公开(公告)号：US09035249B1

公开(公告)日：2015-05-19

申请号：US14174651

申请日：2014-02-06

Applicant: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik GmbH

Inventor： Jürgen Frosien ,  Dieter Winkler ,  Benjamin John Cook

IPC: H01J37/28 ,  H01J37/244 ,  H01J37/147

CPC classification number: H01J37/28 ,  H01J37/05 ,  H01J37/09 ,  H01J37/1472 ,  H01J37/1474 ,  H01J37/244 ,  H01J2237/0453 ,  H01J2237/0475 ,  H01J2237/1205 ,  H01J2237/21 ,  H01J2237/2448 ,  H01J2237/24592 ,  H01J2237/2806 ,  H01J2237/2817

Abstract: A scanning charged particle beam device configured to image a specimen is described. The scanning charged particle beam device includes a source of charged particles, a condenser lens for influencing the charged particles, an aperture plate having at least two aperture openings to generate at least two primary beamlets of charged particles, at least two deflectors, wherein the at least two deflectors are multi-pole deflectors, a multi-pole deflector with an order of poles of 8 or higher, an objective lens, wherein the objective lens is a retarding field compound lens, a beam separator configured to separate the at least two primary beamlets from at least two signal beamlets, a beam bender, or a deflector or a mirror configured to deflect the at least two signal beamlets, wherein the beam bender is a hemispherical beam bender or beam bender having at least two curved electrodes, and at least two detector elements.

Abstract translation: 描述了构造成对样本进行成像的扫描带电粒子束装置。 扫描带电粒子束装置包括带电粒子源，用于影响带电粒子的聚光透镜，具有至少两个孔径孔的孔板，以产生至少两个带电粒子的主子束，至少两个偏转器，其中， 至少两个偏转器是多极偏转器，具有8或更高的极数的多极偏转器，物镜，其中物镜是延迟场复合透镜，梁分离器，被配置为将至少两个初级 来自至少两个信号子束的子束，光束弯曲器或被配置为偏转所述至少两个信号子束的偏转器或反射镜，其中所述光束弯曲器是具有至少两个弯曲电极的半球形光束弯曲器或光束弯曲器，并且至少 两个检测元件。

公开(公告)号：US09035245B2

公开(公告)日：2015-05-19

申请号：US14277933

申请日：2014-05-15

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Albrecht Glasmachers ,  Michel Aliman

IPC: H01J37/05 ,  H01J49/02 ,  H01J49/42 ,  H01J37/244 ,  H01J37/252

CPC classification number: H01J37/05 ,  H01J37/244 ,  H01J37/252 ,  H01J49/022 ,  H01J49/027 ,  H01J49/424 ,  H01J2237/028 ,  H01J2237/057

Abstract: A device for mass selective determination of at least one ion or of a plurality of ions is used, for example, in a measuring apparatus having an ion trap. The ion trap has a ring electrode having a first opening. A first electrode is arranged at the first opening. Furthermore, an amplifier for providing a radio-frequency storage signal for the ion trap and a first transformer are provided, said first transformer being connected to the amplifier and the first electrode in such a way that the radio-frequency storage signal is coupled into the first electrode via the first transformer.

Abstract translation: 例如，在具有离子阱的测量装置中使用用于质量选择性测定至少一种离子或多种离子的装置。 离子阱具有具有第一开口的环形电极。 第一电极设置在第一开口处。 此外，提供了一种用于提供用于离子阱的射频存储信号和第一变压器的放大器，所述第一变压器以这样的方式连接到放大器和第一电极，使得射频存储信号耦合到 第一电极经由第一变压器。

公开(公告)号：US09000395B2

公开(公告)日：2015-04-07

申请号：US14276000

申请日：2014-05-13

Applicant: Hermes Microvision, Inc.

