公开(公告)号：US20250060041A1

公开(公告)日：2025-02-20

申请号：US18797067

申请日：2024-08-07

Applicant: Applied Materials, Inc.

Inventor： Farzad Vakilzadeh ,  Shawn Thanhson Le ,  Ofer Amir ,  Ramon Zaragoza

IPC: F16K3/02

Abstract: Disclosed is a slit valve gate. The slit valve gate includes a base portion configured to couple to a slit valve actuator and includes a first angled alignment feature. The slit valve gate further includes a seal portion coupled to the base portion. The seal portion is configured to create an airtight seal between the slit valve gate and a sealing surface of a slit valve opening. The slit valve gate further includes a clamp portion coupled to the base portion. The clamp portion includes a second angled alignment feature configured to interface with the first angled alignment feature of the base portion to align the clamp portion with respect to the base portion. The clamp portion retains the seal portion at least partially between the clamp portion and the base portion.

公开(公告)号：US20240375221A1

公开(公告)日：2024-11-14

申请号：US18644262

申请日：2024-04-24

Applicant: Applied Materials, Inc.

Inventor： Gagandeep Singh Joshi ,  Ramon Zaragoza ,  Farzad Vakilzadeh ,  Hari K. Ponnekanti ,  Sushant S. Koshti

IPC: B23K26/38 ,  B23K26/082 ,  B23K26/402

Abstract: A method includes initializing, by at least one processing device, a set of parameters of an elastomer removal system for removing at least a portion of an elastomer material from a target surface, wherein the elastomer removal system includes laser generation system comprising a carbon dioxide (CO2) laser, and causing, by the at least one processing device, the elastomer removal system to remove at least the portion of the elastomer material from the target surface in accordance with the set of parameters.