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公开(公告)号:US10099377B2
公开(公告)日:2018-10-16
申请号:US15197039
申请日:2016-06-29
Applicant: Applied Materials, Inc.
Inventor: Gregory J. Freeman , Marvin L. Freeman , Adam Cranmer
Abstract: Methods of correcting positional misalignment of blades in robots, such as dual-bladed robots, are described. The methods include, in one or more embodiments, a robot including moveable arms and an end effector attached to one of the moveable arms, a flag disposed on one of the moveable arms or the end effector, a chamber adapted to be serviced by the end effector, a beam sensor positioned at a distance from the chamber, and correcting misalignment of the end effector wherein the misalignment occurs between an initial linear center-finding location and the estimated center of the chamber. Systems of such electronic device calibration are also disclosed. Numerous other aspects are provided.
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2.
公开(公告)号:US11582378B2
公开(公告)日:2023-02-14
申请号:US17341243
申请日:2021-06-07
Applicant: Applied Materials, Inc.
Inventor: Ozkan Celik , Patricia A. Schulze , Gregory J. Freeman , Paul Z. Wirth , Tommaso Vercesi
Abstract: A depth measuring apparatus includes a camera assembly configured to capture a plurality of images of a target at a plurality of distances from the target. The depth measuring apparatus further includes a controller configured to, for each of a plurality of regions within the plurality of images: determine corresponding gradient values within the plurality of images; determine a corresponding maximum gradient value from the corresponding gradient values; and determine, based on the corresponding maximum gradient value, a depth measurement for a region of the plurality of regions.
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3.
公开(公告)号:US11032464B2
公开(公告)日:2021-06-08
申请号:US16669197
申请日:2019-10-30
Applicant: Applied Materials, Inc.
Inventor: Ozkan Celik , Patricia A. Schulze , Gregory J. Freeman , Paul Z. Wirth , Tommaso Vercesi
Abstract: A depth measuring apparatus includes a camera assembly, a position sensor, and a controller. The camera assembly is configured to capture a plurality of images of a target at a plurality of distances from the target. The position sensor is configured to capture, for each of the plurality of images, corresponding position data associated with a relative distance between the camera assembly and the target. The controller is configured to, for each of a plurality of regions within the plurality of images: determine corresponding gradient values within the plurality of images; determine a corresponding maximum gradient value from the corresponding gradient values; and determine a depth measurement for the region based on the corresponding maximum gradient and the corresponding position data captured for an image from the plurality of images that includes the corresponding maximum gradient.
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4.
公开(公告)号:US20200068119A1
公开(公告)日:2020-02-27
申请号:US16669197
申请日:2019-10-30
Applicant: Applied Materials, Inc.
Inventor: Ozkan Celik , Patricia A. Schulze , Gregory J. Freeman , Paul Z. Wirth , Tommaso Vercesi
Abstract: A depth measuring apparatus includes a camera assembly, a position sensor, and a controller. The camera assembly is configured to capture a plurality of images of a target at a plurality of distances from the target. The position sensor is configured to capture, for each of the plurality of images, corresponding position data associated with a relative distance between the camera assembly and the target. The controller is configured to, for each of a plurality of regions within the plurality of images: determine corresponding gradient values within the plurality of images; determine a corresponding maximum gradient value from the corresponding gradient values; and determine a depth measurement for the region based on the corresponding maximum gradient and the corresponding position data captured for an image from the plurality of images that includes the corresponding maximum gradient.
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5.
公开(公告)号:US20210295547A1
公开(公告)日:2021-09-23
申请号:US17341243
申请日:2021-06-07
Applicant: Applied Materials, Inc.
Inventor: Ozkan Celik , Patricia A. Schulze , Gregory J. Freeman , Paul Z. Wirth , Tommaso Vercesi
Abstract: A depth measuring apparatus includes a camera assembly configured to capture a plurality of images of a target at a plurality of distances from the target. The depth measuring apparatus further includes a controller configured to, for each of a plurality of regions within the plurality of images: determine corresponding gradient values within the plurality of images; determine a corresponding maximum gradient value from the corresponding gradient values; and determine, based on the corresponding maximum gradient value, a depth measurement for a region of the plurality of regions.
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公开(公告)号:US20180001478A1
公开(公告)日:2018-01-04
申请号:US15197039
申请日:2016-06-29
Applicant: Applied Materials, Inc.
Inventor: Gregory J. Freeman , Marvin L. Freeman , Adam Cranmer
CPC classification number: B25J9/1692 , B25J9/0087 , B25J9/043 , G05B2219/39033
Abstract: Methods of correcting positional misalignment of blades in robots, such as dual-bladed robots, are described. The methods include, in one or more embodiments, a robot including moveable arms and an end effector attached to one of the moveable arms, a flag disposed on one of the moveable arms or the end effector, a chamber adapted to be serviced by the end effector, a beam sensor positioned at a distance from the chamber, and correcting misalignment of the end effector wherein the misalignment occurs between an initial linear center-finding location and the estimated center of the chamber. Systems of such electronic device calibration are also disclosed. Numerous other aspects are provided.
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