SOLID IMMERSION LENS HOLDER AND IMAGE ACQUISITION DEVICE

    公开(公告)号:US20170235087A1

    公开(公告)日:2017-08-17

    申请号:US15504395

    申请日:2015-09-24

    摘要: A solid immersion lens holder includes a first member having a first opening disposing a spherical face portion therein so that a part of the spherical face portion protrudes toward an objective lens side and a second member having a second opening disposing a contact portion therein so that a contact face protrudes toward a side opposite to the objective lens side. The first member includes three protrusion portions extending from an inner face of the first opening toward a center of the first opening and configured to be contactable with the spherical face portion.

    OPTICAL UNIT AND METHOD FOR ADJUSTING OPTICAL UNIT

    公开(公告)号:US20190137750A1

    公开(公告)日:2019-05-09

    申请号:US16096014

    申请日:2017-02-28

    IPC分类号: G02B21/36 G02B7/04 G02B27/10

    摘要: An optical unit includes a relay optical system configured to relay a primary image forming surface of an optical microscope to a secondary image forming surface of a side of an imaging device, an optical element holder disposed on an optical axis in the relay optical system, a field lens disposition portion configured to dispose a field lens on the optical axis on a front stage side of the optical element holder, and a Bertrand lens insertion/extraction portion configured to dispose a Bertrand lens on the optical axis on a rear stage side of the optical element holder so that insertion and extraction of the Bertrand lens are possible.

    SEMICONDUCTOR APPARATUS EXAMINATION METHOD AND SEMICONDUCTOR APPARATUS EXAMINATION APPARATUS

    公开(公告)号:US20220207710A1

    公开(公告)日:2022-06-30

    申请号:US17607155

    申请日:2020-05-19

    IPC分类号: G06T7/00 G06T7/70 G06T11/00

    摘要: A semiconductor apparatus examination method includes a step of detecting light from a plurality of positions in a semiconductor apparatus (D) and acquiring a waveform corresponding to each of the plurality of positions, a step of extracting a waveform corresponding to a specific timing from the waveform corresponding to each of the plurality of positions and generating an image corresponding to the specific timing based on the extracted waveform, and a step of extracting a feature point based on a brightness distribution correlation value in the image corresponding to the specific timing and identifying a position of a drive element in the semiconductor apparatus based on the feature point.

    OPTICAL MODULE AND LIGHT EXPOSURE DEVICE
    5.
    发明申请
    OPTICAL MODULE AND LIGHT EXPOSURE DEVICE 有权
    光学模块和光接收装置

    公开(公告)号:US20160062128A1

    公开(公告)日:2016-03-03

    申请号:US14782015

    申请日:2014-03-25

    摘要: An optical module (1A) includes a polarization beam splitter (10A), polarization elements (20 and 40) having nonreciprocal optical activity and respectively arranged on an optical path of a first polarization component (L2) transmitted through a light splitting surface (11) in irradiation light (L1) and an optical path of a second polarization component (L4) reflected in the light splitting surface (11), a first reflective SLM (30) that modulates and reflects a first polarization component (L2) passing through the first polarization element (20), and a second reflective SLM (50) that modulates and reflects the second polarization component (L4) passing through the second polarization element (40). First modulation light (L3) passing through the polarization element (20) again and then reflected by the light splitting surface (11) and second modulation light (L5) passing through the polarization element (40) again and then transmitted through the light splitting surface (11) are combined with each other.

    摘要翻译: 光学模块(1A)包括偏振分束器(10A),具有不可逆光学活动的偏振元件(20和40),并且分别布置在通过光分离表面(11)透射的第一偏振分量(L2)的光路上, 在照射光(L1)和在分光面(11)中反射的第二偏振分量(L4)的光路的第一反射SLM(30),其对通过第一偏振分量(L1)的第一偏振分量 偏振元件(20)和第二反射SLM(50),其对通过第二偏振元件(40)的第二偏振分量(L4)进行调制和反射。 第一调制光(L3)再次通过偏振元件(20)然后被分光表面(11)反射,并且第二调制光(L5)再次通过偏振元件(40),然后透射通过光分离表面 (11)彼此组合。

    CONFOCAL MICROSCOPE UNIT AND CONFOCAL MICROSCOPE

    公开(公告)号:US20220179185A1

    公开(公告)日:2022-06-09

    申请号:US17442163

    申请日:2020-03-26

    摘要: A confocal microscope unit according to an embodiment includes: a first subunit which includes a light source, a pinhole plate, and a photodetector; a second subunit which includes a light source, a pinhole plate, and a photodetector; a scan mirror which scans excitation light output from the first and second subunits on a sample via a microscope optical system and guides fluorescence generated from the sample in response to the excitation light and focused by the microscope optical system to the first and second subunits; and a main housing which is attachable to a connection port and to which the scan mirror, the first subunit, and the second subunit are fixed, wherein the first subunit and the second subunit are disposed in the main housing so that incident angles of two excitation lights to the scan mirror are displaced from each other by a predetermined angle.

    CONFOCAL MICROSCOPE UNIT AND CONFOCAL MICROSCOPE

    公开(公告)号:US20220155577A1

    公开(公告)日:2022-05-19

    申请号:US17442238

    申请日:2020-03-26

    摘要: A confocal microscope unit according to an embodiment includes: a first subunit which includes a light source, a pinhole plate, and a photodetector; a second subunit which includes a light source, a pinhole plate, and a photodetector; a scan mirror which scans excitation light on a sample and guides fluorescence generated from the sample to the first and second subunits; a scan lens which guides the excitation light and guides the fluorescence to the scan mirror; and a main housing which is attachable to a connection port and to which the scan mirror, the scan lens, and the subunits are fixed, wherein the first subunit includes a dichroic mirror that separates the excitation light and fluorescence handled by the own unit from those handled by the second subunit.

    METALENS UNIT, SEMICONDUCTOR FAULT ANALYSIS DEVICE, AND SEMICONDUCTOR FAULT ANALYSIS METHOD

    公开(公告)号:US20210239752A1

    公开(公告)日:2021-08-05

    申请号:US17052969

    申请日:2019-04-11

    摘要: The present disclosure relates to a metalens unit including a metalens having a structure for reducing a thickness. The metalens unit includes a metalens and a holding portion for the metalens. The metalens includes a base portion and a first antenna portion. The first antenna portion is constituted by a plurality of first antennas each having a first refractive index and a first intermediate portion having a second refractive index and positioned between the plurality of first antennas. A first antenna portion is formed such that one-dimensional arrangement constituted by some of end surfaces of the plurality of first antennas includes a pattern in which at least one of a size of the end surface, a shape of the end surface, and an arrangement pitch is changed along a reference line.