公开(公告)号：US20190371682A1

公开(公告)日：2019-12-05

申请号：US16478192

申请日：2017-10-02

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Shinsuke SUZUKI ,  Akira SHIMASE ,  Shinsuke SUZUKI

IPC: H01L21/66 ,  H01L21/268 ,  H01L23/544 ,  H01L21/67 ,  G01R31/28

Abstract: An inspection method according to an embodiment is an inspection method of performing laser marking on a semiconductor device including a substrate and a metal layer formed on the substrate, and the inspection method includes specifying a fault point in the semiconductor device by inspecting the semiconductor device, and irradiating the semiconductor device with laser light having a wavelength that is transmitted through the substrate from the substrate side so that a marking is formed at least at a boundary between the substrate and the metal layer on the basis of the fault point.

公开(公告)号：US20230072615A1

公开(公告)日：2023-03-09

申请号：US17798980

申请日：2020-11-17

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masataka IKESU ,  Shinsuke SUZUKI

IPC: G01R31/311 ,  G01R31/28

Abstract: A semiconductor failure analysis device includes an analysis part that analyzes a failure place in a semiconductor device; a marking part that irradiates the semiconductor device with laser light; a device arrangement part in which a wafer chuck, which holds the semiconductor device and on which an alignment target is provided, moves relative to the analysis part and the marking part; and a control part that outputs commands. The control part moves the wafer chuck to a position at which the analysis part is capable of taking an image of the alignment target, then outputs an alignment command that causes the marking part to be aligned with the analysis part with the alignment target as a reference, and irradiates the semiconductor device with laser light in a state in which a positional relationship between the marking part and the analysis part is maintained.

公开(公告)号：US20210270752A1

公开(公告)日：2021-09-02

申请号：US17278683

申请日：2019-06-25

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Shinsuke SUZUKI

IPC: G01N21/95 ,  G01R31/26 ,  G01N21/88

Abstract: A semiconductor device inspection method includes: performing a first inspection irradiation on at least one portion in an area to be inspected; outputting first information indicating presence or absence of a defective portion in an entire of the area to be inspected, based on the first inspection irradiation; when it is determined that a second inspection irradiation is to be performed, performing the inspection irradiation on at least one portion in the area to be inspected of the semiconductor device to which the test signal is being input, the portion of the second inspection irradiation is different from the portion of the first inspection irradiation; and outputting second information indicating presence or absence of a defective portion in the entire of the area to be inspected, based on the second inspection irradiation.

公开(公告)号：US20190221486A1

公开(公告)日：2019-07-18

申请号：US16360424

申请日：2019-03-21

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Shinsuke SUZUKI ,  Hirotoshi TERADA ,  Shunsuke MATSUDA

IPC: H01L21/66 ,  B23K26/00 ,  B23K26/03 ,  B23K26/402 ,  G06T7/00 ,  B23K26/362 ,  H01L23/544 ,  B23K26/364 ,  B23K26/352 ,  B23K26/70 ,  B23K26/359

CPC classification number: H01L22/26 ,  B23K26/0006 ,  B23K26/032 ,  B23K26/355 ,  B23K26/359 ,  B23K26/361 ,  B23K26/362 ,  B23K26/364 ,  B23K26/402 ,  B23K26/702 ,  B23K2101/42 ,  B23K2103/10 ,  B23K2103/166 ,  G02B5/208 ,  G06T7/0008 ,  G06T2207/10048 ,  G06T2207/10152 ,  G06T2207/30148 ,  G06T2207/30204 ,  H01L21/67282 ,  H01L23/544 ,  H01L2223/54426

Abstract: An inspection system includes a laser light source, an optical system for laser marking that irradiates a semiconductor device with laser light from a metal layer side, a control unit that controls the laser light source to control laser marking, a two-dimensional camera that detects light from the semiconductor device on a substrate side and outputs an optical reflection image, and an analysis unit that generates a pattern image of the semiconductor device, and the control unit controls the laser light source so that laser marking is performed until a mark image appears in a pattern image.

公开(公告)号：US20180033704A1

公开(公告)日：2018-02-01

申请号：US15547858

申请日：2016-01-08

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Shinsuke SUZUKI ,  Hirotoshi TERADA ,  Shunsuke MATSUDA

IPC: H01L21/66 ,  B23K26/70 ,  H01L21/67 ,  B23K26/362 ,  G06T7/00 ,  H01L23/544

CPC classification number: H01L22/26 ,  B23K26/0006 ,  B23K26/032 ,  B23K26/355 ,  B23K26/359 ,  B23K26/362 ,  B23K26/364 ,  B23K26/402 ,  B23K26/702 ,  B23K2101/42 ,  B23K2103/10 ,  B23K2103/166 ,  G02B5/208 ,  G06T7/0008 ,  G06T2207/10048 ,  G06T2207/10152 ,  G06T2207/30148 ,  G06T2207/30204 ,  H01L21/67282 ,  H01L23/544 ,  H01L2223/54426

Abstract: An inspection system includes a laser light source, an optical system for laser marking that irradiates a semiconductor device with laser light from a metal layer side, a control unit that controls the laser light source to control laser marking, a two-dimensional camera that detects light from the semiconductor device on a substrate side and outputs an optical reflection image, and an analysis unit that generates a pattern image of the semiconductor device, and the control unit controls the laser light source so that laser marking is performed until a mark image appears in a pattern image.

公开(公告)号：US20230061399A1

公开(公告)日：2023-03-02

申请号：US17799009

申请日：2021-01-13

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masataka IKESU ,  Shinsuke SUZUKI

IPC: G01R31/265

Abstract: A control part of a semiconductor fault analysis device outputs an alignment command that moves a chuck to a position at which a target is detectable by a first optical detection part and then aligns an optical axis of a second optical system with an optical axis of a first optical system with the target as a reference, and outputs an analysis command that applies a stimulus signal to a semiconductor device and receives light from the semiconductor device emitted according to a stimulus signal with at least one of a first optical detection part and a second optical detection part in a state in which a positional relationship between the optical axis of the first optical system and the optical axis of the second optical system is maintained.

公开(公告)号：US20200152525A1

公开(公告)日：2020-05-14

申请号：US16742382

申请日：2020-01-14

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Shinsuke SUZUKI ,  Akira SHIMASE ,  Shinsuke SUZUKI

IPC: H01L21/66 ,  H01L23/544 ,  H01L21/67 ,  H01L21/268 ,  G01R31/28

Abstract: An inspection method according to an embodiment is an inspection method of performing laser marking on a semiconductor device (D) including a substrate (SiE) and a metal layer (ME) formed on the substrate (SiE), and the inspection method includes specifying a fault point (fp) in the semiconductor device (D) by inspecting the semiconductor device (D), and irradiating the semiconductor device (D) with laser light having a wavelength that is transmitted through the substrate (SiE) from the substrate (SiE) side so that a marking is formed at least at a boundary between the substrate (SiE) and the metal layer (ME) on the basis of the fault point (fp).