DIGITAL PHASE CONJUGATION USING MOVING TARGET AS GUIDE STAR
    101.
    发明申请
    DIGITAL PHASE CONJUGATION USING MOVING TARGET AS GUIDE STAR 审中-公开
    使用移动目标作为指导星的数字相位联合

    公开(公告)号:US20150241342A1

    公开(公告)日:2015-08-27

    申请号:US14631684

    申请日:2015-02-25

    Abstract: A method for irradiating a scattering medium, including irradiating a scattering medium with radiation from a laser, to form scattered radiation having a scattered field; measuring a difference in the scattered field caused by motion of a moving target in or behind the scattering medium; forming a phase conjugate of the difference to form a phase conjugate field; and irradiating the scattering medium with the phase conjugate field formed using one or more radiation modulating elements. Thus we present that movement of objects can be used as a novel guide star in Digital Optical Phase Conjugation (DOPC). By time reversal of difference of scattering fields of a moving target, light can be focused through scattering media.

    Abstract translation: 一种用于照射散射介质的方法,包括用来自激光器的辐射照射散射介质,以形成具有散射场的散射辐射; 测量由散射介质中或其后面的移动目标的运动引起的散射场的差异; 形成所述差的相位共轭以形成相位共轭场; 以及使用一个或多个辐射调制元件形成的相位共轭场辐射散射介质。 因此,我们提出物体的移动可以用作数字光相位共轭(DOPC)中的新型导星。 通过时间反转移动目标的散射场的差异,可以通过散射介质聚焦光。

    High resolution structured illumination microscopy
    103.
    发明授权
    High resolution structured illumination microscopy 有权
    高分辨率结构照明显微镜

    公开(公告)号:US08836948B2

    公开(公告)日:2014-09-16

    申请号:US13146550

    申请日:2010-01-28

    Applicant: Zhaowei Liu

    Inventor: Zhaowei Liu

    Abstract: Disclosed are systems, apparatus, methods and devices, including a method that includes generating two or more sequential surface plasmon interference patterns, at least one of the two or more sequential surface plasmon interference patterns being different from another of the two or more sequential surface plasmon interference patterns, and capturing respective images of a specimen resulting from the interference patterns. Also disclosed is a method that includes generating two or more sequential optical interference patterns, at least one of the two or more sequential optical interference patterns being different from another of the interference patterns, and removing from each of the generated interference patterns, using a beam stopper, a corresponding zero-order diffraction light component included in the respective generated patterns to obtain resultant corresponding two or more sequential optical interference patterns, directed at a specimen, with missing respective zero-order light components.

    Abstract translation: 公开了一种系统,装置,方法和装置,包括一种方法,包括产生两个或多个顺序表面等离子体激元干涉图案,两个或更多个顺序表面等离子体激元干涉图案中的至少一个不同于两个或多个顺序表面等离子体激元 干涉图案,并捕获由干涉图案产生的样本的各个图像。 还公开了一种方法,其包括生成两个或多个顺序光学干涉图案,所述两个或更多个顺序光学干涉图案中的至少一个与干涉图案中的另一个不同,以及使用光束从每个所生成的干涉图案中移除 阻挡器,包括在各个生成的图案中的对应的零级衍射光分量,以获得指向样本的相应的两个或更多个顺序的光学干涉图案,缺少相应的零级光分量。

    Efficient telecentric optical system (ETOS)
    105.
    发明授权
    Efficient telecentric optical system (ETOS) 失效
    高效远心光学系统(ETOS)

    公开(公告)号:US08462328B2

    公开(公告)日:2013-06-11

    申请号:US13003725

    申请日:2009-07-21

    Abstract: A new architecture for machine vision system that uses area sensor (or line sensor), with telecentric imaging optics compound with telecentric illumination module is described. The illumination module may include a bright field illumination source and/or a dark field illumination source. The telecentric imaging optics includes an upper imaging module having an aperture stop and a lower imaging module positioned between the upper imaging module and object, such that the light source and the aperture stop are located in the back focal plane of the lower imaging module. The lower imaging module images the illumination source into a plane of an aperture stop of the upper imaging module. The optical axis of the upper imaging module is offset with respect to the lower imaging module. The optical axis of the telecentric illumination module is offset with respect to the axis of the lower imaging module in the opposite direction.

