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    ION GROUP IRRADIATION DEVICE, SECONDARY ION MASS SPECTROMETER, AND SECONDARY ION MASS SPECTROMETRY METHOD
    2.
    发明申请
    ION GROUP IRRADIATION DEVICE, SECONDARY ION MASS SPECTROMETER, AND SECONDARY ION MASS SPECTROMETRY METHOD 审中-公开
    离子组辐射装置，二次离子质谱仪和二次离子质谱方法

    公开(公告)号：US20140374586A1

    公开(公告)日：2014-12-25

    申请号：US14306485

    申请日：2014-06-17

    申请人： CANON KABUSHIKI KAISHA

    发明人： Yohei Murayama ,  Masafumi Kyogaku ,  Kota Iwasaki ,  Naofumi Aoki

    IPC分类号： H01J49/10 ,  H01J49/40

    CPC分类号： H01J49/142 ,  G01N23/2258

    摘要： Provided is an ion group irradiation device for facilitating the distinction of peaks in secondary ion mass spectra. The ion group irradiation device for irradiating a sample with an ion group includes an ion source for generating ions, an ion group selecting unit configured to select, from the ions released from the ion source, two or more ion groups formed of ions having different average masses, and a primary ion irradiation unit configured to irradiate the sample with the two or more ion groups. Further, an atom species or a molecule species of the ions forming the two or more ion groups is common between ion groups.

    摘要翻译： 提供了用于促进二次离子质谱中的峰的区别的离子组照射装置。 用于照射离子组的样品的离子组照射装置包括用于产生离子的离子源，离子组选择单元，被配置为从离子源释放的离子中选择由离子平均不同的离子形成的两个或更多个离子组 质量，以及配置成用两个以上离子基团照射样品的一次离子照射单元。 此外，形成两个或更多个离子基团的离子的原子种类或分子种类在离子基团之间是常见的。

    ION GROUP IRRADIATION DEVICE, SECONDARY ION MASS SPECTROMETER, AND SECONDARY ION MASS SPECTROMETRY METHOD
    3.
    发明申请
    ION GROUP IRRADIATION DEVICE, SECONDARY ION MASS SPECTROMETER, AND SECONDARY ION MASS SPECTROMETRY METHOD 审中-公开
    离子组辐射装置，二次离子质谱仪和二次离子质谱方法

    公开(公告)号：US20140374585A1

    公开(公告)日：2014-12-25

    申请号：US14296973

    申请日：2014-06-05

    申请人： CANON KABUSHIKI KAISHA

    发明人： Yohei Murayama ,  Masafumi Kyogaku ,  Kota Iwasaki ,  Naofumi Aoki

    IPC分类号： H01J49/14 ,  H01J49/00 ,  H01J49/44

    CPC分类号： H01J49/142 ,  G01N23/2258 ,  G01N2223/0816 ,  G01N2223/506

    摘要： The present invention provides an ion group irradiation device for irradiating a sample with an ion group, comprising: an ion group selecting unit configured to select, from ions released from an ion source, at least two ion groups formed of ions having different average masses; and a primary ion irradiation unit configured to irradiate the sample with the at least two ion groups selected by the ion group selecting unit, wherein the ion group selecting unit selects at least one ion group and further selects the at least two ion groups from each of the selected at least one ion group.

    摘要翻译： 本发明提供了一种用于对离子基团照射样品的离子组照射装置，包括：离子组选择单元，被配置为从离子源释放的离子中选择由具有不同平均质量的离子形成的至少两个离子基; 以及初级离子照射单元，被配置为用所述离子群选择单元选择的所述至少两个离子群照射所述样品，其中所述离子选择单元选择至少一个离子基团，并且还从所述离子组中选择所述至少两个离子基团 所选择的至少一个离子基团。

    MASS DISTRIBUTION MEASUREMENT METHOD AND MASS DISTRIBUTION MEASUREMENT APPARATUS
    4.
    发明申请
    MASS DISTRIBUTION MEASUREMENT METHOD AND MASS DISTRIBUTION MEASUREMENT APPARATUS 审中-公开
    质量分配测量方法和质量分配测量装置

    公开(公告)号：US20150115149A1

    公开(公告)日：2015-04-30

    申请号：US14516839

    申请日：2014-10-17

    申请人： CANON KABUSHIKI KAISHA

    发明人： Naofumi Aoki ,  Masafumi Kyogaku ,  Kota Iwasaki

    IPC分类号： H01J49/00 ,  H01J49/40

    CPC分类号： H01J49/0004 ,  G01N23/2258 ,  H01J49/0031 ,  H01J49/40

    摘要： Projection TOF mass spectrum distribution information is acquired by irradiating a first ionizing beam onto a surface of a specimen to acquire first mass spectrum distribution information on secondary ions generated from the specimen, irradiating a second ionizing beam onto the same surface to acquire second mass spectrum distribution information on secondary ions generated from the specimen, and correcting the second mass spectrum distribution information on the basis of the first mass spectrum distribution information.

