公开(公告)号：US09134246B2

公开(公告)日：2015-09-15

申请号：US14290833

申请日：2014-05-29

申请人： CANON KABUSHIKI KAISHA

发明人： Jumpei Naito ,  Kota Iwasaki ,  Masafumi Kyogaku ,  Yoichi Otsuka

IPC分类号： G01J5/02 ,  G01N21/65 ,  G01J3/44

CPC分类号： G01N21/65 ,  G01J3/0264 ,  G01J3/027 ,  G01J3/10 ,  G01J3/44 ,  G02B21/16 ,  G02B21/365 ,  H01S3/10

摘要： An optical measurement device includes a light source unit including a first laser light source configured to emit a laser beam having a first wavelength and a second laser light source configured to emit a laser beam having a second wavelength, a measurement wave number setting unit, and a light source adjustment unit configured to adjust at least one of the first wavelength and the second wavelength such that a difference between or a sum of a first wave number corresponding to the first wavelength and a second wave number corresponding to the second wavelength matches a measurement wave number set through the measurement wave number setting unit.

摘要翻译： 光学测量装置包括：光源单元，包括被配置为发射具有第一波长的激光的第一激光光源和被配置为发射具有第二波长的激光束的第二激光源，测量波数设定单元，以及 光源调节单元，被配置为调节所述第一波长和所述第二波长中的至少一个，使得对应于所述第一波长的第一波数与对应于所述第二波长的第二波数之和或之和与测量值相匹配 通过测量波数设定单位设定波数。

公开(公告)号：US20140374587A1

公开(公告)日：2014-12-25

申请号：US14307696

申请日：2014-06-18

申请人： CANON KABUSHIKI KAISHA

发明人： Yohei Murayama ,  Kota Iwasaki ,  Masafumi Kyogaku

IPC分类号： H01J49/10

CPC分类号： H01J49/10 ,  G01N23/2258 ,  G01N2223/105 ,  G01N2223/314 ,  H01J49/142

摘要： The present invention provides an ion group irradiation device which includes: an ion source which generates an ion; and an ion group selecting unit which selects an ion group containing a cluster ion from ions released from the ion source, in an ion group irradiation device for irradiating a sample with the ion group, wherein the ion source has a pressure gradient forming unit for changing a pressure with which a material of the cluster ion is jetted, with time, the ion group selecting unit has a chopper which performs a chopping operation of selecting the ion group by passing and blocking the cluster ions in a traveling direction by the opening and closing of the chopper, and the chopper performs two or more times of the chopping operations per one time of a pressure gradient forming operation by the pressure gradient forming unit.

摘要翻译： 本发明提供一种离子组照射装置，其包括：离子源，其产生离子; 以及离子组选择单元，其在离子源照射装置中从离子源释放的离子中选择含有离子团的离子群，其中离子源具有用于变化的压力梯度形成单元 离子组选择单元随时间喷射簇离子的材料的压力，具有斩波器，该斩波器通过使开闭通过并阻挡簇离子在行进方向进行选择离子群，进行斩波动作 的斩波器，并且所述斩波器通过所述压力梯度形成单元进行每次压力梯度形成操作的两次或多次斩波操作。

公开(公告)号：US20140374585A1

公开(公告)日：2014-12-25

申请号：US14296973

申请日：2014-06-05

申请人： CANON KABUSHIKI KAISHA

发明人： Yohei Murayama ,  Masafumi Kyogaku ,  Kota Iwasaki ,  Naofumi Aoki

IPC分类号： H01J49/14 ,  H01J49/00 ,  H01J49/44

CPC分类号： H01J49/142 ,  G01N23/2258 ,  G01N2223/0816 ,  G01N2223/506

摘要： The present invention provides an ion group irradiation device for irradiating a sample with an ion group, comprising: an ion group selecting unit configured to select, from ions released from an ion source, at least two ion groups formed of ions having different average masses; and a primary ion irradiation unit configured to irradiate the sample with the at least two ion groups selected by the ion group selecting unit, wherein the ion group selecting unit selects at least one ion group and further selects the at least two ion groups from each of the selected at least one ion group.