Inventor： Weiming Ren ,  Shuai Li ,  Zhongwei Chen

IPC: H01J37/12 ,  H01J37/05 ,  H01J37/244 ,  H01J37/26

CPC classification number: H01J37/05 ,  H01J37/10 ,  H01J37/12 ,  H01J37/244 ,  H01J37/263 ,  H01J2237/057 ,  H01J2237/12 ,  H01J2237/14

Abstract: This invention provides a method for improving performance of a reflective type energy filter for a charged particle beam, which employs a beam-adjusting lens on an entrance side of a potential barrier of the energy filter to make the charged particle beam become a substantially parallel beam to be incident onto the potential barrier. The method makes the energy filter have both a fine energy-discrimination power over a large emission angle spread and a high uniformity of energy-discrimination powers over a large FOV. A LVSEM using this method in the energy filter can obviously improve image contrast. The invention also provides multiple energy-discrimination detection devices formed by using the advantages of the method.

Abstract translation: 本发明提供了一种用于提高带电粒子束的反射型能量过滤器的性能的方法，该方法在能量过滤器的势垒的入口侧采用光束调节透镜，以使带电粒子束变成基本平行的光束 被发现在潜在的障碍之上。 该方法使得能量滤波器在大的发射角扩展上具有精细的能量鉴别能力，并且在大的FOV上具有高的能量鉴别能力的均匀性。 在能量过滤器中使用这种方法的LVSEM可以显着提高图像对比度。 本发明还提供了通过使用该方法的优点形成的多个能量鉴别检测装置。

公开(公告)号：US20150056366A1

公开(公告)日：2015-02-26

申请号：US14463041

申请日：2014-08-19

Applicant: SEN Corporation

Inventor： Hiroyuki Kariya

IPC: H01J37/24 ,  H01J37/147 ,  C23C14/48 ,  H01J37/317 ,  G01R33/07 ,  C23C14/54

CPC classification number: H01J37/243 ,  G01R33/07 ,  G01R33/072 ,  H01J37/05 ,  H01J37/147 ,  H01J37/3171 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/152 ,  H01J2237/24514 ,  H01J2237/248 ,  H01J2237/3045

Abstract: An ion implanter includes an energy analyzer electromagnet provided between an ion source and a processing chamber. The energy analyzer electromagnet includes a Hall probe configured to generate a measurement output in response to a deflecting magnetic field and an NMR probe configured to generate an NMR output. A control unit of the ion implanter includes a magnetic field measurement unit configured to measure the deflecting magnetic field in accordance with a known correspondence between the deflecting magnetic field and the measurement output, a magnetic field determination unit configured to determine the deflecting magnetic field from the NMR output, and a Hall probe calibration unit configured to update the known correspondence by using the deflecting magnetic field determined from the NMR output and a new measurement output of the Hall probe corresponding to the determined deflecting magnetic field.

Abstract translation: 离子注入机包括设置在离子源和处理室之间的能量分析仪电磁体。 能量分析仪电磁体包括霍尔探针，其被配置为响应于偏转磁场产生测量输出，并且NMR探针被配置为产生NMR输出。 离子注入机的控制单元包括磁场测量单元，其被配置为根据偏转磁场和测量输出之间的已知对应度来测量偏转磁场;磁场确定单元，被配置为确定偏转磁场的偏转磁场， NMR输出以及霍尔探头校准单元，其被配置为通过使用从NMR输出确定的偏转磁场和对应于所确定的偏转磁场的霍尔探头的新测量输出来更新已知对应关系。

公开(公告)号：US08963081B2

公开(公告)日：2015-02-24

申请号：US14190289

申请日：2014-02-26

Applicant: Canon Kabushiki Kaisha

Inventor： Kota Iwasaki

IPC: H01J49/40 ,  H01J49/06

CPC classification number: H01J49/061 ,  H01J37/05 ,  H01J49/40 ,  H01J2237/043 ,  H01J2237/057

Abstract: When a time-of-flight mass selector having a chopper using a deflector selects the masses of the ions, an ion beam is deflected. As a result, at least a part of the ion beams diagonally pass through an aperture electrode with respect to the axis. Accordingly, there has been a problem that a position on an object irradiated with a cluster ion beam, results in moving. This mass selector includes: a flight tube having an equipotential space that makes a charged substance fly therein; a deflector that is installed in a downstream side with respect to the flight tube in a direction in which the charged substance flies; a first aperture electrode that is installed in a downstream side with respect to the deflector in a direction in which the charged substance flies; and a second aperture electrode that is installed in between the deflector and the first aperture electrode.

