Invention Grant
US08462328B2 Efficient telecentric optical system (ETOS) 失效
高效远心光学系统(ETOS)

  • Patent Title: Efficient telecentric optical system (ETOS)
  • Patent Title (中): 高效远心光学系统(ETOS)
  • Application No.: US13003725
    Application Date: 2009-07-21
  • Publication No.: US08462328B2
    Publication Date: 2013-06-11
  • Inventor: David FischYigal Katzir
  • Applicant: David FischYigal Katzir
  • Applicant Address: IL Yavne
  • Assignee: Orbotech Ltd.
  • Current Assignee: Orbotech Ltd.
  • Current Assignee Address: IL Yavne
  • Agency: Sughrue Mion, PLLC
  • International Application: PCT/IL2009/000714 WO 20090721
  • International Announcement: WO2010/010556 WO 20100128
  • Main IPC: G01N21/00
  • IPC: G01N21/00
Efficient telecentric optical system (ETOS)
Abstract:
A new architecture for machine vision system that uses area sensor (or line sensor), with telecentric imaging optics compound with telecentric illumination module is described. The illumination module may include a bright field illumination source and/or a dark field illumination source. The telecentric imaging optics includes an upper imaging module having an aperture stop and a lower imaging module positioned between the upper imaging module and object, such that the light source and the aperture stop are located in the back focal plane of the lower imaging module. The lower imaging module images the illumination source into a plane of an aperture stop of the upper imaging module. The optical axis of the upper imaging module is offset with respect to the lower imaging module. The optical axis of the telecentric illumination module is offset with respect to the axis of the lower imaging module in the opposite direction.
Public/Granted literature
Information query
Patent Agency Ranking
0/0