云开始重叠的距离在距离近的距离或RKKY型交换相互作用区域 彼此间隔一定距离，在该距离处局部电子云基本上不重叠。 为了通过试样和力之间的力阻止探针被吸引到样品上，在悬臂上设置压电元件，并且根据悬臂的位移产生供给到压电元件的控制信号 控制悬臂的弹簧常数。 根据提供给压电元件的控制信号计算样品和探针之间的交换力。

公开(公告)号：US08490211B1

公开(公告)日：2013-07-16

申请号：US13537010

申请日：2012-06-28

Applicant: Sean P. Leary

Inventor： Sean P. Leary

IPC: G01Q60/56

CPC classification number: G01Q60/56 ,  G01Q30/06 ,  G11B5/3166

Abstract: Methods for referencing related magnetic head microscopy scans to reduce processing requirements for high resolution imaging are provided. One such method includes performing a low resolution pole tip recession scan of a pole tip area of a magnetic head, performing a high resolution writer pole recession scan of a writer pole area of the magnetic head, preparing a portion of the low resolution scan for alignment, performing a rough leveling of the high resolution scan, aligning the portion of the low resolution scan and the high resolution scan using pattern recognition and a database of features, subtracting the high resolution scan from the aligned portion of the low resolution scan, and leveling the high resolution scan based on a result of the subtraction.

Abstract translation: 提供了参考相关磁头显微镜扫描以减少高分辨率成像的处理要求的方法。 一种这样的方法包括执行磁头的磁极尖端区域的低分辨率极尖衰退扫描，执行磁头的写入器极区域的高分辨率写入器极衰退扫描，准备低分辨率扫描的一部分用于对准 ，执行高分辨率扫描的粗略调平，使用图案识别对准低分辨率扫描的一部分和高分辨率扫描，以及特征数据库，从低分辨率扫描的对准部分减去高分辨率扫描，以及调平 基于减法的结果的高分辨率扫描。

公开(公告)号：US20050211915A1

公开(公告)日：2005-09-29

申请号：US10499174

申请日：2002-12-18

Applicant: Arnout Van den Bos ,  Leon Abelmann ,  Jacobus Lodder

Inventor： Arnout Van den Bos ,  Leon Abelmann ,  Jacobus Lodder

IPC: G01Q60/50 ,  G01Q60/54 ,  G01Q60/56 ,  G01R33/038 ,  G01T1/04

CPC classification number: G01Q60/50 ,  G01Q60/54 ,  G01Q60/56 ,  G01R33/0385

Abstract: The invention relates to a probe for a magnetic force microscope, comprising a movable cantilever placed in the plane of a wafer and a tip placed substantially at right angles to the cantilever, wherein the cantilever is able to move and its oscillation direction is in the wafer plane, and the tip lies virtually in or parallel to this wafer plane.

Abstract translation: 本发明涉及一种用于磁力显微镜的探针，其包括放置在晶片平面中的可移动悬臂和与悬臂基本成直角放置的尖端，其中悬臂能够移动并且其振荡方向在晶片 平面，并且尖端实际上位于或平行于该晶片平面。

公开(公告)号：US06918286B2

公开(公告)日：2005-07-19

申请号：US10140117

申请日：2002-05-08

Applicant: Masashi Kitazawa ,  Koichi Shiotani

Inventor： Masashi Kitazawa ,  Koichi Shiotani

IPC: G01Q60/16 ,  G01Q60/38 ,  G01Q60/56 ,  G01Q70/00 ,  G01Q70/06 ,  G01R33/02

CPC classification number: G01Q70/10

Abstract: A silicon nitride film is formed all over the surface of a cantilever prepared as including a support portion made by processing single-crystal silicon wafer, a lever portion extended from the support portion, formed with a controlled thickness from single-crystal silicon, and a probe portion made of single-crystal silicon disposed toward the free end of the lever portion with having its probe axis perpendicular to the lever portion, so as to have a greater film thickness on the side face of the probe portion toward the free end of the lever portion, thereby constructing SPM cantilever of configuration where the terminal end portion of the probe portion is tilted toward the free end by a certain angle θ with respect to the probe axis. The SPM cantilever thereby can be achieved as capable of measuring surface conditions always at high resolution correspondingly to measuring condition or sample shape.

