公开(公告)号：US10976152B2

公开(公告)日：2021-04-13

申请号：US15590706

申请日：2017-05-09

申请人： National Taiwan Normal University

发明人： Chau-Jern Cheng ,  Chin-Yu Liu ,  Xin-Ji Lai

IPC分类号： G01B9/02 ,  G01B9/021 ,  G03H1/04 ,  G03H1/00

摘要： A method for defect inspection of a transparent substrate comprises (a) providing an optical system for performing a diffraction process of object wave passing through a transparent substrate, (b) interfering and wavefront recording for the diffracted object wave and a reference wave to reconstruct the defect complex images (including amplitude and phase) of the transparent substrate, (c) characteristics analyzing, features classifying and sieving for the defect complex images of the transparent substrate, and (d) creating defect complex images database based-on the defect complex images for comparison and detection of the defect complex images of the transparent substrate.

公开(公告)号：US20180188016A1

公开(公告)日：2018-07-05

申请号：US15590706

申请日：2017-05-09

申请人： National Taiwan Normal University

发明人： Chau-Jern Cheng ,  Chin-Yu Liu ,  Xin-Ji Lai

IPC分类号： G01B9/021 ,  G01B9/02 ,  G03H1/04 ,  G03H1/16

CPC分类号： G01B9/021 ,  G01B9/0201 ,  G01B9/02016 ,  G01B9/02018 ,  G01B9/0203 ,  G03H1/0443 ,  G03H2001/0033 ,  G03H2001/0447 ,  G03H2001/0456 ,  G03H2210/12 ,  G03H2223/12 ,  G03H2223/52 ,  G03H2223/55

摘要： A method for defect inspection of a transparent substrate comprises (a) providing an optical system for performing a diffraction process of object wave passing through a transparent substrate, (b) interfering and wavefront recording for the diffracted object wave and a reference wave to reconstruct the defect complex images (including amplitude and phase) of the transparent substrate, (c) characteristics analyzing, features classifying and sieving for the defect complex images of the transparent substrate, and (d) creating defect complex images database based-on the defect complex images for comparison and detection of the defect complex images of the transparent substrate.