公开(公告)号：US11306824B2

公开(公告)日：2022-04-19

申请号：US16642827

申请日：2018-09-28

申请人： Applied Materials, Inc.

发明人： Benjamin B. Riordon ,  Charles T. Carlson ,  Aaron Webb ,  Gary Wyka

IPC分类号： F16K1/20 ,  F16K49/00 ,  F16K51/02 ,  H01J37/32

摘要： The present disclosure generally relates to an isolation device for use in processing systems. The isolation device has a body with an inlet opening disposed at a first end coupled to a processing system component such as a remote plasma source and outlet openings, for example two, disposed at a second end which are coupled to a processing system component such as a process chamber. Flaps disposed within the body are actuatable to an open position from a closed position or to a closed position from an open position, to selectively allow or prevent passage of a fluid from the processing system component coupled to the isolation device to the other processing system component coupled thereto.

公开(公告)号：USD938373S1

公开(公告)日：2021-12-14

申请号：US29710816

申请日：2019-10-25

申请人： Applied Materials, Inc.

设计人： Jason M. Schaller ,  Benjamin Riordon ,  Mitchell DiSanto ,  Paul Forderhase ,  Gary Wyka ,  Jeffrey Hudgens ,  Paul Z. Wirth ,  Charles T. Carlson ,  Siva Chandrasekar ,  Michael Carrell ,  Venkata Raghavaiah Chowdhary Kode ,  Dmitry A. Dzilno ,  Juan Carlos Rocha-Alvarez