公开(公告)号：US12119253B2

公开(公告)日：2024-10-15

申请号：US17620967

申请日：2020-05-08

Applicant: Murata Machinery, Ltd.

Inventor： Wataru Kitamura

IPC: H01L21/677 ,  B65G1/04

CPC classification number: H01L21/67733 ,  B65G1/0457 ,  H01L21/67706 ,  H01L21/67727 ,  H01L21/6773 ,  B65G2201/0297

Abstract: A transport vehicle includes: a traveler; a transferer that is mounted on the traveler and receives or delivers an article from or to a transfer destination; and an antenna that is provided so that at least the position or the posture thereof can be changed to follow the action of the transferer, and that performs wireless communication with another device.

公开(公告)号：US12116021B2

公开(公告)日：2024-10-15

申请号：US17288938

申请日：2019-09-13

Applicant: MURATA MACHINERY, LTD.

Inventor： Haruki Ogo ,  Yasuhisa Ito

IPC: B61B3/02 ,  B61B13/00 ,  B61B13/06 ,  B65G1/04 ,  B66C7/02 ,  B66C7/08 ,  B66C7/12 ,  B66C9/02 ,  B66C9/04 ,  B66C9/16 ,  H01L21/677 ,  B61B13/04

CPC classification number: B61B3/02 ,  B61B13/00 ,  B61B13/06 ,  B65G1/0457 ,  B65G1/0478 ,  B66C7/02 ,  B66C7/08 ,  B66C7/12 ,  B66C9/02 ,  B66C9/04 ,  B66C9/16 ,  H01L21/67706 ,  H01L21/67715 ,  H01L21/67733 ,  B61B13/04 ,  B65G2201/0297 ,  H01L21/6773

Abstract: A traveling vehicle system includes a track including a first gap, a partial track, and a second gap, a traveling vehicle including a drive wheel and first and second auxiliary wheels, a first auxiliary track on a near side of the first gap in a traveling direction and in contact with a lower end of the first auxiliary wheel while a lower end of the drive wheel passes through the first gap when the drive wheel enters the partial track, and a second auxiliary track on a far side of the second gap in the traveling direction and in contact with a lower end of the second auxiliary wheel while the lower end of the drive wheel passes through the second gap when the drive wheel leaves the partial track.

公开(公告)号：US12094745B2

公开(公告)日：2024-09-17

申请号：US17818370

申请日：2022-08-09

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.

Inventor： Yong-Jyu Lin ,  Fu-Hsien Li ,  Chen-Wei Lu ,  Chi-Feng Tung ,  Hsiang Yin Shen

IPC: H01L21/67 ,  B65G1/04 ,  B66C13/23 ,  B66C13/48 ,  B66C19/00 ,  B66F9/18 ,  H01L21/677 ,  B61B3/00

CPC classification number: H01L21/67733 ,  B65G1/0457 ,  B66C13/23 ,  B66C13/48 ,  B66C19/00 ,  B66F9/183 ,  H01L21/67259 ,  H01L21/67724 ,  H01L21/6773 ,  H01L21/67736 ,  B61B3/00 ,  B65G2201/0297

Abstract: A method for operating a conveying system is provided. An overhead hoist transport (OHT) vehicle is provided, wherein the OHT vehicle includes a gripping member configured to grip and hold a carrier, and a receiver configured to receive a signal. The signal is transmitted to the receiver of the OHT vehicle. The OHT vehicle is moved toward the carrier, and the carrier is gripped by the gripping member of the OHT vehicle. A lifting force is determined based on a weight of a carrier, a number of workpieces in the carrier, or a vertical distance between the OHT vehicle and the carrier, and the lifting force is applied to the carrier.

公开(公告)号：US20240213069A1

公开(公告)日：2024-06-27

申请号：US18528362

申请日：2023-12-04

Applicant: SEMES CO., LTD. ,  Daekhon International Inc.

Inventor： Nahyun LEE ,  Myungjin LEE ,  Jongsuk CHOI ,  Eunsang YOON ,  Seungwhan SUH ,  Junghag CHA ,  Sungjin LIM ,  Jinkwan HEO

IPC: H01L21/677 ,  B65G49/06

CPC classification number: H01L21/67709 ,  B65G49/061 ,  H01L21/6773 ,  B65G2201/0297

Abstract: Provided is a tower lift including a frame extending in a vertical direction, a carriage configured to move along the frame, a first coil arranged on a first surface of the frame, the first surface facing the carriage, a second coil arranged on the first surface of the frame and separated from the first coil, a first magnet connected to the carriage and located between the first coil and the second coil, and a second magnet connected to the carriage, located between the first magnet and the second coil, and separated from the first magnet.

