TUNABLE OPTICAL RECEIVER
    111.
    发明申请
    TUNABLE OPTICAL RECEIVER 审中-公开
    可接收光接收器

    公开(公告)号:US20160377530A1

    公开(公告)日:2016-12-29

    申请号:US15192904

    申请日:2016-06-24

    Inventor: Louis L. Barrett

    Abstract: An embodiment of the disclosure provides a system for determining information on one or more constituents in a medium. The system includes N light emitters L1 . . . LN, wherein each light emitter Lr provides an amplitude modulated (AM) light at modulation frequency fr into a flow path of the medium from one side of a containment vessel for the medium. The system further includes a photodetector, for receiving the AM light from each light emitter after it passes through the flow path of the medium, and converting the AM light to an electrical signal characterized by a summation of frequency components from each modulation frequency fr. The system further includes one or more measuring circuits providing information about a concentration of one or more constituents in the medium determined from log ratios of a pair of amplitudes of fy and fz frequency components in the electrical signal.

    Abstract translation: 本公开的实施例提供了一种用于确定介质中的一个或多个成分的信息的系统。 该系统包括N个发光体L1。 。 。 LN,其中每个光发射器Lr以调制频率fr的调幅(AM)光提供到介质从用于介质的容纳容器的一侧的流动路径。 该系统还包括光电检测器,用于在通过介质的流路之后接收来自每个光发射器的AM光,并将AM光转换成以每个调制频率fr的频率分量的总和为特征的电信号。 该系统还包括一个或多个测量电路,其提供关于介质中的一个或多个成分的浓度的信息,其由电信号中的一对fy和fz频率分量的对数比的对数比确定。

    Optical metrology for in-situ measurements
    112.
    发明授权
    Optical metrology for in-situ measurements 有权
    用于原位测量的光学测量

    公开(公告)号:US09528946B2

    公开(公告)日:2016-12-27

    申请号:US14422190

    申请日:2013-08-15

    Abstract: A method and system are presented for use in controlling a process applied to a patterned structure having regions of different layered stacks. The method comprises: sequentially receiving measured data indicative of optical response of the structure being processed during a predetermined processing time, and generating a corresponding sequence of data pieces measured over time; and analyzing and processing the sequence of the data pieces and determining at least one main parameter of the structure. The analyzing and processing comprises: processing a part of said sequence of the data pieces and obtaining data indicative of one or more parameters of the structure; utilizing said data indicative of said one or more parameters of the structure and optimizing model data describing a relation between an optical response of the structure and one or more parameters of the structure; utilizing the optimized model data for processing at least a part of the sequence of the measured data pieces, and determining at least one parameters of the structure characterizing said process applied to the structure, and generating data indicative thereof.

    Abstract translation: 提出了一种方法和系统,用于控制应用于具有不同层叠叠层区域的图案化结构的工艺。 该方法包括:在预定处理时间内顺序地接收指示正在处理的结构的光学响应的​​测量数据,并产生随时间测量的相应的数据片段序列; 以及分析和处理所述数据段的序列并确定所述结构的至少一个主要参数。 分析和处理包括:处理所述数据片段的一部分并获得指示所述结构的一个或多个参数的数据; 利用表示所述结构的所述一个或多个参数的所述数据,以及描述所述结构的光学响应与所述结构的一个或多个参数之间的关系的最优化模型数据; 利用优化的模型数据来处理测量数据段的序列的至少一部分,以及确定表征应用于结构的所述过程的结构的至少一个参数,以及生成指示其的数据。

    Lenticular wafer inspection
    114.
    发明授权
    Lenticular wafer inspection 有权
    透镜晶片检查

    公开(公告)号:US09523645B2

    公开(公告)日:2016-12-20

    申请号:US14519054

    申请日:2014-10-20

    Abstract: A system and method for inspecting a surface, comprising: illuminating said surface with an electromagnetic radiation to generate scattered radiation from features of said surface; inducing a change in phase to said scattered radiation for reducing divergence of said scattered radiation and for redirecting said scattered radiation towards a predetermined spatial region; focusing after said radiation has propagated to said spatial region; capturing an image of radiation, whereby said features of said surface are detected in said image of radiation.

    Abstract translation: 一种用于检查表面的系统和方法,包括:用电磁辐射照射所述表面以从所述表面的特征产生散射辐射; 诱发所述散射辐射的相位变化,以减少所述散射辐射的发散并且将所述散射辐射重定向到预定的空间区域; 在所述辐射已经传播到所述空间区域之后聚焦; 捕获辐射图像,由此在所述辐射图像中检测所述表面的所述特征。

    MULTI-COMPONENT GAS ANALYSIS SYSTEM AND MULTI-COMPONENT GAS ANALYSIS METHOD
    117.
    发明申请
    MULTI-COMPONENT GAS ANALYSIS SYSTEM AND MULTI-COMPONENT GAS ANALYSIS METHOD 审中-公开
    多组分气体分析系统和多组分​​气体分析方法

    公开(公告)号:US20160349176A1

    公开(公告)日:2016-12-01

    申请号:US15161359

    申请日:2016-05-23

    Abstract: A multi-component gas analysis system includes a spectrometric analysis device configured to obtain ratio of each of first components in a multi-component gas based on an absorption spectrum of light that has transmitted through the multi-component gas; a density measurement device configured to measure a first density of the multi-component gas; and a calculation device configured to calculate a ratio of each of second components in the multi-component gas using the ratio of each of the first components obtained by the spectrometric analysis device and the first density measured by the density measurement device, the second components being components that cannot be obtained by the spectrometric analysis device.

    Abstract translation: 多组分气体分析系统包括:光谱分析装置,被配置为基于透过多组分气体的光的吸收光谱获得多组分气体中的每个第一组分的比例; 密度测量装置,被配置为测量所述多组分气体的第一密度; 以及计算装置,其被配置为使用由所述光谱分析装置获得的每个第一分量与由所述密度测量装置测量的第一密度的比率来计算所述多组分气体中的每个第二组分的比率,所述第二组分为 光谱分析装置不能得到的成分。

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