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    Minimal contact gripping of thin optical devices
    2.
    发明授权
    Minimal contact gripping of thin optical devices 有权

    公开(公告)号：US11524392B2

    公开(公告)日：2022-12-13

    申请号：US17237533

    申请日：2021-04-22

    Applicant: Applied Materials, Inc.

    Inventor： Yaseer Arafath Ahamed ,  Kangkang Wang ,  Benjamin B. Riordon ,  James D. Strassner ,  Ludovic Godet

    IPC: B25B11/00 ,  G02B6/10 ,  G02B1/00

    Abstract: Embodiments described herein provide for devices and methods for retaining optical devices. The devices and methods described herein provide for retention of the substrate without contacting sensitive portions of the substrate. The devices and methods utilize retention pads or vacuum pins to contact the exclusion zones i.e., inactive areas of the substrate to retain the substrate and prevent the substrate from moving laterally. Additionally, a holding force retains the substrate in the vertical direction, without contacting the substrate. The methods provide for adjusting the devices to account for multiple geometries of the substrate. The methods further provide for adjusting the devices, such as adjusting a gap between the optical device and a suction pad, to alter the holding force of the devices on the optical devices.

    Actively clamped carrier assembly for processing tools
    4.
    发明授权
    Actively clamped carrier assembly for processing tools 有权

    公开(公告)号：US12191186B2

    公开(公告)日：2025-01-07

    申请号：US18338443

    申请日：2023-06-21

    Applicant: Applied Materials, Inc.

    Inventor： Benjamin B. Riordon ,  James D. Strassner

    IPC: H01L21/683 ,  B05C21/00 ,  C23C14/04 ,  C23C16/04 ,  C23C16/458 ,  H01L21/02 ,  H01L21/687

    Abstract: Embodiments of the present disclosure are related to carrier assemblies that can clamp more than one optical device substrates and methods for forming the carrier assemblies. The carrier assembly includes a carrier, one or more substrates, and a mask. The carrier is magnetically coupled to the mask to retain the one or more substrates. The carrier assembly is used for supporting and transporting the one or more substrates during processing. The carrier assembly is also used for masking the one or more substrates during PVD processing. Methods for assembling the carrier assembly in a build chamber are described herein.

    Minimal contact gripping of thin optical devices
    6.
    发明授权
    Minimal contact gripping of thin optical devices 有权

    公开(公告)号：US11975422B2

    公开(公告)日：2024-05-07

    申请号：US18061327

    申请日：2022-12-02

    Applicant: Applied Materials, Inc.

    Inventor： Yaseer Arafath Ahamed ,  Kangkang Wang ,  Benjamin B. Riordon ,  James D. Strassner ,  Ludovic Godet

    IPC: B25B11/00 ,  G02B1/00 ,  G02B6/10

    CPC classification number: B25B11/005 ,  G02B1/002 ,  G02B6/10

    Abstract: Embodiments described herein provide for devices and methods for retaining optical devices. The devices and methods described herein provide for retention of the substrate without contacting sensitive portions of the substrate. The devices and methods utilize retention pads or vacuum pins to contact the exclusion zones i.e., inactive areas of the substrate to retain the substrate and prevent the substrate from moving laterally. Additionally, a holding force retains the substrate in the vertical direction, without contacting the substrate. The methods provide for adjusting the devices to account for multiple geometries of the substrate. The methods further provide for adjusting the devices, such as adjusting a gap between the optical device and a suction pad, to alter the holding force of the devices on the optical devices.

    Dual port remote plasma clean isolation valve
    8.
    发明授权
    Dual port remote plasma clean isolation valve 有权

    公开(公告)号：US11306824B2

    公开(公告)日：2022-04-19

    申请号：US16642827

    申请日：2018-09-28

    Applicant: Applied Materials, Inc.

    Inventor： Benjamin B. Riordon ,  Charles T. Carlson ,  Aaron Webb ,  Gary Wyka

    IPC: F16K1/20 ,  F16K49/00 ,  F16K51/02 ,  H01J37/32

    Abstract: The present disclosure generally relates to an isolation device for use in processing systems. The isolation device has a body with an inlet opening disposed at a first end coupled to a processing system component such as a remote plasma source and outlet openings, for example two, disposed at a second end which are coupled to a processing system component such as a process chamber. Flaps disposed within the body are actuatable to an open position from a closed position or to a closed position from an open position, to selectively allow or prevent passage of a fluid from the processing system component coupled to the isolation device to the other processing system component coupled thereto.

    Low particle protected flapper valve
    9.
    发明授权
    Low particle protected flapper valve 有权

    公开(公告)号：US10969029B2

    公开(公告)日：2021-04-06

    申请号：US16341703

    申请日：2017-12-01

    Applicant: Applied Materials, Inc.

    Inventor： Charles T. Carlson ,  Tammy Jo Pride ,  Benjamin B. Riordon ,  Aaron Webb

    IPC: F16K27/02 ,  F16K1/20 ,  F16K11/10 ,  F16K1/22 ,  H01L21/67

    Abstract: Embodiments of the disclosure generally relate to a flapper valve. The flapper valve may be used with processing chambers, such as semiconductor substrate processing chambers. In one embodiment, a flapper valve includes a housing having a first opening at a first end thereof and a second opening at a second end thereof, a first flapper pivotably disposed in the housing, and a second flapper pivotably disposed in the housing. The first and second flappers are movable to selectively open and close at least one of the first opening and the second opening.

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