Abstract translation: 在悬臂的整个表面上形成氮化硅膜，该悬臂被制备为包括通过加工单晶硅晶片制成的支撑部分，从支撑部分延伸的杠杆部分，以单晶硅形成受控厚度， 由单晶硅制成的探针部分朝向杠杆部分的自由端设置，其探头轴线垂直于杆部分，以便在探头部分的侧面朝向自由端的较大的膜厚度 从而构成SPM悬臂结构，其中探头部分的末端部分相对于探针轴向自由端倾斜一定角度θ。 因此，SPM悬臂可以实现为能够相应于测量条件或样品形状一直以高分辨率测量表面条件。

公开(公告)号：US6046972A

公开(公告)日：2000-04-04

申请号：US825129

申请日：1997-03-27

Applicant: Ryo Kuroda ,  Yasuhiro Shimada

Inventor： Ryo Kuroda ,  Yasuhiro Shimada

IPC: G01B11/30 ,  G01N37/00 ,  G01Q10/06 ,  G01Q30/02 ,  G01Q60/02 ,  G01Q60/16 ,  G01Q60/18 ,  G01Q60/22 ,  G01Q60/38 ,  G01Q60/56 ,  G01Q70/06 ,  G01Q80/00 ,  G02B6/122 ,  G11B7/005 ,  G11B7/12 ,  G11B7/14 ,  G11B7/22 ,  G11B9/00 ,  G11B9/14 ,  G11B11/00 ,  G11B11/03 ,  G11B7/00

CPC classification number: G01Q60/22 ,  B82Y20/00 ,  B82Y35/00 ,  G01Q70/06 ,  G02B6/122 ,  G11B11/03 ,  G11B7/005 ,  G11B7/12 ,  G11B7/14 ,  G11B7/22 ,  G11B9/14 ,  G11B9/1409 ,  B82Y10/00 ,  G01Q80/00 ,  Y10S977/862

Abstract: In a method of manufacturing a probe with a minute aperture, the probe is coated with conductive material, a tip of the probe is brought into contact with a conductive substrate and a voltage is applied between the probe and the substrate to remove the coating material at the tip of the probe and form the minute aperture at the tip of the probe. The thus-fabricated probe can be used in a scanning near-field optical microscope for observing an object on the basis of a change in intensity of near-field light and an information recording and/or reproducing apparatus for reproducing information recorded in a record medium by using near-field light.

Abstract translation: 在制造具有微小孔径的探针的方法中，探针用导电材料涂覆，探针的尖端与导电基底接触，并且在探针和基底之间施加电压以除去涂层材料 探针的尖端，并在探针的尖端形成微小的孔。 这样制造的探针可以用于扫描近场光学显微镜，用于基于近场光强度的变化来观察物体，以及用于再现记录在记录介质中的信息的信息记录和/或再现装置 通过使用近场光。

公开(公告)号：US5471064A

公开(公告)日：1995-11-28

申请号：US120541

申请日：1993-09-14

Applicant: Hajime Koyanagi ,  Sumio Hosaka ,  Ryo Imura

Inventor： Hajime Koyanagi ,  Sumio Hosaka ,  Ryo Imura

IPC: B82B3/00 ,  G01Q30/02 ,  G01Q60/00 ,  G01Q60/10 ,  G01Q60/12 ,  G01Q60/18 ,  G01Q60/24 ,  G01Q60/40 ,  G01Q60/56 ,  G01Q60/58 ,  G01Q70/14 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/14 ,  G11B11/00 ,  G11B11/03 ,  H01J37/28 ,  H01J37/30

CPC classification number: B82B3/00 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  G11B11/007 ,  G11B9/14 ,  G11B9/1409 ,  G11B9/1418 ,  G11B9/1445 ,  G11B9/149 ,  G11B11/03 ,  G11B2005/0021 ,  H01J2237/31738 ,  Y10S977/856 ,  Y10S977/857 ,  Y10S977/86 ,  Y10S977/875 ,  Y10S977/879 ,  Y10S977/947

Abstract: A method and apparatus for precision machining a surface suitable for use as a data recorder, using a scanning probe microscope (SPM) capable of observing an electrically insulating surface. The SPM includes a probe which comprises a tip having a pointed end, and also including a conductive layer applied on a surface of the tip. The tip is brought into close proximity to the surface which is to be machined and a machining voltage is applied between the tip and the surface to machine the surface.