摘要翻译： 本发明提供了一种用于对离子基团照射样品的离子组照射装置，包括：离子组选择单元，被配置为从离子源释放的离子中选择由具有不同平均质量的离子形成的至少两个离子基; 以及初级离子照射单元，被配置为用所述离子群选择单元选择的所述至少两个离子群照射所述样品，其中所述离子选择单元选择至少一个离子基团，并且还从所述离子组中选择所述至少两个离子基团 所选择的至少一个离子基团。

公开(公告)号：US20140355824A1

公开(公告)日：2014-12-04

申请号：US14289067

申请日：2014-05-28

申请人： CANON KABUSHIKI KAISHA

发明人： Kota Iwasaki

IPC分类号： G06T7/00 ,  G01N21/25

CPC分类号： G06T7/0081 ,  G01J3/28 ,  G01J3/2823 ,  G06K9/0014 ,  G06T7/11 ,  G06T7/168 ,  G06T2207/10056 ,  G06T2207/30024

摘要： A spectral image data processing apparatus which conducts multivariate analysis on spectral image data of a sample, including: a region setting unit configured to set a region of interest for performing multivariate analysis in a sample in which a difference needs to be distinguished, the region of interest being set in accordance with spectral image data of the sample; and an analysis unit configured to perform the multivariate analysis with spectral image data inside the region of interest and spectral image data of region of non-interest which is a region other than the region of interest being distinguished from each other.

摘要翻译： 一种对样本的光谱图像数据进行多变量分析的光谱图像数据处理装置，包括：区域设定单元，被配置为在需要区别差异的样本中设定进行多变量分析的感兴趣区域， 根据样本的光谱图像数据设置兴趣; 以及分析单元，其被配置为执行所述感兴趣区域内的光谱图像数据的多变量分析，以及作为不同于所述感兴趣区域的区域之外的区域的非感兴趣区域的光谱图像数据。

公开(公告)号：US20140138533A1

公开(公告)日：2014-05-22

申请号：US14076496

申请日：2013-11-11

申请人： CANON KABUSHIKI KAISHA

发明人： Kota Iwasaki

IPC分类号： H01J49/40

CPC分类号： H01J49/40 ,  H01J37/05 ,  H01J37/30 ,  H01J49/061 ,  H01J2237/057 ,  H01J2237/0812

摘要： A time-of-flight mass selector includes a first ion lens for converging ions, a flight tube into which ions which enter from the first ion lens are introduced, the flight tube having equipotential space therein, a second ion lens for converging ions having passed through the flight tube, and a chopper for a gate for pulsing the ions converged by the second ion lens.

摘要翻译： 飞行时间质量选择器包括用于会聚离子的第一离子透镜，引入从第一离子透镜入射的离子的飞行管，其中具有等电位空间的飞行管，用于会聚已经通过的离子的第二离子透镜 通过飞行管和用于脉冲由第二离子透镜会聚的离子的栅极的斩波器。

公开(公告)号：US10184885B2

公开(公告)日：2019-01-22

申请号：US14901015

申请日：2014-06-23

申请人： CANON KABUSHIKI KAISHA

发明人： Yohei Murayama ,  Kota Iwasaki ,  Masafumi Kyogaku

IPC分类号： G01N21/65 ,  G01N21/31 ,  G01N21/27 ,  G01J3/02 ,  G01J3/44 ,  G01N21/64

摘要： An information processing device configured to process spectral information includes: a data obtaining unit configured to obtain three-dimensional distribution data of spectral information; a generating unit configured to generate two-dimensional image, data from the three-dimensional distribution data of spectral information; a display unit; a display control unit configured to display the two-dimensional image on the display unit; an information obtaining unit configured to obtain position information of a two-dimensional region which a user has selected from the two-dimensional image; and an extracting unit configured to extract, from a three-dimensional region corresponding to the two-dimensional region, in the three-dimensional distribution of spectral information, feature region information satisfying predetermined feature conditions.

公开(公告)号：US20160141162A1

公开(公告)日：2016-05-19

申请号：US14901672

申请日：2015-02-26

申请人： CANON KABUSHIKI KAISHA

发明人： Kota Iwasaki

IPC分类号： H01J49/00 ,  H01J49/40 ,  H01J49/10

CPC分类号： H01J49/164 ,  H01J37/252 ,  H01J49/0004 ,  H01J49/067 ,  H01J49/10 ,  H01J49/40

摘要： Provided is a projection-type charged particle optical system in which a projection magnification can be changed while a decrease in the accuracy in measuring a mass-to-charge ratio is being suppressed. A projection-type charged particle optical system according to the present invention includes a first electrode disposed so as to face a sample and having an opening formed therein for allowing a charged particle to pass, a second electrode disposed on a side of the first electrode opposite to where the sample is disposed and having an opening formed therein for allowing the charged particle to pass, and a flight-tube electrode disposed such that the charged particle that has been emitted from the sample and has passed through the second electrode enters the flight-tube electrode and being configured to form a substantially equipotential space thereinside. A principal plane is formed at at least two positions in a travel path of the charged particle.

