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公开(公告)号：US20240258146A1
公开(公告)日：2024-08-01
申请号：US18163027
申请日：2023-02-01
Inventor： Chieh Hsu , Guancyun Li , Ching-Jung Chang
IPC: H01L21/677
CPC classification number: H01L21/67736 , H01L21/6773 , H01L21/67733 , H01L21/67769
Abstract: Storage systems and method of using the same are provided. An exemplary storage system according to the present disclosure includes a storage device including a plurality of storage locations arranged in an upright stadium shape and a plurality of load ports each movable to engage any of the plurality of storage locations.
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公开(公告)号：US20230395415A1
公开(公告)日：2023-12-07
申请号：US17832605
申请日：2022-06-04
Inventor： Chieh Hsu , Guancyun Li , Ching-Jung Chang , Chi-Feng Tung
IPC: H01L21/677 , B65G17/12
CPC classification number: H01L21/67724 , H01L21/6773 , H01L21/67733 , B65G17/12
Abstract: System and method for cross-fab wafer transportation are provided. An exemplary system includes a first control unit coupled to an associated first automatic material handling system (AMHS), the first AMHS includes a first overhead transport (OHT) track comprising a first portion and a first vehicle movable along the first OHT track and carrying a container, the container is operable to carry semiconductor wafers therein. The system includes a second control unit coupled to an associated second AMHS, the second AMHS includes a second OHT track comprising a second portion adjacent to the first portion and a second vehicle movable along the second OHT track. When the first vehicle is within the first portion of the first OHT track and the second vehicle is within the second portion of the second OHT track, the first and second vehicles are operable to transfer the container directly from the first vehicle to the second vehicle.
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公开(公告)号：US20230416994A1
公开(公告)日：2023-12-28
申请号：US17849038
申请日：2022-06-24
Inventor： Guancyun Li , Ching-Jung Chang
IPC: E01B25/24 , B65G17/20 , H01L21/677
CPC classification number: E01B25/24 , B65G17/20 , H01L21/67733 , B65G2201/0297
Abstract: The present disclosure provides a method to install a rail assembly according to different rail plans. A method according to the present disclosure includes assembling an overhead raceway module that includes a plurality of first level raceways extending along a first direction, and a plurality of second level raceways extending along a second direction perpendicular to the first direction, each of the plurality of second level raceways being fastened to the plurality of first level raceways, raising the overhead raceway module adjacent to a ceiling, installing the overhead raceway module to the ceiling, and fastening a rail assembly to the plurality of second level raceways, the rail assembly extending lengthwise along the first direction. A width of the overhead raceway module along the second direction is at least three times a width of the rail assembly along the second direction.
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公开(公告)号：US11854846B2
公开(公告)日：2023-12-26
申请号：US17809582
申请日：2022-06-29
Inventor： Fu-Hsien Li , Sheng-Kang Yu , Chi-Feng Tung , Hsiang Yin Shen , Guancyun Li
IPC: G05B19/19 , G05B19/4061 , H01L21/67 , B66C17/26 , B66C15/00 , B66C13/16 , B66C13/18 , H01L21/677 , G03F7/00
CPC classification number: H01L21/67265 , B66C13/16 , B66C13/18 , B66C15/00 , B66C17/26 , G03F7/70033 , G03F7/7075 , G03F7/7085 , G03F7/70533 , G03F7/70741 , G03F7/70975 , G03F7/70991 , G05B19/19 , G05B19/4061 , H01L21/67259 , H01L21/67706 , H01L21/67721 , H01L21/67724 , H01L21/67733 , H01L21/67736 , G05B2219/40292 , G05B2219/45031
Abstract: A system for a semiconductor fabrication facility includes a maintenance tool, a control unit, a first track, a second track, a maintenance crane movably mounted on the first track, a plurality of first sensors disposed on the first track, an OHT vehicle movably mounted on the second track, and a second sensor on the OHT vehicle. The first sensors detect a location of the maintenance crane and generate a first location data to the control unit. The second sensor generates a second location data to the control unit.
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公开(公告)号：US20240071797A1
公开(公告)日：2024-02-29
申请号：US17896374
申请日：2022-08-26
Inventor： Guancyun Li , Ching-Jung Chang , Chi-Feng Tung
IPC: H01L21/677 , H01L21/67
CPC classification number: H01L21/67715 , H01L21/67259 , H01L21/67706 , H01L21/67724 , H01L21/67727 , H01L21/6773 , H01L21/67733
Abstract: An apparatus in an overhead transport system is provided. The apparatus includes a hanger feature configured to be hung from a ceiling, a plate-like structure having a top surface and a bottom surface, the bottom surface being rotatably coupled to the hanger feature, and at least one pair of rail members mechanically coupled to the bottom surface of the plate-like structure by way of a plurality of yoke members.
