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    Mainframe of dual-robot substrate processing system
    2.
    外观设计
    Mainframe of dual-robot substrate processing system 有权

    公开(公告)号：USD1029066S1

    公开(公告)日：2024-05-28

    申请号：US29830396

    申请日：2022-03-11

    Applicant: APPLIED MATERIALS, INC.

    Designer： Michael R. Rice ,  Michael C. Kuchar ,  Travis Morey ,  Adam J. Wyatt ,  Ofer Amir

    Abstract: FIG. 1 is a front, top perspective view of a mainframe for a dual-robot substrate processing system in accordance with the present design.
    FIG. 2 is a left side elevational view of the present design.
    FIG. 3 is a right side elevational view of the present design.
    FIG. 4 is a front elevational view of the present design.
    FIG. 5 is a rear elevational view of the present design.
    FIG. 6 is a top plan view of the present design.
    FIG. 7 is a bottom plan view of the second embodiment of the present design; and,
    FIG. 8 is a front, top perspective view of the present design, showing unclaimed components attached thereto.
    The broken lines shown in the figures are directed to unclaimed portions of the mainframe and/or unclaimed components attached to the mainframe that are for illustrative purposes only and form no part of the claimed design.

    Slit valve pneumatic control
    3.
    发明授权
    Slit valve pneumatic control 有权

    公开(公告)号：US11415230B2

    公开(公告)日：2022-08-16

    申请号：US16836231

    申请日：2020-03-31

    Applicant: APPLIED MATERIALS, INC.

    Inventor： Paul Z. Wirth ,  Ofer Amir ,  Michael C. Kuchar

    IPC: F16K3/18 ,  F16K3/02 ,  F16K31/124 ,  F16K37/00 ,  F15B21/02 ,  H01L21/677 ,  H01L21/67

    Abstract: Disclosed are a slit valve apparatus and a method for controlling a slit valve. The slit valve apparatus includes a slit valve assembly and a servo-control system in communication with the slit valve assembly. The slit valve assembly includes at least one gate able to transition between an open position and a closed position, at least one pneumatic actuator, at least one proportional pneumatic valve including a plurality of controllers, and a continuous position sensor. The servo-control system includes a centralized controller that generates a control signal and adjusts the movement of the at least one gate based on the position trajectory for the gate, a linear position measurement of the gate from the continuous position sensor, and fluid pressure/flow measurements from the plurality of controllers.

    MULTI-PIECE SLIT VALVE GATE
    5.
    发明申请
    MULTI-PIECE SLIT VALVE GATE 有权

    公开(公告)号：US20250060041A1

    公开(公告)日：2025-02-20

    申请号：US18797067

    申请日：2024-08-07

    Applicant: Applied Materials, Inc.

    Inventor： Farzad Vakilzadeh ,  Shawn Thanhson Le ,  Ofer Amir ,  Ramon Zaragoza

    IPC: F16K3/02

    Abstract: Disclosed is a slit valve gate. The slit valve gate includes a base portion configured to couple to a slit valve actuator and includes a first angled alignment feature. The slit valve gate further includes a seal portion coupled to the base portion. The seal portion is configured to create an airtight seal between the slit valve gate and a sealing surface of a slit valve opening. The slit valve gate further includes a clamp portion coupled to the base portion. The clamp portion includes a second angled alignment feature configured to interface with the first angled alignment feature of the base portion to align the clamp portion with respect to the base portion. The clamp portion retains the seal portion at least partially between the clamp portion and the base portion.

    MULTI-PIECE SLIT VALVE GATE
    6.
    发明公开
    MULTI-PIECE SLIT VALVE GATE 审中-公开

    公开(公告)号：US20240035575A1

    公开(公告)日：2024-02-01

    申请号：US17876035

    申请日：2022-07-28

    Applicant: APPLIED MATERIALS, INC.

    Inventor： Shawn Thanhson Le ,  Peter Reimer ,  Ofer Amir ,  Hannie Thi Vo

    IPC: F16K3/02 ,  F16K3/314

    CPC classification number: F16K3/0227 ,  F16K3/314 ,  H01J37/32458

    Abstract: Disclosed is a slit valve gate. The slit valve gate includes a base portion configured to couple to a slit valve actuator. The slit valve gate further includes a seal portion coupled to the base portion. The seal portion is configured to create an airtight seal between the slit valve gate and a sealing surface of a slit valve opening. The slit valve gate further includes a clamp portion coupled to the base portion. The clamp portion retains the seal portion at least partially between the clamp portion and the base portion.

    Mainframe of substrate processing system
    9.
    外观设计
    Mainframe of substrate processing system 有权

    公开(公告)号：USD992611S1

    公开(公告)日：2023-07-18

    申请号：US29859229

    申请日：2022-11-08

    Applicant: Applied Materials, Inc.

    Designer： Michael R. Rice ,  Michael C. Kuchar ,  Travis Morey ,  Adam J. Wyatt ,  Ofer Amir

    Abstract: FIG. 1 is a top perspective view of a mainframe for substrate processing system of the present design.
    FIG. 2 is a side view thereof.
    FIG. 3 is a side view thereof.
    FIG. 4 is a front view thereof.
    FIG. 5 is a rear view thereof.
    FIG. 6 is a top view thereof.
    FIG. 7 is a bottom view thereof; and,
    FIG. 8 is a top perspective view thereof, showing unclaimed components attached thereto.
    The broken lines shown in the figures are directed to unclaimed portions of the mainframe and/or unclaimed components attached to the mainframe that are for illustrative purposes only and form no part of the claimed design.

    Mainframe of substrate processing system
    10.
    外观设计
    Mainframe of substrate processing system 有权

    公开(公告)号：USD991994S1

    公开(公告)日：2023-07-11

    申请号：US29859227

    申请日：2022-11-08

    Applicant: Applied Materials, Inc.

    Designer： Michael R. Rice ,  Michael C. Kuchar ,  Travis Morey ,  Adam J. Wyatt ,  Ofer Amir

    Abstract: FIG. 1 is a top perspective view of a mainframe for substrate processing system of the present design.
    FIG. 2 is a side view thereof.
    FIG. 3 is a side view thereof.
    FIG. 4 is a front view thereof.
    FIG. 5 is a rear view thereof.
    FIG. 6 is a top view thereof.
    FIG. 7 is a bottom view thereof; and,
    FIG. 8 is a top perspective view thereof, showing unclaimed components attached thereto.
    The broken lines shown in the figures are directed to unclaimed portions of the mainframe and/or unclaimed components attached to the mainframe that are for illustrative purposes only and form no part of the claimed design.

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