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公开(公告)号：US20190137750A1
公开(公告)日：2019-05-09
申请号：US16096014
申请日：2017-02-28
摘要： An optical unit includes a relay optical system configured to relay a primary image forming surface of an optical microscope to a secondary image forming surface of a side of an imaging device, an optical element holder disposed on an optical axis in the relay optical system, a field lens disposition portion configured to dispose a field lens on the optical axis on a front stage side of the optical element holder, and a Bertrand lens insertion/extraction portion configured to dispose a Bertrand lens on the optical axis on a rear stage side of the optical element holder so that insertion and extraction of the Bertrand lens are possible.
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公开(公告)号：US20220179185A1
公开(公告)日：2022-06-09
申请号：US17442163
申请日：2020-03-26
摘要： A confocal microscope unit according to an embodiment includes: a first subunit which includes a light source, a pinhole plate, and a photodetector; a second subunit which includes a light source, a pinhole plate, and a photodetector; a scan mirror which scans excitation light output from the first and second subunits on a sample via a microscope optical system and guides fluorescence generated from the sample in response to the excitation light and focused by the microscope optical system to the first and second subunits; and a main housing which is attachable to a connection port and to which the scan mirror, the first subunit, and the second subunit are fixed, wherein the first subunit and the second subunit are disposed in the main housing so that incident angles of two excitation lights to the scan mirror are displaced from each other by a predetermined angle.
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公开(公告)号：US20220155577A1
公开(公告)日：2022-05-19
申请号：US17442238
申请日：2020-03-26
摘要： A confocal microscope unit according to an embodiment includes: a first subunit which includes a light source, a pinhole plate, and a photodetector; a second subunit which includes a light source, a pinhole plate, and a photodetector; a scan mirror which scans excitation light on a sample and guides fluorescence generated from the sample to the first and second subunits; a scan lens which guides the excitation light and guides the fluorescence to the scan mirror; and a main housing which is attachable to a connection port and to which the scan mirror, the scan lens, and the subunits are fixed, wherein the first subunit includes a dichroic mirror that separates the excitation light and fluorescence handled by the own unit from those handled by the second subunit.
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4.发明公开公开(公告)号：US20240231067A9
公开(公告)日：2024-07-11
申请号：US18279098
申请日：2022-01-12
IPC分类号： G02B21/00
CPC分类号： G02B21/0048 , G02B21/008
摘要： A scanning microscope unit includes: a light source for outputting irradiation light; a photodetector; a MEMS mirror for scanning an irradiation light over an observation object, and for guiding an observation light toward the photodetector; a scanning lens for guiding the irradiation light scanned by the MEMS mirror, to a microscope optical system, and for guiding the observation light imaged by the microscope optical system, to the MEMS mirror; and a frame member formed in a frame shape to define an opening, and disposed on a side of the microscope optical system with respect to the scanning lens such that the irradiation light and the observation light pass through the opening. The frame member includes a calibration portion provided in a side portion defining the opening, and for generating calibration light including a sensitivity wavelength of the photodetector in response to an incidence of the irradiation light.
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5.发明公开公开(公告)号：US20240134177A1
公开(公告)日：2024-04-25
申请号：US18279098
申请日：2022-01-12
IPC分类号： G02B21/00
CPC分类号： G02B21/0048 , G02B21/008
摘要： A scanning microscope unit includes: a light source for outputting irradiation light; a photodetector; a MEMS mirror for scanning an irradiation light over an observation object, and for guiding an observation light toward the photodetector; a scanning lens for guiding the irradiation light scanned by the MEMS mirror, to a microscope optical system, and for guiding the observation light imaged by the microscope optical system, to the MEMS mirror; and a frame member formed in a frame shape to define an opening, and disposed on a side of the microscope optical system with respect to the scanning lens such that the irradiation light and the observation light pass through the opening. The frame member includes a calibration portion provided in a side portion defining the opening, and for generating calibration light including a sensitivity wavelength of the photodetector in response to an incidence of the irradiation light.
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公开(公告)号：US20220155576A1
公开(公告)日：2022-05-19
申请号：US17442287
申请日：2020-03-26
IPC分类号： G02B21/00
摘要： Embodiments are for a confocal microscope unit attached to a connection port of a microscope including: light sources which output irradiation light to a sample to be observed; photodetectors which detect observation light generated from a sample in response to the irradiation light; a scan mirror which scans the irradiation light on the sample and guides the observation light generated from the sample to the photodetectors; a scan lens which guides the irradiation light scanned by the scan mirror to the microscope optical system and guides the observation light focused by the microscope optical system to the scan mirror; a lens barrel to which the scan lens is fixed; an attachment portion which attaches the lens barrel to the connection port; and a movable portion which supports the lens barrel so that an angle of the lens barrel with respect to the attachment portion is changeable.
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公开(公告)号：US20190221486A1
公开(公告)日：2019-07-18
申请号：US16360424
申请日：2019-03-21
IPC分类号： H01L21/66 , B23K26/00 , B23K26/03 , B23K26/402 , G06T7/00 , B23K26/362 , H01L23/544 , B23K26/364 , B23K26/352 , B23K26/70 , B23K26/359
CPC分类号： H01L22/26 , B23K26/0006 , B23K26/032 , B23K26/355 , B23K26/359 , B23K26/361 , B23K26/362 , B23K26/364 , B23K26/402 , B23K26/702 , B23K2101/42 , B23K2103/10 , B23K2103/166 , G02B5/208 , G06T7/0008 , G06T2207/10048 , G06T2207/10152 , G06T2207/30148 , G06T2207/30204 , H01L21/67282 , H01L23/544 , H01L2223/54426
摘要： An inspection system includes a laser light source, an optical system for laser marking that irradiates a semiconductor device with laser light from a metal layer side, a control unit that controls the laser light source to control laser marking, a two-dimensional camera that detects light from the semiconductor device on a substrate side and outputs an optical reflection image, and an analysis unit that generates a pattern image of the semiconductor device, and the control unit controls the laser light source so that laser marking is performed until a mark image appears in a pattern image.
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公开(公告)号：US20180033704A1
公开(公告)日：2018-02-01
申请号：US15547858
申请日：2016-01-08
IPC分类号： H01L21/66 , B23K26/70 , H01L21/67 , B23K26/362 , G06T7/00 , H01L23/544
CPC分类号： H01L22/26 , B23K26/0006 , B23K26/032 , B23K26/355 , B23K26/359 , B23K26/362 , B23K26/364 , B23K26/402 , B23K26/702 , B23K2101/42 , B23K2103/10 , B23K2103/166 , G02B5/208 , G06T7/0008 , G06T2207/10048 , G06T2207/10152 , G06T2207/30148 , G06T2207/30204 , H01L21/67282 , H01L23/544 , H01L2223/54426
摘要： An inspection system includes a laser light source, an optical system for laser marking that irradiates a semiconductor device with laser light from a metal layer side, a control unit that controls the laser light source to control laser marking, a two-dimensional camera that detects light from the semiconductor device on a substrate side and outputs an optical reflection image, and an analysis unit that generates a pattern image of the semiconductor device, and the control unit controls the laser light source so that laser marking is performed until a mark image appears in a pattern image.
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