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公开(公告)号：US20240021456A1
公开(公告)日：2024-01-18
申请号：US18194428
申请日：2023-03-31
Inventor： Chieh Hsu , Guancyun Li , Ching-Jung Chang , Chi-Feng Tung
IPC: H01L21/677 , H01L21/687
CPC classification number: H01L21/67733 , H01L21/67769 , H01L21/67766 , H01L21/68707
Abstract: System and method for cross-fab wafer transportation are provided. A method includes providing a first FAB building and a second FAB building connected via a bridging area, the second FAB building comprising fabrication tools configured to perform fabrication processes different than fabrication processes performed by fabrication tools in the first FAB building, after performing fabrication processes in the first FAB building, configuring a first vehicle of the first FAB building to travel along a first OHT track and take the wafer to the bridging area, configuring a second vehicle of the second FAB building to travel along a second OHT track and arrive at the bridging area, where a portion of the first OHT is in parallel with a portion of the second OHT track at the bridging area, when some predetermined conditions are met, configuring the first vehicle to transfer the wafer to the second vehicle.
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公开(公告)号：US20220348415A1
公开(公告)日：2022-11-03
申请号：US17484973
申请日：2021-09-24
Inventor： Guancyun Li , Ching-Jung Chang
Abstract: A system and method for rail management of an overhead transport (“OHT”) system of an associated automated material handing system (“AMHS”) that includes a controller in communication with the OHT system, including vehicles traveling on rails of the OHT. The rail management system also includes a turntable located on a portion of the OHT and equipped with a set of fixed rails. Upon receipt of a request to rotate the turntable from a first run-through direction to a second run-through direction, the controller engages at least one stopper sensor located near the turntable. The controller then directs the turntable to rotate from the first run-through direction to the second run-through direction. After completion, the controller disengages the at least one stopper to enable vehicles to travel directly in the second run-through direction.
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公开(公告)号：US20240387214A1
公开(公告)日：2024-11-21
申请号：US18786057
申请日：2024-07-26
Inventor： Chieh Hsu , Guancyun Li , Ching-Jung Chang , Chi-Feng Tung
IPC: H01L21/67 , G05B19/418 , H01L21/677
Abstract: An AMHS interface management system configured to facilitate the exchange of lot information between distinct AMHS systems. The AMHS interface management system receives lot information from a first AMHS system in a first format and translates the lot information into a format associated with a second AMHS system. The AMHS interface management system utilizes a handshake area located between the first and second AMHS systems. The handshake area includes one or more vehicles that facilitate the movement of a lot between the first AMHS system and the second AMHS system.
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公开(公告)号：US12094741B2
公开(公告)日：2024-09-17
申请号：US17379734
申请日：2021-07-19
Inventor： Chieh Hsu , Guancyun Li , Ching-Jung Chang , Chi-Feng Tung
IPC: H01L21/67 , G05B19/418 , H01L21/677
CPC classification number: H01L21/67276 , G05B19/4189 , H01L21/67724 , H01L21/67733
Abstract: An AMHS interface management system configured to facilitate the exchange of lot information between distinct AMHS systems. The AMHS interface management system receives lot information from a first AMHS system in a first format and translates the lot information into a format associated with a second AMHS system. The AMHS interface management system utilizes a handshake area located between the first and second AMHS systems. The handshake area includes one or more vehicles that facilitate the movement of a lot between the first AMHS system and the second AMHS system.
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公开(公告)号：US11380566B2
公开(公告)日：2022-07-05
申请号：US17134211
申请日：2020-12-25
Inventor： Fu-Hsien Li , Sheng-Kang Yu , Chi-Feng Tung , Hsiang Yin Shen , Guancyun Li
IPC: G05B19/19 , G05B19/4061 , H01L21/67 , B66C17/26 , B66C15/00 , B66C13/16 , B66C13/18 , H01L21/677 , G03F7/20
Abstract: A system for a semiconductor fabrication facility includes a manufacturing tool including a load port, a maintenance crane, a rectangular zone overlapping with the load port of the manufacturing tool, a plurality of first sensors at corners of the rectangular zone, an OHT vehicle, a second sensor on the OHT vehicle, a third sensor on the load port, and a control unit. The first sensors are configured to detect a location of the maintenance crane and to generate a first location data. The second sensor is configured to generate a second location data. The control unit is configured to receive the first location data of the maintenance crane and the second location data of the OHT vehicle. The control unit further sends signals to the second sensor and the third sensor or to cut off the signal to the second sensor.
