公开(公告)号：USD938373S1

公开(公告)日：2021-12-14

申请号：US29710816

申请日：2019-10-25

Applicant: Applied Materials, Inc.

Designer： Jason M. Schaller ,  Benjamin Riordon ,  Mitchell DiSanto ,  Paul Forderhase ,  Gary Wyka ,  Jeffrey Hudgens ,  Paul Z. Wirth ,  Charles T. Carlson ,  Siva Chandrasekar ,  Michael Carrell ,  Venkata Raghavaiah Chowdhary Kode ,  Dmitry A. Dzilno ,  Juan Carlos Rocha-Alvarez

公开(公告)号：US20230239970A1

公开(公告)日：2023-07-27

申请号：US17583755

申请日：2022-01-25

Applicant: Applied Materials, Inc.

Inventor： Dursun Moore ,  Julian G. Blake ,  Hillman Bailey ,  James D. Strassner ,  Paul Forderhase

IPC: H05B3/00 ,  H05B3/44 ,  H01J37/317

CPC classification number: H05B3/0033 ,  H05B3/44 ,  H01J37/3171 ,  H01J2237/31701 ,  H01J2237/002

Abstract: A heater assembly that that is effective at maintaining heating lamps at acceptable temperatures is disclosed. The heater assembly utilizes radiative heat transfer to transfer unwanted heat buildup in the heating lamps to a cooling base. One or more high emissivity films are disposed between the heating lamps and the cooling base to facilitate heat transfer. Further, a reflective coating is applied to a portion of the heating lamps to reflect heat away from the cooling base. The heater assembly may be utilized in a high vacuum environment as it does not rely on convective cooling.

公开(公告)号：US11183418B2

公开(公告)日：2021-11-23

申请号：US15991986

申请日：2018-05-29

Applicant: Applied Materials, Inc.

Inventor： Paul Forderhase

IPC: H01L21/687

Abstract: Embodiments herein disclose a de-coupled substrate lift mechanism installation bracket and method of adjusting a plane of a lift pin hoop of the substrate lift mechanism. In one embodiment an apparatus for making adjustments about two remote axes includes a first adjustment mechanism and a second adjustment mechanism. The first adjustment mechanism includes a common member, one or more first side members, a connector member, and a plurality of first joints pivotably coupling the common member, the one or more first side members, and the connector member. The second adjustment mechanism includes a first body having the common member, one or more second side members, a first frame member, and a plurality of second joints pivotably coupling the common member, the one or more second side members, and the first frame member.