Abstract translation: 一种用于使用能够观察电绝缘表面的扫描探针显微镜（SPM）来精密加工适于用作数据记录器的表面的方法和装置。 SPM包括探针，其包括具有尖端的尖端，并且还包括施加在尖端的表面上的导电层。 尖端被接近要加工的表面，并且在尖端和表面之间施加加工电压以加工表面。

公开(公告)号：US08214918B2

公开(公告)日：2012-07-03

申请号：US12623329

申请日：2009-11-20

Applicant: Nissim Amos ,  Sakhrat Khizroev ,  Rabee Ikkawi ,  Robert Haddon ,  Robert Fernandez

Inventor： Nissim Amos ,  Sakhrat Khizroev ,  Rabee Ikkawi ,  Robert Haddon ,  Robert Fernandez

IPC: G01Q60/56

CPC classification number: G01Q60/56

Abstract: Magnetic Force Microscopy (MFM) probe tips that provide enhanced spatial resolution and methods of manufacture are provided. In one aspect, two or more magnetically-decoupled layers may be deposited on an AFM probe in order to create an active magnetic region at about the apex of the probe tip with dimensions less than about 10 nanometers. In another aspect, nanoscale patterning techniques may be employed to fabricate probe tips that possess plateau features. These plateau features may serve as substrates for the deposition of magnetic films having properties similar to magnetic recording media. Machining techniques, such as Focused Ion Beam (FIB) may be further employed to reduce the size of the magnetic materials deposited upon the substrate. Beneficially, because the plateaus of the substrate are substantially flat and of known geometry, and the magnetic properties of magnetic films deposited on flat surfaces are similar to those deposited upon the plateau, the magnetization of the MFM probe tips may be determined to high accuracy. In this manner, fine control over the magnetic properties of MFM probe tips may be achieved, providing enhanced MFM resolution.

Abstract translation: 提供了提供增强的空间分辨率和制造方法的磁力显微镜（MFM）探针尖端。 在一个方面，可以在AFM探针上沉积两个或更多个磁解耦层，以便在尺寸小于约10纳米的探针尖端的顶点附近形成活性磁区。 在另一方面，可采用纳米尺度图案化技术来制造具有平台特征的探针尖端。 这些高原特征可以用作沉积具有类似于磁记录介质的性质的磁性膜的衬底。 可以进一步采用诸如聚焦离子束（FIB）的加工技术来减小沉积在基底上的磁性材料的尺寸。 有利的是，由于基板的平台基本上是扁平的并且具有已知的几何形状，并且沉积在平坦表面上的磁性膜的磁性能类似于沉积在平台上的磁性膜，所以MFM探针尖端的磁化可以被确定为高精度。 以这种方式，可以实现对MFM探针尖端的磁性能的精细控制，提供增强的MFM分辨率。

公开(公告)号：US20100138964A1

公开(公告)日：2010-06-03

申请号：US12623329

申请日：2009-11-20

Applicant: Nissim Amos ,  Sakhrat Khizroev ,  Rabee Ikkawi ,  Robert Haddon ,  Robert Fernandez

Inventor： Nissim Amos ,  Sakhrat Khizroev ,  Rabee Ikkawi ,  Robert Haddon ,  Robert Fernandez

IPC: G01Q60/56 ,  G01Q60/54

CPC classification number: G01Q60/56

Abstract: Magnetic Force Microscopy (MFM) probe tips that provide enhanced spatial resolution and methods of manufacture are provided. In one aspect, two or more magnetically-decoupled layers may be deposited on an AFM probe in order to create an active magnetic region at about the apex of the probe tip with dimensions less than about 10 nanometers. In another aspect, nanoscale patterning techniques may be employed to fabricate probe tips that possess plateau features. These plateau features may serve as substrates for the deposition of magnetic films having properties similar to magnetic recording media. Machining techniques, such as Focused Ion Beam (FIB) may be further employed to reduce the size of the magnetic materials deposited upon the substrate. Beneficially, because the plateaus of the substrate are substantially flat and of known geometry, and the magnetic properties of magnetic films deposited on flat surfaces are similar to those deposited upon the plateau, the magnetization of the MFM probe tips may be determined to high accuracy. In this manner, fine control over the magnetic properties of MFM probe tips may be achieved, providing enhanced MFM resolution.

Abstract translation: 提供了提供增强的空间分辨率和制造方法的磁力显微镜（MFM）探针尖端。 在一个方面，可以在AFM探针上沉积两个或更多个磁解耦层，以便在尺寸小于约10纳米的探针尖端的顶点附近形成活性磁区。 在另一方面，可采用纳米尺度图案化技术来制造具有平台特征的探针尖端。 这些高原特征可以用作沉积具有类似于磁记录介质的性质的磁性膜的衬底。 可以进一步采用加工技术，例如聚焦离子束（FIB）来减小沉积在基底上的磁性材料的尺寸。 有利的是，由于基板的平台基本上是扁平的并且具有已知的几何形状，并且沉积在平坦表面上的磁性膜的磁性能类似于沉积在平台上的磁性膜，所以MFM探针尖端的磁化可以被确定为高精度。 以这种方式，可以实现对MFM探针尖端的磁性能的精细控制，提供增强的MFM分辨率。