公开(公告)号：US20170285296A1

公开(公告)日：2017-10-05

申请号：US15507252

申请日：2015-09-24

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Hirotoshi TERADA ,  Ikuo ARATA ,  Masataka IKESU

IPC: G02B7/02 ,  G02B21/36 ,  G02B7/16

Abstract: A solid immersion lens holder includes a first member having a first opening disposing a spherical face portion therein so that a part of the spherical face portion protrudes toward an objective lens side and a second member having a second opening disposing a contact portion therein so that a contact face protrudes toward a side opposite to the objective lens side. The first member includes three plate members disposed on the objective lens side with respect to the first opening. Each of the three plate members is provided with a protrusion portion capable of contacting the spherical face portion.

公开(公告)号：US20220155576A1

公开(公告)日：2022-05-19

申请号：US17442287

申请日：2020-03-26

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Jiro YAMASHITA ,  Yasuyuki TANABE ,  Shunsuke MATSUDA ,  Hirotoshi TERADA

IPC: G02B21/00

Abstract: Embodiments are for a confocal microscope unit attached to a connection port of a microscope including: light sources which output irradiation light to a sample to be observed; photodetectors which detect observation light generated from a sample in response to the irradiation light; a scan mirror which scans the irradiation light on the sample and guides the observation light generated from the sample to the photodetectors; a scan lens which guides the irradiation light scanned by the scan mirror to the microscope optical system and guides the observation light focused by the microscope optical system to the scan mirror; a lens barrel to which the scan lens is fixed; an attachment portion which attaches the lens barrel to the connection port; and a movable portion which supports the lens barrel so that an angle of the lens barrel with respect to the attachment portion is changeable.

公开(公告)号：US20220091182A1

公开(公告)日：2022-03-24

申请号：US17417190

申请日：2019-10-09

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA ,  Hirotaka NONAKA ,  Hiroyuki MATSUURA ,  Hirotoshi TERADA

IPC: G01R31/28 ,  G01R31/26 ,  H01L23/473

Abstract: Provided is a cooling unit to be used in an inspection of a semiconductor device. The cooling unit includes a jacket for dissipating heat of the semiconductor device. The jacket is provided with a light passing portion for passing light from the semiconductor device. The jacket has a space defining surface that faces the semiconductor device and defines a space between the space defining surface and the semiconductor device in a state where the light passing portion faces the semiconductor device. The jacket is provided with a supply flow path through which a fluid to be supplied to the space flows.

公开(公告)号：US20190221486A1

公开(公告)日：2019-07-18

申请号：US16360424

申请日：2019-03-21

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Shinsuke SUZUKI ,  Hirotoshi TERADA ,  Shunsuke MATSUDA

IPC: H01L21/66 ,  B23K26/00 ,  B23K26/03 ,  B23K26/402 ,  G06T7/00 ,  B23K26/362 ,  H01L23/544 ,  B23K26/364 ,  B23K26/352 ,  B23K26/70 ,  B23K26/359

CPC classification number: H01L22/26 ,  B23K26/0006 ,  B23K26/032 ,  B23K26/355 ,  B23K26/359 ,  B23K26/361 ,  B23K26/362 ,  B23K26/364 ,  B23K26/402 ,  B23K26/702 ,  B23K2101/42 ,  B23K2103/10 ,  B23K2103/166 ,  G02B5/208 ,  G06T7/0008 ,  G06T2207/10048 ,  G06T2207/10152 ,  G06T2207/30148 ,  G06T2207/30204 ,  H01L21/67282 ,  H01L23/544 ,  H01L2223/54426

Abstract: An inspection system includes a laser light source, an optical system for laser marking that irradiates a semiconductor device with laser light from a metal layer side, a control unit that controls the laser light source to control laser marking, a two-dimensional camera that detects light from the semiconductor device on a substrate side and outputs an optical reflection image, and an analysis unit that generates a pattern image of the semiconductor device, and the control unit controls the laser light source so that laser marking is performed until a mark image appears in a pattern image.

公开(公告)号：US20180033704A1

公开(公告)日：2018-02-01

申请号：US15547858

申请日：2016-01-08

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Shinsuke SUZUKI ,  Hirotoshi TERADA ,  Shunsuke MATSUDA

IPC: H01L21/66 ,  B23K26/70 ,  H01L21/67 ,  B23K26/362 ,  G06T7/00 ,  H01L23/544

CPC classification number: H01L22/26 ,  B23K26/0006 ,  B23K26/032 ,  B23K26/355 ,  B23K26/359 ,  B23K26/362 ,  B23K26/364 ,  B23K26/402 ,  B23K26/702 ,  B23K2101/42 ,  B23K2103/10 ,  B23K2103/166 ,  G02B5/208 ,  G06T7/0008 ,  G06T2207/10048 ,  G06T2207/10152 ,  G06T2207/30148 ,  G06T2207/30204 ,  H01L21/67282 ,  H01L23/544 ,  H01L2223/54426

Abstract: An inspection system includes a laser light source, an optical system for laser marking that irradiates a semiconductor device with laser light from a metal layer side, a control unit that controls the laser light source to control laser marking, a two-dimensional camera that detects light from the semiconductor device on a substrate side and outputs an optical reflection image, and an analysis unit that generates a pattern image of the semiconductor device, and the control unit controls the laser light source so that laser marking is performed until a mark image appears in a pattern image.