Abstract translation: 当具有使用偏转器的斩波器的飞行时间质量选择器选择离子的质量时，离子束被偏转。 结果，至少一部分离子束相对于轴线对角地穿过孔电极。 因此，存在用聚簇离子束照射的物体上的位置导致移动的问题。 该质量选择器包括：具有使带电物质在其中飞行的等电位空间的飞行管; 偏转器，其安装在相对于所述飞行管的下游侧，所述偏转器沿所述带电物质飞行的方向; 第一孔电极，其安装在相对于所述偏转器的下游侧，所述第一孔电极沿所述带电物质飞行的方向; 以及安装在偏转器和第一孔径电极之间的第二孔径电极。

公开(公告)号：US08952340B2

公开(公告)日：2015-02-10

申请号：US14313128

申请日：2014-06-24

Applicant: SEN Corporation

Inventor： Mitsuaki Kabasawa ,  Tatsuo Nishihara ,  Kazuhiro Watanabe ,  Yuuji Takahashi ,  Tatsuya Yamada

IPC: G21K1/08 ,  H01J3/14 ,  H01J3/26 ,  H01J49/42

CPC classification number: H01J37/05 ,  H01J37/3171 ,  H01J2237/0473 ,  H01J2237/057 ,  H01J2237/14 ,  H01J2237/15 ,  H01J2237/30472

Abstract: A high-frequency acceleration type ion acceleration and transportation apparatus is a beamline after an ion beam is accelerated by a high-frequency acceleration system having an energy spread with respect to set beam energy and includes an energy analysis deflection electromagnet and a horizontal beam focusing element. In the ion acceleration and transportation apparatus, a double slit that is configured by an energy spread confining slit and an energy analysis slit is additionally disposed at a position at which energy dispersion and a beam size are to be appropriate. The position is determined based on a condition of the energy analysis deflection electromagnet and the horizontal beam focusing element, and the double slit performs energy separation and energy definition and decreases the energy spread of the ion beam by performing adjustment for a smaller energy spread while suppressing a decrease in the amount of a beam current.

Abstract translation: 高频加速型离子加速和输送装置是通过具有相对于设定束能量的能量扩散的高频加速系统加速离子束之后的束线，并且包括能量分析偏转电磁体和水平束聚焦元件 。 在离子加速输送装置中，在能量分散和光束尺寸适当的位置处，另外设置由能量扩散限制狭缝和能量分析狭缝构成的双狭缝。 基于能量分析偏转电磁体和水平光束聚焦元件的条件确定位置，并且双缝执行能量分离和能量定义，并且通过在抑制时能够进行更小的能量扩展的调整来减小离子束的能量扩展 光束电流量的减少。

公开(公告)号：US20140363678A1

公开(公告)日：2014-12-11

申请号：US14466242

申请日：2014-08-22

Applicant: Sean R. Kirkpatrick ,  Allen R. Kirkpatrick ,  Michael J. Walsh

Inventor： Sean R. Kirkpatrick ,  Allen R. Kirkpatrick ,  Michael J. Walsh

IPC: C23C14/58 ,  G02B1/12 ,  G02B1/02 ,  H01J37/32

CPC classification number: C23C14/5833 ,  G02B1/02 ,  G02B1/12 ,  H01J37/05 ,  H01J37/147 ,  H01J37/3171 ,  H01J37/32816 ,  H01J2237/0041 ,  H01J2237/0812 ,  H01J2237/15 ,  Y10T428/30

Abstract: A method for Neutral Beam irradiation derived from gas cluster ion beams and articles produced thereby including optical elements.

Abstract translation: 一种由气体团簇离子束产生的中性光束照射方法及其制造的物品，包括光学元件。

公开(公告)号：US20140361161A1

公开(公告)日：2014-12-11

申请号：US14363405

申请日：2012-03-06

Applicant: Björn Wannberg

Inventor： Björn Wannberg

IPC: H01J49/00 ,  H01J49/06

CPC classification number: H01J49/48 ,  G01N23/2273 ,  G01N2223/085 ,  H01J37/05 ,  H01J49/0031 ,  H01J49/06 ,  H01J49/061 ,  H01J49/484 ,  H01J2237/0535

Abstract: The present invention relates to a method for determining at least one parameter related to charged particles emitted from a particle emitting sample. The method comprises guiding a beam of charged particles into an entrance of a measurement region by means of a lens system, and detecting positions of the particles indicative of said at least one parameter within the measurement region. Furthermore, the method comprises deflecting the particle beam at least twice in the same coordinate direction before entrance of the particle beam into the measurement region. Thereby, both the position and the direction of the particle beam at the entrance of the measurement region can be controlled in a way that to some extent eliminates the need for physical manipulation of the sample. This in turn allows the sample to be efficiently cooled such that the energy resolution in energy measurements can be improved.

