公开(公告)号：US12115683B2

公开(公告)日：2024-10-15

申请号：US18355355

申请日：2023-07-19

申请人： Applied Materials, Inc.

发明人： Nicholas Michael Bergantz ,  Damon K. Cox ,  Alexander Berger

IPC分类号： B25J9/16 ,  B65G47/90 ,  H01L21/67 ,  H01L21/677 ,  H01L21/68 ,  H01L21/687 ,  B25J11/00 ,  B25J13/08

CPC分类号： B25J9/1692 ,  B65G47/905 ,  H01L21/67167 ,  H01L21/67196 ,  H01L21/67259 ,  H01L21/67706 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/68 ,  H01L21/68707 ,  B25J9/1697 ,  B25J11/0095 ,  B25J13/08

摘要： A first robot arm places a calibration object into a load lock that separates a factory interface from a transfer chamber using a first taught position. A second robot arm retrieves the calibration object from the load lock using a second taught position. A controller determines, using a sensor, a first offset amount between a calibration object center of the calibration object and a pocket center of the second robot arm. The controller determines a characteristic error value that represents a misalignment between the first taught position of the first robot arm and the second taught position of the second robot arm based on the first offset amount. The first robot arm or the second robot arm uses the first characteristic error value to compensate for the misalignment for objects transferred between the first robot arm and the second robot arm via the load lock.

公开(公告)号：US12090645B2

公开(公告)日：2024-09-17

申请号：US17335561

申请日：2021-06-01

申请人： Persimmon Technologies Corporation

发明人： Martin Hosek ,  Himanshu Shukla ,  Tuan Ha

IPC分类号： B25J17/00 ,  B25J9/04 ,  B25J11/00 ,  B25J19/00

CPC分类号： B25J17/00 ,  B25J9/042 ,  B25J11/0095 ,  B25J19/0054

摘要： An apparatus including a robot drive; and a robot arm connected to the robot drive, where the robot arm includes a first link connected to the robot drive, a second link rotatably connected to the first link at a first rotatable connection, and an end effector rotatably connected to the second link at a second rotatable connection. The end effector includes a heat choke located between a substrate support area of the end effector and the second rotatable connection. At least one of the first rotatable connector or the second rotatable connection includes a rotary thermal coupling having interleaved members which are rotatable relative to each other.

公开(公告)号：US12083666B2

公开(公告)日：2024-09-10

申请号：US18102227

申请日：2023-01-27

申请人： Persimmon Technologies Corporation

发明人： Martin Hosek ,  Scott Wilkas

IPC分类号： B25J11/00 ,  B25J9/00 ,  B25J9/10 ,  B25J9/16

CPC分类号： B25J11/0095 ,  B25J9/0027 ,  B25J9/0084 ,  B25J9/0096 ,  B25J9/106 ,  B25J9/1641 ,  B25J9/1664

摘要： An apparatus includes a platform configured to traverse a stationary base along a motion path; a drive coupled to the platform; and a movable arm assembly. The movable arm assembly includes a pivoting base connected to the drive, first and second linkages connected to the pivoting base, each linkage having links connected via rotary joints and each link having at least one end-effector. The platform is configured to traverse the stationary base along a motion path in two opposing directions and the drive and the movable arm assembly are configured to cause independent and simultaneous movement and transfer of substrates from at least one of a first substrate holding area, a second substrate holding area, a third substrate holding area, or a fourth substrate holding area into or from a respective substrate workstation.

公开(公告)号：US12080581B2

公开(公告)日：2024-09-03

申请号：US18139875

申请日：2023-04-26

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Shih-Lien Linus Lu ,  Cormac Michael O'Connell

IPC分类号： G06F21/00 ,  B25J9/16 ,  H01L21/67 ,  H01L21/673 ,  H01L21/68 ,  B25J11/00

CPC分类号： H01L21/68 ,  B25J9/1664 ,  B25J9/1692 ,  H01L21/67265 ,  H01L21/67386 ,  H01L21/681 ,  B25J11/0095

摘要： Disclosed is a physical unclonable function generator circuit and method. In one embodiment, a physical unclonable function (PUF) generator comprising: a plurality of PUF cells, wherein each of the plurality of PUF cells comprises a first MOS transistor and a second MOS transistor, wherein terminal S of the first MOS transistor is connected to terminal D of the second MOS transistor at a dynamic node, terminal D of the first MOS transistor is coupled to a first bus and terminal G of the first NMOS transistor is coupled to a second bus, and terminals S and G of the second NMOS transistor are coupled to ground; a plurality of dynamic flip-flop (DFF) circuits wherein each of the plurality of DFF circuits is coupled to each of the plurality of PUF cells respectively; a population count circuit coupled to the plurality of DFF circuits; and an evaluation logic circuit having an input coupled to the population count circuit and an output coupled to the plurality of DFF circuits.