公开(公告)号：US20170089837A1

公开(公告)日：2017-03-30

申请号：US15311912

申请日：2015-05-18

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Naoya MATSUMOTO ,  Koyo WATANABE ,  Hirotoshi TERADA

IPC: G01N21/64 ,  G03H1/00 ,  G02B21/08 ,  G02B21/26 ,  G01B9/021 ,  G01B11/24

CPC classification number: G01N21/6458 ,  G01B9/021 ,  G01B11/24 ,  G01N21/64 ,  G01N21/6486 ,  G01N2201/06113 ,  G02B5/32 ,  G02B21/00 ,  G02B21/08 ,  G02B21/26 ,  G02B27/0068 ,  G03H1/0005 ,  G03H2001/005

Abstract: A microscope apparatus includes an objective lens; a light source for outputting light with which a biological sample is irradiated via the objective lens; a shape acquisition unit for acquiring information on at least one of a surface shape of the biological sample and a structure directly under the surface of the biological sample; a hologram generation unit for generating aberration correction hologram data for correcting an aberration caused by the at least one on the basis of the information acquired by the shape acquisition unit; a spatial light modulator to which a hologram based on the aberration correction hologram data is presented and for modulating the light output from the light source; a photodetector for detecting an intensity of light generated in the biological sample and outputs a detection signal.

公开(公告)号：US20170082597A1

公开(公告)日：2017-03-23

申请号：US15312054

申请日：2015-05-20

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Naoya MATSUMOTO ,  Koyo WATANABE ,  Hirotoshi TERADA

IPC: G01N33/483 ,  G01B11/24 ,  G02B27/00 ,  G03H1/22 ,  G03H1/00 ,  G02B5/32 ,  G01N21/41 ,  G03H1/08

CPC classification number: G01N33/4833 ,  G01B11/24 ,  G01N21/41 ,  G01N21/636 ,  G01N21/6458 ,  G01N21/6486 ,  G01N2021/6471 ,  G01N2201/0675 ,  G02B5/32 ,  G02B21/00 ,  G02B27/0068 ,  G03H1/0005 ,  G03H1/08 ,  G03H1/2294

Abstract: A photostimulation apparatus includes an objective lens arranged to face a biological object, a light source configured to output light to be radiated toward the biological object via the objective lens, a shape acquisition unit configured to acquire information about a shape with a refractive index difference in the biological object, a hologram generation unit configured to generate aberration correction hologram data for correcting aberrations due to the shape with the refractive index difference on the basis of the information acquired by the shape acquisition unit, and a spatial light modulator on which a hologram based on the aberration correction hologram data is presented and which modulates the light output from the light source.

公开(公告)号：US20160054576A1

公开(公告)日：2016-02-25

申请号：US14782005

申请日：2014-03-25

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Takashi INOUE ,  Hirotoshi TERADA

IPC: G02B27/28 ,  G02B27/09 ,  G02B5/30 ,  G02B27/00

CPC classification number: G02B27/283 ,  G01N21/6458 ,  G01N2201/0675 ,  G02B5/3016 ,  G02B21/0032 ,  G02B21/0076 ,  G02B21/0092 ,  G02B27/0025 ,  G02B27/0905

Abstract: An optical module (1A) includes a polarization beam splitter (10A) having a light splitting surface (11), polarization elements (20, 40), and respectively arranged on an optical path of a first polarization component (L2) transmitted through the light splitting surface (11) and an optical path of a second polarization component (L4) reflected by the light splitting surface (11), a reflective SLM (30) that modulates and reflects the first polarization component (L2) passing through the polarization element (20), and a reflective SLM (50) that modulates and reflects the second polarization component (L4) passing through the polarization element (40). The first modulation light (L3) passing through the polarization element (20) again and then reflected by the light splitting surface (11) and the second modulation light (L5) passing through the polarization element (40) again and then transmitted through the light splitting surface (11) are combined with each other.

Abstract translation: 光学模块（1A）包括具有光分离表面（11）的偏振分束器（10A），偏振元件（20,40），并且分别布置在透过该光的第一偏振分量（L2）的光路上 分离表面（11）和由所述光分离表面（11）反射的第二偏振分量（L4）的光路;反射SLM（30），其对通过所述偏振元件的所述第一偏振分量（L2）进行调制和反射 20），以及反射SLM（50），其对通过偏振元件（40）的第二偏振分量（L4）进行调制和反射。 再次通过偏振元件（20）的第一调制光（L3），然后再次通过分光表面（11）和第二调制光（L5）反射，然后透过该光 分离表面（11）彼此组合。