公开(公告)号：US12116021B2

公开(公告)日：2024-10-15

申请号：US17288938

申请日：2019-09-13

申请人： MURATA MACHINERY, LTD.

发明人： Haruki Ogo ,  Yasuhisa Ito

IPC分类号： B61B3/02 ,  B61B13/00 ,  B61B13/06 ,  B65G1/04 ,  B66C7/02 ,  B66C7/08 ,  B66C7/12 ,  B66C9/02 ,  B66C9/04 ,  B66C9/16 ,  H01L21/677 ,  B61B13/04

CPC分类号： B61B3/02 ,  B61B13/00 ,  B61B13/06 ,  B65G1/0457 ,  B65G1/0478 ,  B66C7/02 ,  B66C7/08 ,  B66C7/12 ,  B66C9/02 ,  B66C9/04 ,  B66C9/16 ,  H01L21/67706 ,  H01L21/67715 ,  H01L21/67733 ,  B61B13/04 ,  B65G2201/0297 ,  H01L21/6773

摘要： A traveling vehicle system includes a track including a first gap, a partial track, and a second gap, a traveling vehicle including a drive wheel and first and second auxiliary wheels, a first auxiliary track on a near side of the first gap in a traveling direction and in contact with a lower end of the first auxiliary wheel while a lower end of the drive wheel passes through the first gap when the drive wheel enters the partial track, and a second auxiliary track on a far side of the second gap in the traveling direction and in contact with a lower end of the second auxiliary wheel while the lower end of the drive wheel passes through the second gap when the drive wheel leaves the partial track.

公开(公告)号：US20240059497A1

公开(公告)日：2024-02-22

申请号：US18340569

申请日：2023-06-23

申请人： SEMES CO., LTD.

发明人： In Su JO ,  Tae Uk PARK

IPC分类号： B65G43/02 ,  H01L21/677 ,  H01L21/67

CPC分类号： B65G43/02 ,  H01L21/67715 ,  H01L21/67259 ,  H01L21/67733 ,  H01L21/67736 ,  B65G2812/99 ,  B65G2811/0678 ,  B65G2201/0297

摘要： A transfer system according to the present invention comprises a first travel rail including a first merging section; a second travel rail merging the first travel rail at a merging point and including a second merging section corresponding to the first merging section; a transfer/loading area defined in the second merging section and located upstream of the merging point; and a controller (OCS) for controlling an operation of at least one transfer vehicle moving along the first travel rail and the second travel rail, wherein a second transfer vehicle moves along the second travel rail and enters the transfer/loading area, the second transfer vehicle starts a transfer/loading operation in the transfer/loading area, the first transfer vehicle moves along the first travel rail and enters the first merging section, and the first transfer vehicle passes through the merging point before the second transfer vehicle.

公开(公告)号：US11869791B2

公开(公告)日：2024-01-09

申请号：US17311872

申请日：2019-09-02

申请人： ULVAC, INC.

发明人： Dai Takagi ,  Yuu Mizushima ,  Toshiyuki Koizumi

IPC分类号： C23C14/50 ,  C23C14/56 ,  H01L21/677

CPC分类号： H01L21/6776 ,  C23C14/50 ,  C23C14/56 ,  H01L21/67715 ,  H01L21/677

摘要： The present invention provides a technology capable of inhibiting, in a vacuum processing apparatus that conveys a plurality of substrate holders along a conveying path formed to have a projected shape on a vertical surface, the projected shape being a continuous ring shape, dust from being generated during conveyance of a substrate holder. The present invention includes, in a vacuum chamber 2, an anti-sag member 35 assembled to a first drive unit 36 provided on an outer side with respect to a conveying direction of the conveying path, the vacuum chamber 2 including a conveying path formed to have a projected shape on the vertical surface, the projected shape being a continuous ring shape, a single vacuum atmosphere being formed in the vacuum chamber 2. A travel roller 54 of the anti-sag member 35 travels while being guided and supported by a guide unit 17 that is provided below a return-path-side conveying portion 33c positioned on a lower side of a substrate holder conveying mechanism 3 and extends in a second conveying direction P2, and the first drive part 36 is configured to come into contact with a first driven unit 12 of a substrate holder 11 and drive the substrate holder 11 along the conveying path in the second conveying direction P2.