    摘要翻译： 投影TOF质谱分布信息是通过将第一电离束照射到样本表面上获得关于从样本产生的二次离子的第一质谱分布信息，将第二电离束照射到同一表面上以获得第二质谱分布 关于从样本产生的二次离子的信息，以及基于第一质谱分布信息校正第二质谱分布信息。

    MASS DISTRIBUTION MEASUREMENT METHOD AND MASS DISTRIBUTION MEASUREMENT APPARATUS
    5.
    发明申请
    MASS DISTRIBUTION MEASUREMENT METHOD AND MASS DISTRIBUTION MEASUREMENT APPARATUS 审中-公开
    质量分配测量方法和质量分配测量装置

    公开(公告)号：US20150115148A1

    公开(公告)日：2015-04-30

    申请号：US14515699

    申请日：2014-10-16

    申请人： CANON KABUSHIKI KAISHA

    发明人： Naofumi Aoki ,  Masafumi Kyogaku ,  Kota Iwasaki

    IPC分类号： H01J49/00 ,  H01J49/40

    CPC分类号： H01J49/0004 ,  H01J49/0031 ,  H01J49/40

    摘要： Projection TOF mass spectrum distribution information is acquired by irradiating a first ionizing beam onto a surface of a specimen to acquire first mass spectrum distribution information on secondary ions generated from the specimen, irradiating a second ionizing beam onto the same surface to acquire second mass spectrum distribution information on secondary ions generated from the specimen irradiation, and correcting the second mass spectrum distribution information by correcting time-of-flight distribution information of secondary ions in the second mass spectrum distribution information on the basis of detection time distribution of an arbitrary peak in the first mass spectrum distribution information.

    摘要翻译： 投影TOF质谱分布信息是通过将第一电离束照射到样本表面上获得关于从样本产生的二次离子的第一质谱分布信息，将第二电离束照射到同一表面上以获得第二质谱分布 关于从样本照射产生的二次离子的信息，以及通过基于第二质谱分布信息中的任意峰的检测时间分布来校正第二质谱分布信息中的二次离子的飞行时间分布信息来校正第二质谱分布信息 第一质谱分布信息。

    MASS SPECTROMETER AND MASS IMAGE ANALYZING SYSTEM
    7.
    发明申请
    MASS SPECTROMETER AND MASS IMAGE ANALYZING SYSTEM 有权
    质谱仪和大量图像分析系统

    公开(公告)号：US20150155132A1

    公开(公告)日：2015-06-04

    申请号：US14414072

    申请日：2013-06-24

    申请人： CANON KABUSHIKI KAISHA

    发明人： Naofumi Aoki ,  Masafumi Kyogaku ,  Kota Iwasaki ,  Yohei Murayama

    IPC分类号： H01J37/26 ,  H01J49/00

    CPC分类号： H01J37/261 ,  H01J49/0004 ,  H01J49/0468 ,  H01J49/142 ,  H01J2237/08 ,  H01J2237/2448 ,  H01J2237/2602

    摘要： To provide a mass spectrometer capable of performing high-sensitivity measurement using water molecules.The mass spectrometer has a chamber in which a sample is disposed, an irradiation unit for emitting particles to the sample, and an extraction electrode which leads secondary ions emitted from the sample to a mass spectrometry unit, in which the irradiation unit switches a first mode of emitting primary ions for causing the secondary ions to be emitted from the sample and a second mode of emitting particles containing water molecules to be made to adhere to the sample and emits the particles to the sample.

    摘要翻译： 提供能够使用水分子进行高灵敏度测量的质谱仪。 质谱仪具有其中设置有样品的室，用于向样品发射颗粒的照射单元和将从样品发射的二次离子引导到质谱分析单元的引出电极，其中照射单元切换第一模式 发射初级离子以引起二次离子从样品中发射，第二种发射含有水分子的粒子被附着到样品上并将颗粒发射到样品。