公开(公告)号：US11107709B2

公开(公告)日：2021-08-31

申请号：US16261763

申请日：2019-01-30

Applicant: Applied Materials, Inc.

Inventor： Paul Z. Wirth

IPC: H01L21/00 ,  H01L21/67 ,  F27D3/00 ,  F27D5/00 ,  F27D11/02 ,  F27D21/00 ,  H01L21/324 ,  F27D19/00

Abstract: A temperature-controllable process chamber configured to process substrates may include one or more vertical walls at least partially defining a chamber portion of the process chamber. Multiple zones may be located about a periphery of the one or more vertical walls and multiple temperature control devices are thermally coupled to the periphery of the one or more vertical walls in each of the multiple zones. A controller coupled to the temperature control devices may be configured to individually control temperatures of the multiple temperature control devices to obtain substantial temperature uniformity across a substrate located in the chamber portion. Other systems and methods of manufacturing substrates are disclosed.

公开(公告)号：US20190088530A1

公开(公告)日：2019-03-21

申请号：US15708806

申请日：2017-09-19

Applicant: Applied Materials, Inc.

Inventor： Paul Z. Wirth

IPC: H01L21/687 ,  H01L21/67

Abstract: A dual-blade robot having overlapping frog-leg linkages is disclosed. The robot includes first and second arms, coplanar with each other and each rotatably coupled to a first blade, in a frog-leg configuration, and third and fourth arms, coplanar with each other and each rotatably coupled to a second blade, in a frog-leg configuration, where the third and fourth arms are vertically offset from the first and second arms. The third and fourth arms are configured to overlap at least a portion of the first and second arms when the first and second blades are in a retracted position. Methods of operating the robot and electronic device processing systems including the robot are provided, as are numerous other aspects.

公开(公告)号：US20250004438A1

公开(公告)日：2025-01-02

申请号：US18882059

申请日：2024-09-11

Applicant: APPLIED MATERIALS, INC.

Inventor： Atilla Kilicarslan ,  Raechel Chu-Hui Tan ,  Brooke Elise Montgomery ,  Paul Z. Wirth

IPC: G05B19/18

Abstract: A method includes determining, based at least in part on disturbance data, an actuation value associated with compensating for disturbance in a processing chamber. The method further includes associating the actuation value with an identifier corresponding to a recipe operation. The actuation value is to be retrieved, via the identifier, for subsequent execution of the recipe operation. The method further includes causing, based on retrieval of the actuation value via the identifier, actuation of one or more components of the processing chamber during a subsequent execution of the recipe operation to compensate for the disturbance.

公开(公告)号：US20240071802A1

公开(公告)日：2024-02-29

申请号：US18234453

申请日：2023-08-16

Applicant: Applied Materials, Inc.

Inventor： Paul Z. Wirth ,  Damon K. Cox ,  Rajkumar Thanu ,  Karuppasamy Muthukamatchi ,  Jeffrey C. Hudgens

IPC: H01L21/687 ,  B25J9/04 ,  B25J11/00 ,  H01L21/67

CPC classification number: H01L21/68707 ,  B25J9/043 ,  B25J11/0095 ,  H01L21/67167 ,  H01L21/67201

Abstract: A robot apparatus with variable end effector pitch is provided suitable for accommodating varying pitches, e.g., between two adjacent processing chambers or between two adjacent load lock chambers. The robot apparatus may operate in dual substrate handling mode, single substrate handling mode, or a combination thereof. The robot apparatus may also be an off-axis robot. A variety of robot apparatuses according to various embodiments, electronic device processing systems including such robot apparatuses, and methods of use thereof are described.

公开(公告)号：US11415230B2

公开(公告)日：2022-08-16

申请号：US16836231

申请日：2020-03-31

Applicant: APPLIED MATERIALS, INC.

Inventor： Paul Z. Wirth ,  Ofer Amir ,  Michael C. Kuchar

IPC: F16K3/18 ,  F16K3/02 ,  F16K31/124 ,  F16K37/00 ,  F15B21/02 ,  H01L21/677 ,  H01L21/67

Abstract: Disclosed are a slit valve apparatus and a method for controlling a slit valve. The slit valve apparatus includes a slit valve assembly and a servo-control system in communication with the slit valve assembly. The slit valve assembly includes at least one gate able to transition between an open position and a closed position, at least one pneumatic actuator, at least one proportional pneumatic valve including a plurality of controllers, and a continuous position sensor. The servo-control system includes a centralized controller that generates a control signal and adjusts the movement of the at least one gate based on the position trajectory for the gate, a linear position measurement of the gate from the continuous position sensor, and fluid pressure/flow measurements from the plurality of controllers.

