公开(公告)号：USD973737S1

公开(公告)日：2022-12-27

申请号：US29758663

申请日：2020-11-17

Applicant: Applied Materials, Inc.

Designer： Michael R. Rice ,  Michael C. Kuchar ,  Travis Morey ,  Adam J. Wyatt ,  Ofer Amir

公开(公告)号：USD1029066S1

公开(公告)日：2024-05-28

申请号：US29830396

申请日：2022-03-11

Applicant: APPLIED MATERIALS, INC.

Designer： Michael R. Rice ,  Michael C. Kuchar ,  Travis Morey ,  Adam J. Wyatt ,  Ofer Amir

Abstract: FIG. 1 is a front, top perspective view of a mainframe for a dual-robot substrate processing system in accordance with the present design.
FIG. 2 is a left side elevational view of the present design.
FIG. 3 is a right side elevational view of the present design.
FIG. 4 is a front elevational view of the present design.
FIG. 5 is a rear elevational view of the present design.
FIG. 6 is a top plan view of the present design.
FIG. 7 is a bottom plan view of the second embodiment of the present design; and,
FIG. 8 is a front, top perspective view of the present design, showing unclaimed components attached thereto.
The broken lines shown in the figures are directed to unclaimed portions of the mainframe and/or unclaimed components attached to the mainframe that are for illustrative purposes only and form no part of the claimed design.

公开(公告)号：US11415230B2

公开(公告)日：2022-08-16

申请号：US16836231

申请日：2020-03-31

Applicant: APPLIED MATERIALS, INC.

Inventor： Paul Z. Wirth ,  Ofer Amir ,  Michael C. Kuchar

IPC: F16K3/18 ,  F16K3/02 ,  F16K31/124 ,  F16K37/00 ,  F15B21/02 ,  H01L21/677 ,  H01L21/67

Abstract: Disclosed are a slit valve apparatus and a method for controlling a slit valve. The slit valve apparatus includes a slit valve assembly and a servo-control system in communication with the slit valve assembly. The slit valve assembly includes at least one gate able to transition between an open position and a closed position, at least one pneumatic actuator, at least one proportional pneumatic valve including a plurality of controllers, and a continuous position sensor. The servo-control system includes a centralized controller that generates a control signal and adjusts the movement of the at least one gate based on the position trajectory for the gate, a linear position measurement of the gate from the continuous position sensor, and fluid pressure/flow measurements from the plurality of controllers.

公开(公告)号：USD992611S1

公开(公告)日：2023-07-18

申请号：US29859229

申请日：2022-11-08

Applicant: Applied Materials, Inc.

Designer： Michael R. Rice ,  Michael C. Kuchar ,  Travis Morey ,  Adam J. Wyatt ,  Ofer Amir

Abstract: FIG. 1 is a top perspective view of a mainframe for substrate processing system of the present design.
FIG. 2 is a side view thereof.
FIG. 3 is a side view thereof.
FIG. 4 is a front view thereof.
FIG. 5 is a rear view thereof.
FIG. 6 is a top view thereof.
FIG. 7 is a bottom view thereof; and,
FIG. 8 is a top perspective view thereof, showing unclaimed components attached thereto.
The broken lines shown in the figures are directed to unclaimed portions of the mainframe and/or unclaimed components attached to the mainframe that are for illustrative purposes only and form no part of the claimed design.

公开(公告)号：USD991994S1

公开(公告)日：2023-07-11

申请号：US29859227

申请日：2022-11-08

Applicant: Applied Materials, Inc.

Designer： Michael R. Rice ,  Michael C. Kuchar ,  Travis Morey ,  Adam J. Wyatt ,  Ofer Amir

Abstract: FIG. 1 is a top perspective view of a mainframe for substrate processing system of the present design.
FIG. 2 is a side view thereof.
FIG. 3 is a side view thereof.
FIG. 4 is a front view thereof.
FIG. 5 is a rear view thereof.
FIG. 6 is a top view thereof.
FIG. 7 is a bottom view thereof; and,
FIG. 8 is a top perspective view thereof, showing unclaimed components attached thereto.
The broken lines shown in the figures are directed to unclaimed portions of the mainframe and/or unclaimed components attached to the mainframe that are for illustrative purposes only and form no part of the claimed design.

公开(公告)号：US20210301929A1

公开(公告)日：2021-09-30

申请号：US16836231

申请日：2020-03-31

Applicant: APPLIED MATERIALS, INC.

