公开(公告)号：US20240126206A1

公开(公告)日：2024-04-18

申请号：US18533186

申请日：2023-12-08

申请人： Korea Photonics Technology Institute

发明人： Seon Kyu YOON ,  Ha Mong SHIM ,  Jin Su LEE ,  Kwang Hoon LEE

IPC分类号： G03H1/00 ,  G01B9/021 ,  G01B11/16 ,  G03H1/04 ,  G03H1/08

CPC分类号： G03H1/0005 ,  G01B9/021 ,  G01B11/164 ,  G03H1/0402 ,  G03H1/0443 ,  G03H1/0866 ,  G03H2001/005 ,  G03H2001/0415

摘要： According to an embodiment, a holographic microscope comprises a light source, an optical system splitting light emitted from the light source into an object and a reflective mirror and inducing interference between light reflected by the object or transmitted through the object and light reflected by the reflective mirror, a first image sensor receiving the interference light and sensing interference information for the interference light, a second image sensor receiving the light reflected by the object or transmitted through the object and sensing information for the received light, and an image processor deriving a shape of the object based on the interference information sensed by the first image sensor and the information sensed by the second image sensor.

公开(公告)号：US20220221822A1

公开(公告)日：2022-07-14

申请号：US17608288

申请日：2020-06-03

申请人： INDUSTRY ACADEMY COOPERATION FOUNDATION OF SEJONG UNIVERSITY

发明人： Tae Geun KIM

IPC分类号： G03H1/22 ,  H04N5/225 ,  G06T7/55 ,  G06T7/00 ,  H04N5/262 ,  G03H1/00 ,  G01B9/021

摘要： Disclosed are a method and apparatus of automatic optical inspection using scanning holography. The apparatus for automatic optical inspection using scanning holography includes: a hologram capturer that takes a hologram of an object existing on an objective plate using a scanning hologram camera; a depth position/rotation angle extractor that extracts a depth position and a rotation angle about an objective surface of the objective plate on the basis of the hologram or the detected monitoring-light; a rotated coordinate system generator that generates a rotated coordinate system corresponding to the objective surface using the depth position and the rotation angle; and a hologram restorer that obtains an image of the object by restoring the hologram in a plane formed in a depth direction of the rotated coordinate system.

公开(公告)号：US20210361159A1

公开(公告)日：2021-11-25

申请号：US17323231

申请日：2021-05-18

申请人： ARIZONA OPTICAL METROLOGY LLC

发明人： James Burge ,  Chunyu Zhao

IPC分类号： A61B3/10 ,  A61B3/15 ,  G01B9/021

摘要： An analytic tool for supporting alignment of an optical component in preparation for an interferometric test and performance of such a test. Apparatus and methods involve employment of the datum features on the optical component and/or metrology frame supporting such component. The metrology frame may include a secondary set of holograms (provided for use with a conventional system already employing a primary hologram that forms the testing optical wavefront). The conventional primary hologram is preferably substituted with a set of primary holograms (contained in the same, unitary or spatially-complementary housing sets) that perform different but complementary functions and that facilitate the alignment of the metrology frame with or without the tested optical component.

公开(公告)号：US20200011650A1

公开(公告)日：2020-01-09

申请号：US16577588

申请日：2019-09-20

申请人： Carl Zeiss SMT GmbH

发明人： Hans-Michael STIEPAN

IPC分类号： G01B9/021 ,  G03H1/08 ,  G03F7/20 ,  G01M11/00

摘要： A metrology target having a periodic or quasi-periodic structure, which is characterized by a plurality of parameters. At least one of these parameters varies locally monotonically, wherein the maximum size of this variation over a distance of 5 μm is less than 10% of the size of the at least one parameter. In addition, the metrology target has at least one used structure and at least one auxiliary structure, wherein the auxiliary structure transitions progressively into the used structure with regard to the locally monotonically varying parameter. Also disclosed are an associated method and associated device for characterizing structured elements configured as wafers, masks or CGHs.

