公开(公告)号：US20240355659A1

公开(公告)日：2024-10-24

申请号：US18758239

申请日：2024-06-28

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Wei-Chih CHEN ,  Shi-Chi CHEN ,  Ting-Wei WANG ,  Jen-Ti WANG ,  Kuo-Fong CHUANG

IPC: H01L21/677 ,  H01L21/67

CPC classification number: H01L21/67733 ,  H01L21/67259 ,  H01L21/67706

Abstract: A method includes moving a wafer transport device on a transport rail, wherein the wafer transport device comprises a hoist unit configured to grip a wafer container unit; stopping the wafer transport device above a load port; after stopping the wafer transport device, reading data of a rail mark located on the transport rail; aligning an orientation of the wafer transport device according to the data of the rail mark; after aligning the orientation of the wafer transport device according to the data of the rail mark, aligning the wafer transport device with respect to a top surface of the load port; after aligning the wafer transport device with respect to the top surface of the load port, lowering the hoist unit.

公开(公告)号：US12119253B2

公开(公告)日：2024-10-15

申请号：US17620967

申请日：2020-05-08

Applicant: Murata Machinery, Ltd.

Inventor： Wataru Kitamura

IPC: H01L21/677 ,  B65G1/04

CPC classification number: H01L21/67733 ,  B65G1/0457 ,  H01L21/67706 ,  H01L21/67727 ,  H01L21/6773 ,  B65G2201/0297

Abstract: A transport vehicle includes: a traveler; a transferer that is mounted on the traveler and receives or delivers an article from or to a transfer destination; and an antenna that is provided so that at least the position or the posture thereof can be changed to follow the action of the transferer, and that performs wireless communication with another device.

公开(公告)号：US12116021B2

公开(公告)日：2024-10-15

申请号：US17288938

申请日：2019-09-13

Applicant: MURATA MACHINERY, LTD.

Inventor： Haruki Ogo ,  Yasuhisa Ito

IPC: B61B3/02 ,  B61B13/00 ,  B61B13/06 ,  B65G1/04 ,  B66C7/02 ,  B66C7/08 ,  B66C7/12 ,  B66C9/02 ,  B66C9/04 ,  B66C9/16 ,  H01L21/677 ,  B61B13/04

CPC classification number: B61B3/02 ,  B61B13/00 ,  B61B13/06 ,  B65G1/0457 ,  B65G1/0478 ,  B66C7/02 ,  B66C7/08 ,  B66C7/12 ,  B66C9/02 ,  B66C9/04 ,  B66C9/16 ,  H01L21/67706 ,  H01L21/67715 ,  H01L21/67733 ,  B61B13/04 ,  B65G2201/0297 ,  H01L21/6773

Abstract: A traveling vehicle system includes a track including a first gap, a partial track, and a second gap, a traveling vehicle including a drive wheel and first and second auxiliary wheels, a first auxiliary track on a near side of the first gap in a traveling direction and in contact with a lower end of the first auxiliary wheel while a lower end of the drive wheel passes through the first gap when the drive wheel enters the partial track, and a second auxiliary track on a far side of the second gap in the traveling direction and in contact with a lower end of the second auxiliary wheel while the lower end of the drive wheel passes through the second gap when the drive wheel leaves the partial track.

公开(公告)号：US20240339346A1

公开(公告)日：2024-10-10

申请号：US18628204

申请日：2024-04-05

Applicant: Daifuku Co., Ltd.

Inventor： Yoshinari Wada

IPC: H01L21/677 ,  B66C19/00

CPC classification number: H01L21/67724 ,  B66C19/00 ,  H01L21/67733 ,  H01L21/67727 ,  H01L21/6773

Abstract: A transport vehicle includes a holder and a lifter. The lifter includes an elongated member and a lifting unit. The holder includes a support, at least one first holder member, at least one second holder member, and a holder drive. The first holder member and the second holder member are located below the support. The holder drive is located in a space in a vertical direction below the support. The space includes the first holder member and the second holder member. The elongated member fastener fastening an elongated member to the support is located on the support. The elongated member fastener protrudes downward from the support.

公开(公告)号：US12094745B2

公开(公告)日：2024-09-17

申请号：US17818370

申请日：2022-08-09

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.

Inventor： Yong-Jyu Lin ,  Fu-Hsien Li ,  Chen-Wei Lu ,  Chi-Feng Tung ,  Hsiang Yin Shen

IPC: H01L21/67 ,  B65G1/04 ,  B66C13/23 ,  B66C13/48 ,  B66C19/00 ,  B66F9/18 ,  H01L21/677 ,  B61B3/00

CPC classification number: H01L21/67733 ,  B65G1/0457 ,  B66C13/23 ,  B66C13/48 ,  B66C19/00 ,  B66F9/183 ,  H01L21/67259 ,  H01L21/67724 ,  H01L21/6773 ,  H01L21/67736 ,  B61B3/00 ,  B65G2201/0297

Abstract: A method for operating a conveying system is provided. An overhead hoist transport (OHT) vehicle is provided, wherein the OHT vehicle includes a gripping member configured to grip and hold a carrier, and a receiver configured to receive a signal. The signal is transmitted to the receiver of the OHT vehicle. The OHT vehicle is moved toward the carrier, and the carrier is gripped by the gripping member of the OHT vehicle. A lifting force is determined based on a weight of a carrier, a number of workpieces in the carrier, or a vertical distance between the OHT vehicle and the carrier, and the lifting force is applied to the carrier.