公开(公告)号：US20190237445A1

公开(公告)日：2019-08-01

申请号：US16381982

申请日：2019-04-11

申请人： Rohinni, LLC

发明人： Andrew Huska ,  Cody Peterson ,  Clinton Adams ,  Sean Kupcow

IPC分类号： H01L25/075 ,  H01L21/683 ,  G02F1/1335 ,  H01L21/677 ,  H01L21/68 ,  H01L21/687 ,  H01L21/66 ,  H01L23/00 ,  H01L33/62 ,  H01L21/67 ,  H01L23/544 ,  H01L21/48 ,  H01L23/532

CPC分类号： H01L25/0753 ,  G02F1/133603 ,  G02F1/133605 ,  G02F1/133606 ,  G02F2001/133612 ,  H01L21/4853 ,  H01L21/67132 ,  H01L21/67144 ,  H01L21/67196 ,  H01L21/67265 ,  H01L21/67715 ,  H01L21/67778 ,  H01L21/681 ,  H01L21/6836 ,  H01L21/68742 ,  H01L22/12 ,  H01L22/20 ,  H01L23/53242 ,  H01L23/544 ,  H01L24/75 ,  H01L24/81 ,  H01L24/83 ,  H01L24/89 ,  H01L33/62 ,  H01L2221/68322 ,  H01L2221/68327 ,  H01L2221/68354 ,  H01L2221/68363 ,  H01L2221/68381 ,  H01L2223/54413 ,  H01L2223/54426 ,  H01L2223/54433 ,  H01L2223/54486 ,  H01L2224/16238 ,  H01L2224/75252 ,  H01L2224/75261 ,  H01L2224/75262 ,  H01L2224/75303 ,  H01L2224/7531 ,  H01L2224/75314 ,  H01L2224/75317 ,  H01L2224/75651 ,  H01L2224/75753 ,  H01L2224/75824 ,  H01L2224/75842 ,  H01L2224/75843 ,  H01L2224/81191 ,  H01L2224/81205 ,  H01L2224/81224 ,  H01L2224/83224 ,  H01L2924/12041 ,  H01L2924/405 ,  H01L2933/0066 ,  H01L2924/00014

摘要： A system to effectuate improved transfer of semiconductor die. A first frame secures a first substrate having the semiconductor die. A second frame secures a second substrate adjacent the first substrate. A needle is disposed adjacent to the first frame. The needle includes: a longitudinal surface extending in a direction toward the second frame, and a base end having a cross-sectional dimension being based, at least in part, on a cross-sectional dimension of the semiconductor die. A needle actuator is operably connected to the needle and is configured to actuate the needle such that, during the transfer operation, when the first substrate is secured in the first frame and the second substrate is secured in the second frame, the needle presses the semiconductor die into contact with the second substrate so as to transfer the semiconductor die onto the second substrate.

公开(公告)号：US20180350648A1

公开(公告)日：2018-12-06

申请号：US15562319

申请日：2016-04-01

申请人： APPLIED MATERIALS, INC.

发明人： Christof KLESEN

IPC分类号： H01L21/68 ,  F16C32/04 ,  H02K7/09 ,  H02K41/03 ,  C23C14/50 ,  C23C16/458

CPC分类号： F16C32/0472 ,  F16C32/0446 ,  F16C32/0465 ,  F16C32/0468 ,  F16C2370/00 ,  F16C2380/18 ,  H01L21/67709 ,  H01L21/67715 ,  H01L21/6776

摘要： The present invention relates to a device for holding, positioning and/or moving an object, with a base and with a carrier movable relative to the base, at least one magnetic bearing for generating a bearing or holding force between the base and the carrier, wherein the carrier is contactlessly supported on the base via the magnetic bearing, at least one drive acting contactlessly between base and carrier for the displacement of the carrier along the base in at least one transport direction, wherein the drive comprises a linear motor with at least one slider and one stator, which are arranged on the base and on the carrier and which, aside from a displacement force acting along the transport direction, are configured to create a counter-force between base and carrier which counteracts the bearing or holding force.

公开(公告)号：US09919878B2

公开(公告)日：2018-03-20

申请号：US15110412

申请日：2015-10-14

申请人： BOE Technology Group Co., Ltd. ,  Hefei Xinsheng Optoelectronics Technology Co., Ltd.

发明人： Xiang Dong

IPC分类号： B65G47/10 ,  B65G47/64 ,  B65G49/06 ,  H05K13/00

CPC分类号： B65G47/643 ,  B65G49/06 ,  B65G2201/0297 ,  G02F1/1303 ,  H01L21/67715 ,  H01L21/6773 ,  H01L21/67733 ,  H05K13/0061

摘要： The embodiment of the present disclosure relates to a system and a method for loading and unloading a cassette. The system comprises: a lifting device vertically moving between a first height and a second height; a first conveying device in the lifting device to move the cassette horizontally; a second conveying device to move the cassette in horizontally; a third conveying device to move the cassette horizontally, a plurality of first position sensors to detect a position of the lifting device; and a control device to control vertical movements of the lifting device, and adjust further movements of the first conveying device in the lifting device based on an initial stop position of the lifting device such that the first conveying device is aligned with the second conveying device at the first height, or is aligned with the third conveying device at the second height.