公开(公告)号：US20240217122A1

公开(公告)日：2024-07-04

申请号：US18090383

申请日：2022-12-28

申请人： Intel Corporation

发明人： Long Thanh NGUYEN ,  Tin DO ,  Le Hoai Bao NGUYEN ,  Phu Tuc NGUYEN ,  Hung Quy SOI

IPC分类号： B25J15/06 ,  B25J9/16 ,  B25J11/00 ,  H05K3/36

CPC分类号： B25J15/0683 ,  B25J9/1687 ,  B25J11/005 ,  B25J11/0095 ,  H05K3/36

摘要： This disclosure describes enhanced substrate transfer arm (STA) and pedestal designs related to a thermal compression bonding process. The designs include multiple row patterns of the STA and the pedestal used to: pick up a first substrate row from a first row of a tray; place the first substrate row onto a first row of a bond stage corresponding to the first row of the tray; pick up a second substrate row from the tray; place, using the suction cups, the second substrate row onto a remaining empty row of the bond stage; pick up the first substrate row after thermal bonding from the bond stage; place the first substrate row after thermal bonding onto the tray; when all substrates from the tray have been thermally bonded, pick up a last substrate row after thermal bonding from the bond stage; and place the last substrate row onto the tray.

公开(公告)号：US20240203774A1

公开(公告)日：2024-06-20

申请号：US18536845

申请日：2023-12-12

申请人： SEMES CO., LTD.

发明人： Kyo Bong KIM ,  Ki Won HAN ,  Sang-Oh KIM ,  Hee Jae BYUN ,  Hee Chan KIM ,  Sang Hyeop LEE

IPC分类号： H01L21/677 ,  B25J11/00 ,  B25J15/00 ,  H01L21/687

CPC分类号： H01L21/67742 ,  B25J11/0095 ,  B25J15/0014 ,  H01L21/68707

摘要： The inventive concept provides a substrate transfer apparatus. The substrate transfer apparatus includes a base; a first transfer arm configured to have a first arm link connected to the base and a first end effector connected to the first arm link, and which operates between a contract position and an expand position; and a guide member aligning a substrate placed on the first end effector while the first transfer arm backwardly moves from the expand position to the contract position.

公开(公告)号：US20240194508A1

公开(公告)日：2024-06-13

申请号：US18586310

申请日：2024-02-23

申请人： Applied Materials, Inc.

发明人： WOLFGANG ADERHOLD

IPC分类号： H01L21/67 ,  B25J11/00 ,  G05B19/00 ,  H01L21/687

CPC分类号： H01L21/67259 ,  B25J11/0095 ,  G05B19/00 ,  G05B2219/00 ,  H01L21/68707

摘要： Embodiments disclosed herein include a method of centering a substrate in a chamber. In an embodiment, the method comprises inserting the substrate into the chamber with a robot arm, obtaining a delta time value for a second pyrometer relative to a first pyrometer, where the delta time value is a duration of time between when the first pyrometer is covered by the substrate and when the second pyrometer is covered by the substrate, calculating a time offset value of the delta time value relative to an ideal delta time value, where the ideal delta time value is the delta time value when the substrate is perfectly centered in a first direction perpendicular to the motion of the substrate, and comparing the time offset value to a graph or a lookup table that correlates the time offset value to a distance offset value.

公开(公告)号：US20240190026A1

公开(公告)日：2024-06-13

申请号：US18079755

申请日：2022-12-12

申请人： Applied Materials, Inc.

发明人： Damon K. Cox ,  Manjunatha Gondihosalli ,  Karuppasamy Muthukamatchi

IPC分类号： B25J19/00 ,  B25J15/08

CPC分类号： B25J19/0004 ,  B25J15/08 ,  B25J11/0095

摘要： A carrier includes a carrier body, fingers attached to the carrier body, and a rotation prevention component attached to the carrier body. The fingers are configured to support a process kit ring. The rotation prevention component is configured to be disposed proximate a flat inner surface of the process kit ring to prevent rotation of the process kit ring.

公开(公告)号：US20240186175A1

公开(公告)日：2024-06-06

申请号：US18510394

申请日：2023-11-15

申请人： KABUSHIKI KAISHA YASKAWA DENKI

发明人： Takashi MINAMI ,  Yoshiki KIMURA ,  Hiroki SANEMASA

IPC分类号： H01L21/687 ,  B25J11/00 ,  B25J19/02 ,  H01L21/68

CPC分类号： H01L21/68707 ,  B25J11/0095 ,  B25J19/021 ,  H01L21/681

摘要： A substrate transfer apparatus includes a hand that transfers a substrate from a cassette that accommodates substrates in multiple stages in a vertical direction; a movement mechanism that moves the hand; a controller that controls the movement mechanism; and a first detection unit that detects the substrate. The controller includes an offset amount change unit that changes an offset amount by which the hand is moved up and down from a substrate support height of the cassette when the hand loads and unloads the substrate with respect to the cassette, according to a thickness or a deflection amount of the substrate detected by the first detection unit.

公开(公告)号：US20240178032A1

公开(公告)日：2024-05-30

申请号：US18434329

申请日：2024-02-06

申请人： Brooks Automation US, LLC

发明人： Robert T. Caveney ,  Ulysses Gilchrist ,  Alexander Krupyshev

IPC分类号： H01L21/677 ,  B25J9/04 ,  B25J11/00

CPC分类号： H01L21/67742 ,  H01L21/67745 ,  H01L21/67748 ,  B25J9/041 ,  B25J11/0095 ,  B65G2201/0297

摘要： A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.