公开(公告)号：US09799544B2

公开(公告)日：2017-10-24

申请号：US14921806

申请日：2015-10-23

Applicant: Applied Materials, Inc.

Inventor： Paul Z. Wirth

IPC: H01L21/677 ,  B25J5/02 ,  H01L21/67

CPC classification number: H01L21/67706 ,  B25J5/02 ,  B25J9/042 ,  B25J9/1045 ,  B25J11/0095 ,  H01L21/67161 ,  H01L21/67173 ,  H01L21/67196 ,  H01L21/67724 ,  H01L21/67742

Abstract: A robot assembly allowing remote actuation of a carriage supported robot. The robot assembly includes a track, a carriage moveable along the track, and a robot mounted to the carriage. The robot includes at least a first arm, and a first driven member coupled to the first arm. The robot assembly further includes a drive assembly having a first driving member, a first transmission member coupled to the first driving member and the first driven member, and a first drive motor coupled to the first driving member. The first drive motor is configured to move the first driving member causing remote rotation of the first driven member and rotation of the first arm. Substrate processing apparatus and methods of transporting a substrate within a substrate processing apparatus are also provided, as are numerous other aspects.

公开(公告)号：US12130606B2

公开(公告)日：2024-10-29

申请号：US17559061

申请日：2021-12-22

Applicant: APPLIED MATERIALS, INC.

Inventor： Atilla Kilicarslan ,  Raechel Chu-Hui Tan ,  Brooke Elise Montgomery ,  Paul Z. Wirth

IPC: G05B19/18

CPC classification number: G05B19/188 ,  G05B2219/45031

Abstract: A method includes receiving first sensor data associated with a first iteration of a first recipe operation of a substrate processing recipe. The method further includes determining disturbance data, the disturbance data being a difference between the first sensor data and first setpoint data of the first recipe operation. The method further includes determining, based at least in part on the disturbance data, a first actuation value associated with one or more components of a processing chamber. Actuation of the one or more components according to the first actuation value compensates for the disturbance data. The method further includes causing the actuation of the one or more components based on the first actuation value during a subsequent iteration of the first recipe operation of the substrate processing recipe to compensate for the disturbance data.

公开(公告)号：US11582378B2

公开(公告)日：2023-02-14

申请号：US17341243

申请日：2021-06-07

Applicant: Applied Materials, Inc.

Inventor： Ozkan Celik ,  Patricia A. Schulze ,  Gregory J. Freeman ,  Paul Z. Wirth ,  Tommaso Vercesi

IPC: H04N5/232 ,  G06T7/571 ,  G01B11/00 ,  G06T7/55 ,  G06T5/50 ,  H04N13/00

Abstract: A depth measuring apparatus includes a camera assembly configured to capture a plurality of images of a target at a plurality of distances from the target. The depth measuring apparatus further includes a controller configured to, for each of a plurality of regions within the plurality of images: determine corresponding gradient values within the plurality of images; determine a corresponding maximum gradient value from the corresponding gradient values; and determine, based on the corresponding maximum gradient value, a depth measurement for a region of the plurality of regions.

公开(公告)号：US20210398823A1

公开(公告)日：2021-12-23

申请号：US16905862

申请日：2020-06-18

Applicant: Applied Materials, Inc.

Inventor： Mauro Cimino ,  Arkaprava Dan ,  Paul Z. Wirth

IPC: H01L21/67

Abstract: Gas distribution apparatus to provide uniform flows of gases from a single source to multiple processing chambers are described. A valve upstream of a shared volume is controlled by at least two pressurizing sequences during a process it the processing chamber. The first pressurizing sequence opens and closes the upstream valve a first number of cycles and the second pressurizing sequence opens and closes the upstream valve less frequently after the first number of cycles. The open/close timing of the second pressurizing sequence occurs less frequently than the open/close timing of the first pressurizing sequence.

公开(公告)号：USD938373S1

公开(公告)日：2021-12-14

申请号：US29710816

申请日：2019-10-25

Applicant: Applied Materials, Inc.

Designer： Jason M. Schaller ,  Benjamin Riordon ,  Mitchell DiSanto ,  Paul Forderhase ,  Gary Wyka ,  Jeffrey Hudgens ,  Paul Z. Wirth ,  Charles T. Carlson ,  Siva Chandrasekar ,  Michael Carrell ,  Venkata Raghavaiah Chowdhary Kode ,  Dmitry A. Dzilno ,  Juan Carlos Rocha-Alvarez