公开(公告)号：US20180050873A1

公开(公告)日：2018-02-22

申请号：US15561006

申请日：2015-03-27

申请人： ETUAN MECHATRONIC PTE LTD

发明人： Geck Leng LIM ,  Sen Lun PHAN ,  Geck Ho LIM ,  Kay Yong MOK

IPC分类号： B65G37/02 ,  H01L21/677 ,  B65G15/00

CPC分类号： B65G37/02 ,  B65G15/00 ,  H01L21/67276 ,  H01L21/67715 ,  H01L21/67736

摘要： A modular workstation transport apparatus is operable as one modular workstation transport apparatus in a series of modular workstation transport apparatus and comprises: a first axial transport mechanism for transporting a workpiece along a first axial direction; a second axial transport mechanism for transporting the workpiece along a second axial direction; a first working area transport mechanism for transporting the workpiece between the working area and the first axial transport mechanism; and a second working area transport mechanism for transporting the workpiece between the working area and the second axial transport mechanism.