    Abstract translation: 描述了一种使用区域传感器(或线传感器)的机器视觉系统的新架构,其具有远心成像光学复合物与远心照明模块。 照明模块可以包括明场照明源和/或暗场照明源。 远心成像光学器件包括具有孔径光阑的上成像模块和位于上成像模块和物体之间的下成像模块,使得光源和孔径光阑位于下成像模块的后焦平面中。 下部成像模块将照明源成像到上部成像模块的孔径光阑的平面内。 上成像模块的光轴相对于下成像模块偏移。 远心照明模块的光轴相对于下成像模块的轴线在相反方向上偏移。

    Measurement of critical dimension
    106.
    发明授权
    Measurement of critical dimension 有权
    关键尺寸的测量

    公开(公告)号:US08456639B2

    公开(公告)日:2013-06-04

    申请号:US13174815

    申请日:2011-07-01

    Abstract: A spectroscopic instrument for conducting multi-wavelength, multi-azimuth, multi-angle-of-incidence readings on a substrate, the instrument having a broadband light source for producing an illumination beam, an objective for directing the illumination onto the substrate at multiple azimuth angles and multiple angels-of-incidence simultaneously, thereby producing a reflection beam, an aperture plate having an illumination aperture and a plurality of collection apertures formed therein for selectively passing portions of the reflection beam having desired discreet combinations of azimuth angle and angle-of-incident, a detector for receiving the discreet combinations of azimuth angle and angle-of-incident and producing readings, and a processor for interpreting the readings.

    Abstract translation: 一种用于在衬底上进行多波长,多方位角,多角度入射读数的光谱仪器,该仪器具有用于产生照明光束的宽带光源,用于将多个方位角的照明引导到衬底上的物镜 角度和多个入射角,从而产生反射光束,具有照明孔的孔板和形成在其中的多个收集孔,用于选择性地通过具有期望的方位角和角度的离散组合的反射光束的部分 - 用于接收方位角和入射角的离散组合并产生读数的检测器,以及用于解释读数的处理器。

    HIGH RESOLUTION STRUCTURED ILLUMINATION MICROSCOPY
    107.
    发明申请
    HIGH RESOLUTION STRUCTURED ILLUMINATION MICROSCOPY 有权
    高分辨率结构照明显微镜

    公开(公告)号:US20120069344A1

    公开(公告)日:2012-03-22

    申请号:US13146550

    申请日:2010-01-28

    Applicant: Zhaowei Liu

    Inventor: Zhaowei Liu

    Abstract: Disclosed are systems, apparatus, methods and devices, including a method that includes generating two or more sequential surface plasmon interference patterns, at least one of the two or more sequential surface plasmon interference patterns being different from another of the two or more sequential surface plasmon interference patterns, and capturing respective images of a specimen resulting from the interference patterns. Also disclosed is a method that includes generating two or more sequential optical interference patterns, at least one of the two or more sequential optical interference patterns being different from another of the interference patterns, and removing from each of the generated interference patterns, using a beam stopper, a corresponding zero-order diffraction light component included in the respective generated patterns to obtain resultant corresponding two or more sequential optical interference patterns, directed at a specimen, with missing respective zero-order light components.

    Abstract translation: 公开了一种系统,装置,方法和装置,包括一种方法,包括产生两个或多个顺序表面等离子体激元干涉图案,两个或更多个顺序表面等离子体激元干涉图案中的至少一个不同于两个或多个顺序表面等离子体激元 干涉图案,并捕获由干涉图案产生的样本的各个图像。 还公开了一种方法,其包括生成两个或多个顺序光学干涉图案,所述两个或更多个顺序光学干涉图案中的至少一个与干涉图案中的另一个不同,以及使用光束从每个所生成的干涉图案中移除 阻挡器,包括在各个生成的图案中的对应的零级衍射光分量,以获得指向样本的相应的两个或更多个顺序的光学干涉图案,缺少相应的零级光分量。

    METHOD AND APPARATUS FOR PERFORMING MULTIPOINT FCS
    108.
    发明申请
    METHOD AND APPARATUS FOR PERFORMING MULTIPOINT FCS 审中-公开
    用于执行多点FCS的方法和装置

    公开(公告)号:US20110226963A1

    公开(公告)日:2011-09-22

    申请号:US13048068

    申请日:2011-03-15

    Applicant: Werner Knebel

    Inventor: Werner Knebel

    CPC classification number: G01N21/6408 G01N21/6458 G01N2201/0675 G02B21/0076

    Abstract: A method of performing fluorescence correlation spectroscopy with a fluorescence microscope includes selecting an illumination area of a sample, generating an illumination light beam and splitting the illumination light beam into at least three partial beams. The partial light beams are focused onto the selected illumination area using a microscope optical system of the fluorescence microscope so as to excite fluorescent dye particles in the illumination area to fluoresce. Fluorescent light emitted by the dye particles is detected and at least one diffusion coefficient representative of a diffusibility of the fluorescent dye particles is determined based on the detected fluorescent light.

