公开(公告)号：US10099377B2

公开(公告)日：2018-10-16

申请号：US15197039

申请日：2016-06-29

Applicant: Applied Materials, Inc.

Inventor： Gregory J. Freeman ,  Marvin L. Freeman ,  Adam Cranmer

IPC: B25J9/16 ,  B25J9/00 ,  B25J9/04

Abstract: Methods of correcting positional misalignment of blades in robots, such as dual-bladed robots, are described. The methods include, in one or more embodiments, a robot including moveable arms and an end effector attached to one of the moveable arms, a flag disposed on one of the moveable arms or the end effector, a chamber adapted to be serviced by the end effector, a beam sensor positioned at a distance from the chamber, and correcting misalignment of the end effector wherein the misalignment occurs between an initial linear center-finding location and the estimated center of the chamber. Systems of such electronic device calibration are also disclosed. Numerous other aspects are provided.

公开(公告)号：US20180001478A1

公开(公告)日：2018-01-04

申请号：US15197039

申请日：2016-06-29

Applicant: Applied Materials, Inc.

Inventor： Gregory J. Freeman ,  Marvin L. Freeman ,  Adam Cranmer

IPC: B25J9/16 ,  B25J9/00

CPC classification number: B25J9/1692 ,  B25J9/0087 ,  B25J9/043 ,  G05B2219/39033

Abstract: Methods of correcting positional misalignment of blades in robots, such as dual-bladed robots, are described. The methods include, in one or more embodiments, a robot including moveable arms and an end effector attached to one of the moveable arms, a flag disposed on one of the moveable arms or the end effector, a chamber adapted to be serviced by the end effector, a beam sensor positioned at a distance from the chamber, and correcting misalignment of the end effector wherein the misalignment occurs between an initial linear center-finding location and the estimated center of the chamber. Systems of such electronic device calibration are also disclosed. Numerous other aspects are provided.