公开(公告)号：US20240182252A1

公开(公告)日：2024-06-06

申请号：US18525935

申请日：2023-12-01

Applicant: Tokyo Electron Limited

Inventor： Toshiaki TOYOMAKI ,  Norihiko AMIKURA ,  Seiichi KAISE ,  Masatomo KITA

IPC: B65G47/90

CPC classification number: B65G47/904 ,  B65G2201/0297

Abstract: There is a transfer module comprising: a housing; a load port disposed on a sidewall of the housing, the load port being capable of placing a container accommodating multiple objects to be transferred; a transfer device disposed in the housing and configured to transfer the objects; and a storage unit disposed in the housing and configured to temporarily accommodate the objects, wherein the housing includes: a first sidewall to which a load-lock module is connected; and a second sidewall other than a sidewall facing the first sidewall, to which the load port is connected, wherein the transfer device has a first arm having multiple forks on which the objects are placed, and the transfer device collectively transfers the objects in the container placed on the load port into the storage unit using the first arm.

公开(公告)号：US20240178032A1

公开(公告)日：2024-05-30

申请号：US18434329

申请日：2024-02-06

Applicant: Brooks Automation US, LLC

Inventor： Robert T. Caveney ,  Ulysses Gilchrist ,  Alexander Krupyshev

IPC: H01L21/677 ,  B25J9/04 ,  B25J11/00

CPC classification number: H01L21/67742 ,  H01L21/67745 ,  H01L21/67748 ,  B25J9/041 ,  B25J11/0095 ,  B65G2201/0297

Abstract: A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.

公开(公告)号：US20240174451A1

公开(公告)日：2024-05-30

申请号：US18376427

申请日：2023-10-03

Applicant: SEMES CO., LTD.

Inventor： Hanbit KIM ,  Daeil JANG ,  Jongseon JEON ,  Jungdae KIM ,  Hyojoo JEOUN

IPC: B65G43/04 ,  B65G35/06

CPC classification number: B65G43/04 ,  B65G35/06 ,  B65G2201/0297 ,  B65G2203/0291 ,  B65G2203/042

Abstract: Provided is an overhead hoist transport device including an article transport vehicle having a space in which articles are loaded and unloaded, and including traveling wheels, guide wheels, and steering wheels, a traveling rail positioned along a ceiling of a semiconductor manufacturing line and providing a moving path for the article transport vehicle, a measuring sensor attached to the article transport vehicle and configured to measure a traveling state of the article transport vehicle, and a system configured to receive measured values from the measuring sensor, wherein the traveling rail includes at least one traveling section among a straight section, a curved section, and a branching section, and wherein the system is further configured to determine whether specific wheels of the article transport vehicle are detached on the traveling rail.

公开(公告)号：US11990356B2

公开(公告)日：2024-05-21

申请号：US16973448

申请日：2019-03-22

Applicant: MURATA MACHINERY, LTD.

Inventor： Tatsuo Tsubaki ,  Shinji Onishi

IPC: H01L21/673 ,  B65G1/14 ,  H01L21/677

CPC classification number: H01L21/67393 ,  B65G1/14 ,  H01L21/67769 ,  B65G2201/0297

Abstract: A storage shelf includes a body frame and a shelf plate attached to the body frame with an elastic body therebetween, the storage shelf storing thereon a FOUP including a contained object. The storage shelf includes a feed nozzle on the shelf plate to feed gas to the FOUP, and a feed tube with one end communicating with the feed nozzle and the other end communicating with a main tube connected to a feed source of the gas to be fed to the FOUP, the main tube being supported by the body frame. The feed tube has a flexible portion having flexibility at least partially between the one end and the other end.

公开(公告)号：US11942347B2

公开(公告)日：2024-03-26

申请号：US17415762

申请日：2019-11-14

Applicant: MURATA MACHINERY, LTD.

Inventor： Eiji Wada ,  Yoshiki Yuasa ,  Kosuke Irino

IPC: H01L21/677 ,  B65G1/04 ,  B65G1/06

CPC classification number: H01L21/67733 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67736 ,  H01L21/67769 ,  B65G1/0414 ,  B65G1/0485 ,  B65G1/065 ,  B65G2201/0297

Abstract: A storage system includes an overhead stocker including an overhead crane track, shelving in which tiers of storages to accommodate articles therein are arranged vertically, and a crane to travel along the overhead crane track and transfer an article between the tiers of storages, an overhead transport vehicle system to perform receiving or delivering of an article from or to a predetermined transfer destination, and a transporter to vertically transport an article between the overhead stocker and the overhead transport vehicle system, the overhead transport vehicle system being provided below a lower end of the overhead stocker.

公开(公告)号：US20240076142A1

公开(公告)日：2024-03-07

申请号：US18271039

申请日：2021-03-16

Applicant: SHINKAWA LTD.

Inventor： Katsutoshi Nomura

IPC: B65G49/06 ,  B65G43/08 ,  B65G47/91

CPC classification number: B65G49/061 ,  B65G43/08 ,  B65G47/917 ,  B65G2201/0297

Abstract: This conveyance device comprises: a suction head which suctions and conveys an electronic component; a movement control unit which moves the suction head; a rotation control unit which controls a rotation position of the suction head centered on a predetermined axis of rotation; and a suction control unit which causes the suction head to suction the electronic component such that a load exerted on the electronic component from the suction head in conjunction with the movement of the suction head is less than or equal to a predetermined pressure. The movement control unit sets a correction amount of the predetermined pressure based on the self-weight of the suction head on the basis of the rotation position of the suction head. Using a conveyance device such as the foregoing makes it possible to improve the accuracy of load control during suction or suction release of an electronic component.