Abstract:
An embodiment of the disclosure provides a system for determining information on one or more constituents in a medium. The system includes N light emitters L1 . . . LN, wherein each light emitter Lr provides an amplitude modulated (AM) light at modulation frequency fr into a flow path of the medium from one side of a containment vessel for the medium. The system further includes a photodetector, for receiving the AM light from each light emitter after it passes through the flow path of the medium, and converting the AM light to an electrical signal characterized by a summation of frequency components from each modulation frequency fr. The system further includes one or more measuring circuits providing information about a concentration of one or more constituents in the medium determined from log ratios of a pair of amplitudes of fy and fz frequency components in the electrical signal.
Abstract:
A method and system are presented for use in controlling a process applied to a patterned structure having regions of different layered stacks. The method comprises: sequentially receiving measured data indicative of optical response of the structure being processed during a predetermined processing time, and generating a corresponding sequence of data pieces measured over time; and analyzing and processing the sequence of the data pieces and determining at least one main parameter of the structure. The analyzing and processing comprises: processing a part of said sequence of the data pieces and obtaining data indicative of one or more parameters of the structure; utilizing said data indicative of said one or more parameters of the structure and optimizing model data describing a relation between an optical response of the structure and one or more parameters of the structure; utilizing the optimized model data for processing at least a part of the sequence of the measured data pieces, and determining at least one parameters of the structure characterizing said process applied to the structure, and generating data indicative thereof.
Abstract:
In an optical inspection tool, an illumination aperture is opened at each of a plurality of aperture positions of an illumination pupil area one at a time across the illumination pupil area. For each aperture opening position, an incident beam is directed towards the illumination pupil area so as to selectively pass a corresponding ray bundle of the illumination beam at a corresponding set of one or more incident angles towards the sample and an output beam, which is emitted from the sample in response to the corresponding ray bundle of the incident beam impinging on the sample at the corresponding set of one or more incident angles, is detected. A defect detection characteristic for each aperture position is determined based on the output beam detected for each aperture position. An optimum aperture configuration is determined based on the determined defect detection characteristic for each aperture position.
Abstract:
A system and method for inspecting a surface, comprising: illuminating said surface with an electromagnetic radiation to generate scattered radiation from features of said surface; inducing a change in phase to said scattered radiation for reducing divergence of said scattered radiation and for redirecting said scattered radiation towards a predetermined spatial region; focusing after said radiation has propagated to said spatial region; capturing an image of radiation, whereby said features of said surface are detected in said image of radiation.
Abstract:
A light source and a method for its use in an optical sensor are provided, the light source including a resistively heated element. The light source includes a power circuit configured to provide a pulse width modulated voltage to the resistively heated element, the pulse width modulated voltage including: a duty cycle with a first voltage; and a pulse period including a period with a second voltage, wherein: the duty cycle, the first voltage, and the pulse period are selected so that the resistively heated element is heated to a first temperature; and the first temperature is selected to emit black body radiation in a continuum spectral range. Also provided is an optical sensor for determining a chemical composition including a light source as above.
Abstract:
The invention provides a high resolution, wide dynamic range, multi-color detection platform for microfluidic analyzers/instruments and methods. The detection platform uses multiple high gain semiconductor optical sensors for the detection of luminescence from cellular or biological samples. The digitized outputs from these sensors are combined and weighted in a signal processing unit, using pre-determined algorithms for each color, which optimize the resolution in each of these high gain semiconductor optical sensors while extending the dynamic range of the detection platform.
Abstract:
A multi-component gas analysis system includes a spectrometric analysis device configured to obtain ratio of each of first components in a multi-component gas based on an absorption spectrum of light that has transmitted through the multi-component gas; a density measurement device configured to measure a first density of the multi-component gas; and a calculation device configured to calculate a ratio of each of second components in the multi-component gas using the ratio of each of the first components obtained by the spectrometric analysis device and the first density measured by the density measurement device, the second components being components that cannot be obtained by the spectrometric analysis device.
Abstract:
A system and method for using near-infrared or short-wave infrared (SWIR) light sources between approximately 1.4-1.8 microns, 2-2.5 microns, 1.4-2.4 microns, 1-1.8 microns for active remote sensing or hyper-spectral imaging for detection of natural gas leaks or exploration sense the presence of hydro-carbon gases such as methane and ethane. Most hydro-carbons (gases, liquids and solids) exhibit spectral features in the SWIR, which may also coincide with atmospheric transmission windows (e.g., approximately 1.4-1.8 microns or 2-2.5 microns). Active remote sensing or hyper-spectral imaging systems may include a fiber-based super-continuum laser and a detection system and may reside on an aircraft, vehicle, handheld, or stationary platform. Super-continuum sources may emit light in the near-infrared or SWIR. An imaging spectrometer or a gas-filter correlation radiometer may be used to identify substances or materials such as oil spills, geology and mineralogy, vegetation, greenhouse gases, construction materials, plastics, explosives, fertilizers, paints, or drugs.
Abstract:
A wearable device for use with a smart phone or tablet includes a measurement device having a light source with a plurality of light emitting diodes (LEDs) for measuring physiological parameters and configured to generate an optical beam with wavelengths including a near-infrared wavelength between 700 and 2500 nanometers. The measurement device includes lenses configured to deliver the optical beam to a sample of skin or tissue, which reflects the optical beam to a receiver located a first distance from one of the LEDs and a different distance from another of the LEDs, and is also configured to generate an output signal representing a non-invasive measurement on blood contained within the sample. The wearable device is configured to communicate with the smart phone or tablet, which receives, processes, stores and displays the output signal with the processed output signal configured to be transmitted over a wireless transmission link.
Abstract:
In illustrative implementations of this invention, light sources illuminate a surface with multi-spectral, multi-directional illumination that varies in direction, wavelength, coherence and collimation. One or more cameras capture images of the surface while the surface is illuminated under different lighting conditions. One or more computers take, as input, data indicative of or derived from the images, and determine a classification of the surface. Based on the computed classification, the computers output signals to control an I/O device, such that content displayed by the I/O device depends, at least in part, on the computed classification. In illustrative implementations, this invention accurately classifies a wide range of surfaces, including transparent surfaces, specular surfaces, and surfaces with few features.