Abstract translation: 本发明涉及一种用于确定与从发射颗粒发射的样品发射的带电粒子有关的至少一个参数的方法。 该方法包括通过透镜系统将带电粒子束引导到测量区域的入口，以及在测量区域内检测指示所述至少一个参数的粒子的位置。 此外，该方法包括在粒子束进入测量区域之前将粒子束在相同坐标方向上偏转至少两次。 因此，能够以在某种程度上消除对样品的物理操作的需要的方式来控制测量区域入口处的粒子束的位置和方向。 这反过来允许样品被有效地冷却，从而能够提高能量测量中的能量分辨率。

公开(公告)号：US20140284476A1

公开(公告)日：2014-09-25

申请号：US14276000

申请日：2014-05-13

Applicant: Hermes Microvision, Inc.

Inventor： Weiming Ren ,  Shuai Li ,  Zhongwei Chen

IPC: H01J37/05 ,  H01J37/12 ,  H01J37/244 ,  H01J37/26

CPC classification number: H01J37/05 ,  H01J37/10 ,  H01J37/12 ,  H01J37/244 ,  H01J37/263 ,  H01J2237/057 ,  H01J2237/12 ,  H01J2237/14

Abstract: This invention provides a method for improving performance of a reflective type energy filter for a charged particle beam, which employs a beam-adjusting lens on an entrance side of a potential barrier of the energy filter to make the charged particle beam become a substantially parallel beam to be incident onto the potential barrier. The method makes the energy filter have both a fine energy-discrimination power over a large emission angle spread and a high uniformity of energy-discrimination powers over a large FOV. A LVSEM using this method in the energy filter can obviously improve image contrast. The invention also provides multiple energy-discrimination detection devices formed by using the advantages of the method.

Abstract translation: 本发明提供了一种用于提高带电粒子束的反射型能量过滤器的性能的方法，该方法在能量过滤器的势垒的入口侧采用光束调节透镜，以使带电粒子束变成基本平行的光束 被发现在潜在的障碍物上。 该方法使得能量滤波器在大的发射角扩展上具有精细的能量鉴别能力，并且在大的FOV上具有高的能量鉴别能力的均匀性。 在能量过滤器中使用这种方法的LVSEM可以显着提高图像对比度。 本发明还提供了通过使用该方法的优点形成的多个能量鉴别检测装置。

公开(公告)号：US08835879B1

公开(公告)日：2014-09-16

申请号：US13908426

申请日：2013-06-03

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Frank Sinclair ,  Greg Citver ,  Timothy J. Miller

IPC: A61N5/00 ,  G21G5/00 ,  H01J37/317

CPC classification number: H01J37/3171 ,  H01J37/05

Abstract: Ion implantation systems that separate the flow of ions from the flow of neutral particles are disclosed. The separation of neutral particles from ions can be achieved by manipulating the flow of ions in the system through variations in electrical or magnetic fields disposed within the implantation system. The path of neutral particles is less affected by electrical and magnetic fields than ions. The separation of these flows may also be accomplished by diverting the neutral particles from the ion beam, such as via an introduced gas flow or a flow blockage. Both separation techniques can be combined in some embodiments.

Abstract translation: 公开了将离子流从中性粒子流分离的离子注入系统。 中性粒子与离子的分离可以通过在植入系统内设置的电场或磁场的变化来操纵系统中的离子流来实现。 中性粒子的路径比离子更少受电场和磁场的影响。 这些流动的分离也可以通过将中性粒子从离子束转移，例如通过引入的气流或阻流来实现。 在一些实施方案中，两种分离技术都可以组合。