    Abstract translation: 用荧光显微镜进行荧光相关光谱的方法包括选择样品的照明区域,产生照明光束并将照明光束分成至少三个部分光束。 使用荧光显微镜的显微镜光学系统将部分光束聚焦在所选择的照明区域上,以激发照明区域中的荧光染料颗粒发荧光。 检测由染料颗粒发射的荧光,并且基于检测到的荧光来确定代表荧光染料颗粒的扩散性的至少一个扩散系数。

    DEVICE TO ILLUMINATE AN OBJECT WITH A MULTISPECTRAL LIGHT SOURCE AND DETECT THE SPECTRUM OF THE EMITTED LIGHT
    109.
    发明申请
    DEVICE TO ILLUMINATE AN OBJECT WITH A MULTISPECTRAL LIGHT SOURCE AND DETECT THE SPECTRUM OF THE EMITTED LIGHT 审中-公开
    用多光源光源照射物体并检测发射光的光谱的装置

    公开(公告)号:US20100314554A1

    公开(公告)日:2010-12-16

    申请号:US12744125

    申请日:2008-11-21

    Abstract: A device to illuminate a object, to excite its fluorescence light emission, and detect the emitted fluorescence spectrum, comprising: at least one illumination system (13), adapted to receive light from a light source (11), to select at least one wavelength bands of light spectrum of the source (11), to illuminate a object (15) with light filtered in that way (14); and a detection system (17), adapted to detect fluorescence light (16) emitted by the object (15), to select at least one wavelength bands of fluorescence, light spectrum (16), to record the spectrum of the filtered light; characterized in that said illumination system (13) comprises: at least one first dispersive element (41), at least one focusing optics (43), at least one spatial fitter of excitation (44), at least one collimating optics (45) and at least one second dispersive element (47), wherein said detection system (17) comprises: at least one dispersive element (81), at least one focusing optics (83), at least one spatial filter of detection (84), at least one imaging optics (85) and at least one light detector (87).

    Abstract translation: 用于照亮物体以激发其荧光发射并检测发射的荧光光谱的装置,包括:适于接收来自光源(11)的光的至少一个照明系统(13),以选择至少一个波长 源(11)的光谱带,用以这种方式过滤的光照射物体(15)(14); 以及检测系统(17),其适于检测由所述物体(15)发射的荧光(16),以选择荧光的至少一个波长带(光谱),以记录所述滤光的光谱; 其特征在于,所述照明系统(13)包括:至少一个第一分散元件(41),至少一个聚焦光学器件(43),至少一个激发器空间拟合器(44),至少一个准直光学器件(45)和 至少一个第二分散元件(47),其中所述检测系统(17)包括:至少一个分散元件(81),至少一个聚焦光学元件(83),至少一个检测空间滤波器(84) 一个成像光学器件(85)和至少一个光检测器(87)。

    Programmable spatial filter for wafer inspection
    110.
    发明申请
    Programmable spatial filter for wafer inspection 审中-公开
    用于晶圆检测的可编程空间滤波器

    公开(公告)号:US20060012781A1

    公开(公告)日:2006-01-19

    申请号:US10890800

    申请日:2004-07-14

    Abstract: A programmable spatial filter for use as a Fourier plane filter in dark field wafer inspection systems, based on the use of MEMS (Micro-Electro-Mechanical Systems) devices. In comparison with prior art systems, especially those using LCD's, the use of MEMS devices provide a number of potential advantages, including good transmission in the UV, a high fill factor, polarization independence and a high extinction ratio since the shutter is opaque when closed. The MEMS devices can be flap devices, artificial eyelid, or double shutter devices. Additionally, a novel spatial light modulator (SLM) assembly having a double layer of SLM arrays is described, in which the fill factor is increased in comparison to a single layer SLM using the same devices, by positioning the dead areas of the elements of both arrays collinearly in the modulated beam. This SLM assembly can be implemented using pixelated LCD arrays or MEMS arrays.

    Abstract translation: 一种可编程空间滤波器,用于基于MEMS(微机电系统)设备的使用,用于暗视场晶圆检测系统中的傅立叶平面滤波器。 与现有技术的系统(特别是使用LCD的系统)相比,MEMS器件的使用提供了许多潜在的优点,包括UV中的良好透射,高填充因子,偏振独立性和高消光比,因为当关闭时快门是不透明的 。 MEMS器件可以是襟翼装置,人造眼睑或双快门装置。 另外,描述了一种具有双层SLM阵列的新型空间光调制器(SLM)组件,其中与使用相同装置的单层SLM相比,填充因子通过将两者的元素的死区定位 阵列共线在调制束中。 该SLM组件可以使用像素化LCD阵列或MEMS阵列来实现。

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