Inventor： Paul Z. Wirth ,  Ofer Amir ,  Michael C. Kuchar

IPC: F16K3/02 ,  F16K31/124 ,  F16K37/00

Abstract: Disclosed are a slit valve apparatus and a method for controlling a slit valve. The slit valve apparatus includes a slit valve assembly and a servo-control system in communication with the slit valve assembly. The slit valve assembly includes at least one gate able to transition between an open position and a closed position, at least one pneumatic actuator, at least one proportional pneumatic valve including a plurality of controllers, and a continuous position sensor. The servo-control system includes a centralized controller that generates a control signal and adjusts the movement of the at least one gate based on the position trajectory for the gate, a linear position measurement of the gate from the continuous position sensor, and fluid pressure/flow measurements from the plurality of controllers.

公开(公告)号：US20240213056A1

公开(公告)日：2024-06-27

申请号：US18389664

申请日：2023-12-19

Applicant: Applied Materials, Inc.

Inventor： Angela Rose Sico ,  Travis Morey ,  Michael C. Kuchar ,  Sushant S. Koshti

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/687

CPC classification number: H01L21/67167 ,  H01L21/67196 ,  H01L21/67742 ,  H01L21/68707

Abstract: A mainframe of a device fabrication system includes a base, a plurality of facets on the base, and a lid over the plurality of facets. A first facet of the plurality of facets includes a frame. The base, the lid and the plurality of facets together define an interior volume that includes a robot arm. A first replaceable interface plate is attached to the first frame of the first facet. The first replaceable interface plate includes a plurality of replaceable chamber ports. A first replaceable camber port of the plurality of replaceable chamber ports is configured to provide access for the robot arm to a first process chamber. A second replaceable chamber port of the plurality of replaceable chamber ports is configured to provide access for the robot arm to a second process chamber.

公开(公告)号：USD973116S1

公开(公告)日：2022-12-20

申请号：US29758664

申请日：2020-11-17

Applicant: Applied Materials, Inc.

Designer： Michael R. Rice ,  Michael C. Kuchar ,  Travis Morey ,  Adam J. Wyatt ,  Ofer Amir

公开(公告)号：US20210020476A1

公开(公告)日：2021-01-21

申请号：US16923903

申请日：2020-07-08

Applicant: Applied Materials, Inc.

Inventor： Andrew Paul Harbert ,  Michael C. Kuchar ,  Nicholas Michael Bergantz ,  Leon Volfovski ,  Sivakumar Ramalingam ,  Karuppasamy Muthukamatchi ,  Douglas R. McAllister

IPC: H01L21/67 ,  H01L21/687 ,  H01L21/677 ,  H01L21/673

Abstract: A method includes receiving, by a first loadlock chamber of the loadlock system, a first object from a factory interface via a first opening. The first object is transferred into the first loadlock chamber via a first robot arm. The factory interface is at a first state. The first loadlock chamber is configured to receive different types of objects. The method further includes sealing a first loadlock door against the first opening to create a first sealed environment at the first state in the first loadlock chamber and causing the first sealed environment of the first loadlock chamber to be changed to a second state. The method further includes actuating a second loadlock door to provide a second opening between the first loadlock chamber and a transfer chamber. The first object is to be transferred from the first loadlock chamber to the transfer chamber via a second robot arm.

公开(公告)号：US20240258137A1

公开(公告)日：2024-08-01

申请号：US18632509

申请日：2024-04-11

Applicant: Applied Materials, Inc.

Inventor： Nir Merry ,  Schubert S. Chu ,  Sushant S. Koshti ,  Michael C. Kuchar ,  Nyi Oo Myo ,  Songjae Lee

IPC: H01L21/67 ,  H01L21/687

CPC classification number: H01L21/67196 ,  H01L21/67167 ,  H01L21/68707 ,  H01L21/67207

Abstract: A substrate processing system includes a factory interface, a transfer chamber of heptagonal shape and including four first facets and three second facets, each having a width that is narrower than that of each of the four first facets. A processing chamber is attached to one of the four first facets. A first auxiliary chamber attached to a first of the three second facets and is smaller than the first processing chamber. A load lock is attached to a second of the three second facets and to the factory interface. A second auxiliary chamber is attached to a third of the three second facets. The load lock is attached to the transfer chamber between the first and second auxiliary chambers. A robot is attached to a bottom of the transfer chamber and adapted to transfer substrates to/from the first processing chamber, the first auxiliary chamber, and the load lock.