Thin film transistor substrate for display panel
    14.
    发明授权
    Thin film transistor substrate for display panel 有权
    薄膜晶体管显示面板基板

    公开(公告)号:US08785934B2

    公开(公告)日:2014-07-22

    申请号:US13677176

    申请日:2012-11-14

    CPC classification number: H01L29/4908 H01L27/124 H01L27/1288

    Abstract: A thin film transistor substrate includes a base substrate, a gate electrode, a gate insulating layer, a surface treating layer, an active layer, a source electrode and a drain electrode. The gate electrode is formed on the base substrate. The gate insulating layer is formed on the base substrate to cover the gate electrode. The surface treating layer is formed on the gate insulating layer by treating the gate insulating layer with a nitrogen-containing gas to prevent leakage current. The active layer is formed on the surface treating layer to cover the gate electrode. The source electrode and the gate electrode that are spaced apart from each other by a predetermined distance are formed on the active layer.

    Abstract translation: 薄膜晶体管基板包括基底基板,栅极电极,栅极绝缘层,表面处理层,有源层,源电极和漏电极。 栅电极形成在基底基板上。 栅极绝缘层形成在基底基板上以覆盖栅电极。 通过用含氮气体处理栅极绝缘层,在栅极绝缘层上形成表面处理层,以防止漏电流。 在表面处理层上形成有源层以覆盖栅电极。 在有源层上形成彼此隔开预定距离的源电极和栅电极。

    Display substrate and method of manufacturing the same

    公开(公告)号:US10438974B2

    公开(公告)日:2019-10-08

    申请号:US14606986

    申请日:2015-01-27

    Abstract: According to an exemplary embodiment, a display substrate includes a gate metal pattern comprising a gate electrode, an active pattern disposed on the gate pattern and a source metal pattern disposed on the active pattern. The source metal pattern includes a first lower pattern disposed on the active pattern, a second lower pattern disposed on the first lower pattern, a low-resistance metal pattern disposed on the second lower pattern, and an upper pattern disposed on the low-resistance metal pattern. The first lower pattern, the second lower pattern, and the upper pattern each include a material that is the same.

    Display substrate including a thin film transistor and method of manufacturing the same
    17.
    发明授权
    Display substrate including a thin film transistor and method of manufacturing the same 有权
    包括薄膜晶体管的显示基板及其制造方法

    公开(公告)号:US09184181B2

    公开(公告)日:2015-11-10

    申请号:US14454822

    申请日:2014-08-08

    Abstract: A display substrate includes a gate electrode on a base substrate, an active pattern which overlaps the gate electrode and includes a metal oxide semiconductor, an insulation pattern on the active pattern, a source electrode which contacts the active pattern, a drain electrode which contacts the active pattern and is spaced apart from the source electrode, and a first passivation layer which covers the active pattern and the insulation pattern, and includes fluorine, where the active pattern includes a first portion which directly contacts the insulation pattern and overlaps the gate electrode and the insulation pattern, a second portion which contacts the first passivation layer and has an electrical conductivity substantially larger than that of the first portion, a third portion which contacts the first passivation layer, has an electrical conductivity substantially larger than that of the first portion and is spaced apart from the second portion.

    Abstract translation: 显示基板包括在基底基板上的栅极电极,与栅电极重叠并且包括金属氧化物半导体的有源图案,有源图案上的绝缘图案,与有源图案接触的源极电极, 并且与源电极间隔开,以及覆盖有源图案和绝缘图案并包括氟的第一钝化层,其中有源图案包括直接接触绝缘图案并与栅电极重叠的第一部分,以及 所述绝缘图案是接触所述第一钝化层并具有比所述第一部分的导电性大的电导率的第二部分,与所述第一钝化层接触的第三部分具有比所述第一部分的电导率大的电导率, 与第二部分间隔开。

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