公开(公告)号：US12094744B2

公开(公告)日：2024-09-17

申请号：US18310187

申请日：2023-05-01

Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor： Chuan Wei Lin ,  Fu-Hsien Li ,  Chi-Feng Tung ,  Hsiang Yin Shen

IPC: H01L21/677

CPC classification number: H01L21/67724 ,  H01L21/67706 ,  H01L21/67733

Abstract: Some implementations described herein provide a method that includes loading, from a load port and into a first buffer of a multiple-buffer overhead hoist transport (OHT) vehicle, a first transport carrier storing one or more processed wafers. The method includes unloading to the load port, while the first buffer retains the first transport carrier, and from a second buffer of the multiple-buffer OHT vehicle, a second transport carrier storing one or more wafers for processing. In other implementations, the method includes loading, into a first buffer of the multiple-buffer OHT vehicle, a first transport carrier storing one or more wafers for processing, while a semiconductor processing tool, associated with a load port, is processing one or more wafers associated with a second transport carrier. The method includes positioning the multiple-buffer OHT vehicle above the load port while the multiple-buffer OHT vehicle retains the first transport carrier in the first buffer.

公开(公告)号：US12057338B2

公开(公告)日：2024-08-06

申请号：US17605593

申请日：2020-03-13

Applicant: MURATA MACHINERY, LTD.

Inventor： Makoto Kobayashi

IPC: H01L21/677 ,  B66C1/44 ,  B66C11/00 ,  B66C19/00

CPC classification number: H01L21/67733 ,  B66C1/445 ,  B66C11/00 ,  H01L21/67706 ,  H01L21/67724 ,  H01L21/6773 ,  B66C19/00

Abstract: An overhead transport vehicle includes a conveyor to travel along a track, a holder to hold an object to be conveyed, and a lifting driver to lift and lower the holder. The holder includes a base, a holder including a body and a pair of grippers connected to the body in an openable/closable manner, the holder being attached to the base so as to be movable along an opening/closing direction of the pair of grippers, and a first elastic member to restrict, between the base and the body, movement of the holder along the opening/closing direction.

公开(公告)号：US20240258146A1

公开(公告)日：2024-08-01

申请号：US18163027

申请日：2023-02-01

Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor： Chieh Hsu ,  Guancyun Li ,  Ching-Jung Chang

IPC: H01L21/677

CPC classification number: H01L21/67736 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67769

Abstract: Storage systems and method of using the same are provided. An exemplary storage system according to the present disclosure includes a storage device including a plurality of storage locations arranged in an upright stadium shape and a plurality of load ports each movable to engage any of the plurality of storage locations.

公开(公告)号：US11942347B2

公开(公告)日：2024-03-26

申请号：US17415762

申请日：2019-11-14

Applicant: MURATA MACHINERY, LTD.

Inventor： Eiji Wada ,  Yoshiki Yuasa ,  Kosuke Irino

IPC: H01L21/677 ,  B65G1/04 ,  B65G1/06

CPC classification number: H01L21/67733 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67736 ,  H01L21/67769 ,  B65G1/0414 ,  B65G1/0485 ,  B65G1/065 ,  B65G2201/0297

Abstract: A storage system includes an overhead stocker including an overhead crane track, shelving in which tiers of storages to accommodate articles therein are arranged vertically, and a crane to travel along the overhead crane track and transfer an article between the tiers of storages, an overhead transport vehicle system to perform receiving or delivering of an article from or to a predetermined transfer destination, and a transporter to vertically transport an article between the overhead stocker and the overhead transport vehicle system, the overhead transport vehicle system being provided below a lower end of the overhead stocker.

公开(公告)号：US20240059497A1

公开(公告)日：2024-02-22

申请号：US18340569

申请日：2023-06-23

Applicant: SEMES CO., LTD.

Inventor： In Su JO ,  Tae Uk PARK

IPC: B65G43/02 ,  H01L21/677 ,  H01L21/67

CPC classification number: B65G43/02 ,  H01L21/67715 ,  H01L21/67259 ,  H01L21/67733 ,  H01L21/67736 ,  B65G2812/99 ,  B65G2811/0678 ,  B65G2201/0297

Abstract: A transfer system according to the present invention comprises a first travel rail including a first merging section; a second travel rail merging the first travel rail at a merging point and including a second merging section corresponding to the first merging section; a transfer/loading area defined in the second merging section and located upstream of the merging point; and a controller (OCS) for controlling an operation of at least one transfer vehicle moving along the first travel rail and the second travel rail, wherein a second transfer vehicle moves along the second travel rail and enters the transfer/loading area, the second transfer vehicle starts a transfer/loading operation in the transfer/loading area, the first transfer vehicle moves along the first travel rail and enters the first merging section, and the first transfer vehicle passes through the merging point before the second transfer vehicle.