公开(公告)号：US10254531B2

公开(公告)日：2019-04-09

申请号：US16051891

申请日：2018-08-01

申请人： Commissariat A l'Energie Atomique et aux Energies Alternatives

发明人： Sophie Morel ,  Cedric Allier

IPC分类号： G02B21/36 ,  G03H1/00 ,  G01N21/25 ,  G01N33/483 ,  G02B21/33 ,  G03H1/04 ,  G03H1/08 ,  G01N21/45 ,  G01B9/021 ,  G01N15/10 ,  G01N15/14

摘要： The invention relates to a method for observing a sample, in particular an anatomopathological slide formed from a thin thickness of a sampled biological tissue. It includes a step of illuminating the sample with a light source and acquiring, with an image sensor, an image representing the light transmitted by the sample. The image undergoes holographic reconstruction, so as to obtain a representation, in the plane of the sample, of the light wave transmitted by the latter. The method includes applying an impregnating fluid to the sample, such that the sample is impregnated with said impregnating liquid, said impregnating liquid having a refractive index strictly higher than 1.

公开(公告)号：US10241315B2

公开(公告)日：2019-03-26

申请号：US15224712

申请日：2016-08-01

申请人： Panasonic Intellectual Property Management Co., Ltd.

发明人： Taichi Sato ,  Yoshihide Sawada ,  Yasuhiko Adachi ,  Hideto Motomura

IPC分类号： G03H1/08 ,  G06K9/00 ,  G06T7/00 ,  G01B9/021 ,  G02B21/36 ,  G02B21/06 ,  H04N5/225 ,  H04N5/232 ,  H04N5/235 ,  G01N21/59 ,  G02B21/00 ,  G02B21/08 ,  G02B21/26 ,  G01N21/49

摘要： An image acquisition device according to the present disclosure includes a lighting system and an irradiation direction decision section. In a module, a subject and an imaging element are integrally formed. The lighting system sequentially irradiates the subject with illumination light in a plurality of different irradiation directions based on the subject such that the illumination light transmitted through the subject is incident on the imaging element. The module acquires a plurality of images according to the plurality of different irradiation directions. Before the plurality of images are acquired according to the plurality of different irradiation directions, the irradiation direction decision section decides the plurality of different irradiation directions based on a difference between a first preliminary image and a second preliminary image. The first preliminary image is acquired when the subject is irradiated with first illumination light in a first irradiation direction, and the second preliminary image is acquired when the subject is irradiated with second illumination light in a second irradiation direction.

公开(公告)号：US10185321B2

公开(公告)日：2019-01-22

申请号：US15206229

申请日：2016-07-09

申请人： Proxy Technologies, Inc.

发明人： John Klinger ,  Patrick C. Cesarano

IPC分类号： G05D1/00 ,  G05D1/02 ,  G06K9/00 ,  G01B9/021 ,  G01B11/00 ,  G01N21/88 ,  G01N27/20 ,  G01S13/02 ,  G01S15/02 ,  H04N5/225 ,  H04N7/18 ,  H01Q3/26 ,  G01S7/00 ,  G01S13/42 ,  B64C39/02 ,  G01C21/16 ,  G01S19/13 ,  G08G5/04 ,  G08G9/02 ,  G05D1/10 ,  G05B11/42 ,  G05B13/02 ,  G08G5/00 ,  H01Q3/28 ,  H01Q3/36 ,  H04B7/06 ,  H04B7/185 ,  G05B13/04 ,  G01S13/06

摘要： Some embodiments are directed to an unmanned vehicle. The unmanned vehicle can include a memory unit that is configured to store a planned path of the unmanned vehicle. The unmanned vehicle can also include a position unit that is configured to determine a current position of the unmanned vehicle, the position unit further configured to determine a planned position of the unmanned vehicle based on the planned path data stored in the memory unit. The unmanned vehicle can further include a control unit disposed in communication with the position unit, the control unit configured to determine a deviation based on the planned position and the current position of the unmanned vehicle, and control a movement of the unmanned vehicle such that the unmanned vehicle moves along the planned path if the deviation is less than a predetermined threshold.