摘要翻译： 提供一种投影型带电粒子光学系统，其中可以在抑制质荷比的测量精度降低的同时改变投影倍率。 根据本发明的投影型带电粒子光学系统包括：第一电极，其设置成面对样品并且具有形成在其中的开口，用于允许带电粒子通过;第二电极，设置在第一电极的相反侧 到样品被设置并且具有形成在其中的开口以允许带电粒子通过的位置;以及飞行管电极，其被设置为使得已经从样品发射并且已经通过第二电极的带电粒子进入飞行 - 管电极并且被配置为在其内部形成基本上等电位的空间。 在带电粒子的行进路径中的至少两个位置处形成主平面。

公开(公告)号：US20150115149A1

公开(公告)日：2015-04-30

申请号：US14516839

申请日：2014-10-17

申请人： CANON KABUSHIKI KAISHA

发明人： Naofumi Aoki ,  Masafumi Kyogaku ,  Kota Iwasaki

IPC分类号： H01J49/00 ,  H01J49/40

CPC分类号： H01J49/0004 ,  G01N23/2258 ,  H01J49/0031 ,  H01J49/40

摘要： Projection TOF mass spectrum distribution information is acquired by irradiating a first ionizing beam onto a surface of a specimen to acquire first mass spectrum distribution information on secondary ions generated from the specimen, irradiating a second ionizing beam onto the same surface to acquire second mass spectrum distribution information on secondary ions generated from the specimen, and correcting the second mass spectrum distribution information on the basis of the first mass spectrum distribution information.

摘要翻译： 投影TOF质谱分布信息是通过将第一电离束照射到样本表面上获得关于从样本产生的二次离子的第一质谱分布信息，将第二电离束照射到同一表面上以获得第二质谱分布 关于从样本产生的二次离子的信息，以及基于第一质谱分布信息校正第二质谱分布信息。

公开(公告)号：US20150115148A1

公开(公告)日：2015-04-30

申请号：US14515699

申请日：2014-10-16

申请人： CANON KABUSHIKI KAISHA

发明人： Naofumi Aoki ,  Masafumi Kyogaku ,  Kota Iwasaki

IPC分类号： H01J49/00 ,  H01J49/40

CPC分类号： H01J49/0004 ,  H01J49/0031 ,  H01J49/40

摘要： Projection TOF mass spectrum distribution information is acquired by irradiating a first ionizing beam onto a surface of a specimen to acquire first mass spectrum distribution information on secondary ions generated from the specimen, irradiating a second ionizing beam onto the same surface to acquire second mass spectrum distribution information on secondary ions generated from the specimen irradiation, and correcting the second mass spectrum distribution information by correcting time-of-flight distribution information of secondary ions in the second mass spectrum distribution information on the basis of detection time distribution of an arbitrary peak in the first mass spectrum distribution information.

摘要翻译： 投影TOF质谱分布信息是通过将第一电离束照射到样本表面上获得关于从样本产生的二次离子的第一质谱分布信息，将第二电离束照射到同一表面上以获得第二质谱分布 关于从样本照射产生的二次离子的信息，以及通过基于第二质谱分布信息中的任意峰的检测时间分布来校正第二质谱分布信息中的二次离子的飞行时间分布信息来校正第二质谱分布信息 第一质谱分布信息。

公开(公告)号：US20140239173A1

公开(公告)日：2014-08-28

申请号：US14349892

申请日：2012-10-10

申请人： CANON KABUSHIKI KAISHA

发明人： Kota Iwasaki

IPC分类号： H01J49/06 ,  H01J49/00 ,  H01J49/40

CPC分类号： H01J49/061 ,  G01N23/2258 ,  H01J49/0004 ,  H01J49/0031 ,  H01J49/142 ,  H01J49/40

摘要： In order to solve a problem in a mass spectrometry that a distribution of an emitted ion and a substance distribution on the measurement object surface are different from each other, which is due to a shaded portion of a irregular surface which falls under a shadow of primary beam, a primary ion optical system of the present apparatus includes a deflection unit configured to deflect the primary ion in such a manner that the primary ion intersects a flight space of the secondary ion in the course of flight.

摘要翻译： 为了解决质谱分析中测量对象物表面上的发射离子和物质分布的分布彼此不同的问题，这是由于在主要的阴影之下的不规则表面的阴影部分 光束，本装置的一次离子光学系统包括偏转单元，该偏转单元被配置为使主离子以使得主离子在飞行过程中与二次离子的飞行空间相交的方式偏转。