公开(公告)号：US20180050873A1

公开(公告)日：2018-02-22

申请号：US15561006

申请日：2015-03-27

申请人： ETUAN MECHATRONIC PTE LTD

发明人： Geck Leng LIM ,  Sen Lun PHAN ,  Geck Ho LIM ,  Kay Yong MOK

IPC分类号： B65G37/02 ,  H01L21/677 ,  B65G15/00

CPC分类号： B65G37/02 ,  B65G15/00 ,  H01L21/67276 ,  H01L21/67715 ,  H01L21/67736

摘要： A modular workstation transport apparatus is operable as one modular workstation transport apparatus in a series of modular workstation transport apparatus and comprises: a first axial transport mechanism for transporting a workpiece along a first axial direction; a second axial transport mechanism for transporting the workpiece along a second axial direction; a first working area transport mechanism for transporting the workpiece between the working area and the first axial transport mechanism; and a second working area transport mechanism for transporting the workpiece between the working area and the second axial transport mechanism.

公开(公告)号：US09862554B2

公开(公告)日：2018-01-09

申请号：US14353153

申请日：2012-10-26

申请人： Brooks Automation, Inc.

发明人： Robert T. Caveney

IPC分类号： H01L21/677 ,  B65G47/90 ,  H01L21/67

CPC分类号： B65G47/901 ,  B65G2201/0297 ,  H01L21/67173 ,  H01L21/67178 ,  H01L21/67184 ,  H01L21/67196 ,  H01L21/67715 ,  H01L21/67733

摘要： A substrate processing system including at least two vertically stacked transport chambers, each of the vertically stacked transport chambers including a plurality of openings arranged to form vertical stacks of openings configured for coupling to vertically stacked process modules, at least one of the vertically stacked transport chambers includes at least one transport chamber module arranged for coupling to another transport chamber module to form a linear transport chamber and another of the at least two stacked transport chambers including at least one transport chamber module arranged for coupling to another transport chamber module to form another linear transport chamber, and a transport robot disposed in each of the transport chamber modules, where a joint of the transport robot is locationally fixed along a linear path formed by the respective linear transport chamber.

公开(公告)号：US09758308B1

公开(公告)日：2017-09-12

申请号：US15483137

申请日：2017-04-10

申请人： Daifuku Co., Ltd.

发明人： Tadashi Nishikawa ,  Takeshi Shin

IPC分类号： G06F7/00 ,  B65G35/06

CPC分类号： H01L21/67276 ,  B65G2201/0297 ,  G05B2219/31003 ,  G05B2219/31005 ,  H01L21/67294 ,  H01L21/67715 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67733

摘要： The article transport vehicles are equipped with wireless tags that transmit tag information, and an article transport facility includes: a transport control apparatus that controls the entrance of the vehicles into the control area such that the number of vehicles that are present in one control area is no greater than a control number; a plurality of access points; and a position detection apparatus that detects the respective positions of the vehicles with an accuracy with which a plurality of positions in the control area are distinguishable, based on the same tag information that has been received by the access points. The transport control apparatus permits a number of vehicles, the number being greater than the control number, to enter the control area if a predetermined permission condition is satisfied, based on the positional information that indicates the position of each vehicle.

公开(公告)号：US20170197794A1

公开(公告)日：2017-07-13

申请号：US15403499

申请日：2017-01-11

申请人： Daifuku Co., Ltd.

发明人： Kazuhiro Murao

IPC分类号： B65G43/00 ,  H01L21/677 ,  B65G9/00

CPC分类号： B65G43/00 ,  B65G9/00 ,  B65G2201/0297 ,  H01L21/67706 ,  H01L21/67709 ,  H01L21/67715 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67733

摘要： An operation device is provided with: a coupler portion configured to be coupled to a travel member that travels within a travel space that is located above a passage space that allows an operator to pass through; and a rod-shaped portion that extends from the coupler portion to the passage space. The travel member is provided with: a brake mechanism; a coupling-target portion to which the coupler portion is coupled; and a cancellation input terminal. The operation device is provided with: a cancellation output terminal configured to be connected to the cancellation input terminal; a command receiver configured to receive a manual operation that is performed to make an instruction to output the cancellation signal; and a grip configured to be gripped by the operator. The grip and the command receiver are located within the passage space when the coupler portion is coupled to the coupling-target portion.