公开(公告)号：US20180188016A1

公开(公告)日：2018-07-05

申请号：US15590706

申请日：2017-05-09

申请人： National Taiwan Normal University

发明人： Chau-Jern Cheng ,  Chin-Yu Liu ,  Xin-Ji Lai

IPC分类号： G01B9/021 ,  G01B9/02 ,  G03H1/04 ,  G03H1/16

CPC分类号： G01B9/021 ,  G01B9/0201 ,  G01B9/02016 ,  G01B9/02018 ,  G01B9/0203 ,  G03H1/0443 ,  G03H2001/0033 ,  G03H2001/0447 ,  G03H2001/0456 ,  G03H2210/12 ,  G03H2223/12 ,  G03H2223/52 ,  G03H2223/55

摘要： A method for defect inspection of a transparent substrate comprises (a) providing an optical system for performing a diffraction process of object wave passing through a transparent substrate, (b) interfering and wavefront recording for the diffracted object wave and a reference wave to reconstruct the defect complex images (including amplitude and phase) of the transparent substrate, (c) characteristics analyzing, features classifying and sieving for the defect complex images of the transparent substrate, and (d) creating defect complex images database based-on the defect complex images for comparison and detection of the defect complex images of the transparent substrate.

公开(公告)号：US09733616B2

公开(公告)日：2017-08-15

申请号：US14368625

申请日：2012-12-21

申请人： EXFO INC.

发明人： Bernard Ruchet ,  Normand Cyr

IPC分类号： G01B9/021 ,  G03H1/08 ,  G02B6/38 ,  G02B21/00 ,  G01N21/94 ,  G01M11/08

CPC分类号： G03H1/0866 ,  G01B9/021 ,  G01M11/088 ,  G01N21/94 ,  G01N2201/0627 ,  G02B6/385 ,  G02B21/0016

摘要： A portable inspection probe for the inspection of a recessed mating surface of an optical fiber connector is provided. In one variant, the portable inspection probe includes a digital holographic detection module operable to digitally record a hologram of the recessed mating surface, and a rigid probe tip configured to be optically coupled to the digital holographic detection module and shaped to provide optical access to the recessed mating surface. In another variant, the portable inspection probe is to be used with a rigid probe tip connectable thereto, and the digital holographic detection module includes a probing optical assembly not traversed by a reference beam and configured to direct an object beam onto the recessed mating surface and to collect the object beam upon reflection thereof by the recessed mating surface. An inspection system and an inspection method are also provided.

公开(公告)号：US09733064B2

公开(公告)日：2017-08-15

申请号：US14442910

申请日：2013-11-15

申请人： Centre National de la Recherche Scientifique—CNRS

发明人： Michael Atlan ,  Benjamin Samson

IPC分类号： G01B9/02 ,  G01B9/021 ,  G03H1/00 ,  G03H1/08 ,  G01N21/45 ,  G03H1/04

CPC分类号： G01B9/021 ,  G01N21/453 ,  G03H1/0005 ,  G03H1/0443 ,  G03H1/0866 ,  G03H2001/0033 ,  G03H2001/0456 ,  G03H2001/0463 ,  G03H2210/62 ,  G03H2227/03

摘要： The invention relates to a digital holography method for detecting the vibration amplitude of an object (15) having a vibration frequency ω, comprising: generating object illumination waves (Wt) and reference waves (WLO); acquiring interferograms between the reference wave (WLO) and a signal wave (Ws) by means of a bandwidth ω s detector (19), the reference wave comprising two components ELO1, ELO1 of frequencies ω1, ω2 that are respectively staggered in relation to the laser frequency ωL by a quantity δ1=γ1ωs and δ2=qω+γ2ωs, where q is an integer and −0.5≦γ1, γ2≦0.5; and calculating the vibration amplitude of the object from the optical beats spectrum deduced from the complex amplitude of an interferogram.