公开(公告)号：US06476389B1

公开(公告)日：2002-11-05

申请号：US09523305

申请日：2000-03-10

Applicant: Hiroshi Konakawa ,  Yasuhiko Sato ,  Seiichi Suzuki

Inventor： Hiroshi Konakawa ,  Yasuhiko Sato ,  Seiichi Suzuki

IPC: G21K700

CPC classification number: G01N23/225 ,  H01J37/256

Abstract: In quantitative analysis of an element in a specimen in which characteristic X-rays generated from the specimen upon irradiation with an electron beam are detected, absorption current values of the specimen and a reference sample are measured before the final measurement, the value of ratio between thus measured values is determined, and the absorption current value of the specimen measured at the time of final measurement is multiplied by this value of ratio, so as to calculate the irradiation current value thereof, thereby substantially monitoring the irradiation current.

Abstract translation: 在检测从电子束照射时从试样产生的特征X射线的试样中的元素的定量分析中，在最终测定前测定试样和基准样品的吸收电流值， 由此确定测定值，将最终测定时测定的试样的吸收电流值乘以该比值，从而计算其照射电流值，从而实质上监测照射电流。

公开(公告)号：US20020158200A1

公开(公告)日：2002-10-31

申请号：US10084768

申请日：2002-02-26

Inventor： Masami Terauchi

IPC: H01J037/256

CPC classification number: H01J37/256 ,  H01J37/244 ,  H01J2237/2445 ,  H01J2237/2446

Abstract: An electron microscope is offered which is fitted with an X-ray spectrometer having a compact optical system and high resolution. The spectrometer has a spectrometer chamber whose inside is evacuated by a vacuum pumping system. A diffraction grating having unequally spaced grooves is placed in the chamber. An X-ray detector is mounted to an end of the chamber. The X-ray spectrometer is mounted to the sidewall of the electron microscope via a gate valve. A specimen is irradiated with an electron beam and emits characteristic X-rays, which are made to impinge on the face of the grating at a large angle with respect to the normal line to the face. Diffracted X-rays from the grating reach the X-ray detector and are detected.

Abstract translation: 提供了一种电子显微镜，配有具有紧凑光学系统和高分辨率的X射线光谱仪。 光谱仪具有光谱室，其内部由真空泵送系统抽真空。 具有不等间隔的凹槽的衍射光栅放置在腔室中。 X射线检测器安装在腔室的一端。 X射线光谱仪通过闸阀安装在电子显微镜的侧壁上。 用电子束照射样品，并发射特征X射线，其相对于与脸部的法线成大角度而被撞击在光栅的表面上。 来自光栅的衍射X射线到达X射线检测器并被检测。

公开(公告)号：US5659174A

公开(公告)日：1997-08-19

申请号：US628816

申请日：1996-04-05

Applicant: Noriyuki Kaneoka ,  Kaneo Kageyama ,  Atushi Mouri ,  Junji Takada

Inventor： Noriyuki Kaneoka ,  Kaneo Kageyama ,  Atushi Mouri ,  Junji Takada

IPC: H01J37/22 ,  H01J37/147 ,  H01J37/15 ,  H01J37/21 ,  H01J37/26 ,  H01J37/28

CPC classification number: H01J37/256 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/216 ,  H01J2237/24495 ,  H01J2237/2487

Abstract: A sample is scanned with a focused electron beam so that secondary particles characteristic of the sample are generated therefrom and the generated particles are detected by a detector so as to be converted into an electric signal. The electric signal is converted into digital image data, which are stored in a image memory. The stored image data are displayed on a display along with digital SEM operating picture data stored in a memory of a personal computer. An operating signal generated by an input device is conducted to not only the personal computer but also an input control unit, which converts the operating signal into a control signal. This control signal is used to change a parameter associated with the image data, i.e., for example, to control focusing of the electron beam.

Abstract translation: 用聚焦电子束扫描样品，使得从样品中产生特征性的二次颗粒，并通过检测器检测所产生的颗粒，以便将其转换成电信号。 电信号被转换成存储在图像存储器中的数字图像数据。 存储的图像数据与存储在个人计算机的存储器中的数字SEM操作图像数据一起显示在显示器上。 由输入装置生成的操作信号不仅对个人计算机进行，而且还将输入控制单元转换为控制信号。 该控制信号用于改变与图像数据相关联的参数，例如，以控制电子束的聚焦。

公开(公告)号：US5596195A

公开(公告)日：1997-01-21

申请号：US529288

申请日：1995-09-15

Applicant: Kenichi Obori ,  Atsushi Bando ,  Toshikazu Yurugi

Inventor： Kenichi Obori ,  Atsushi Bando ,  Toshikazu Yurugi

IPC: G01N23/225 ,  H01J37/256 ,  H01J37/00

CPC classification number: H01J37/256

Abstract: An apparatus and method of identifying substances contained in a sample to both identify the elements in the sample and to measure a distribution of the elements are provided. The sample is scanned with electron beams to form X-ray images of two or elements. These X-ray images can be used to form a scattering diagram, and the composition of known materials can be plotted on the scattering diagram. The substances contained in the samples can be identified, and the distribution of the substances can be obtained by comparing the data on the scattering diagram with the plot.

Abstract translation: 提供了一种识别样品中所含物质的装置和方法，以便识别样品中的元素并测量元件的分布。 用电子束扫描样品以形成两个或多个元素的X射线图像。 这些X射线图像可用于形成散射图，并且已知材料的组成可以绘制在散射图上。 可以确定样品中含有的物质，并通过比较散射图上的数据和图来获得物质的分布。

公开(公告)号：US5233191A

公开(公告)日：1993-08-03

申请号：US679317

申请日：1991-04-02

Applicant: Minori Noguchi ,  Yukio Kembo ,  Hiroshi Morioka ,  Hiroshi Yamaguchi ,  Makiko Kohno ,  Yoshimasa Ohshima

Inventor： Minori Noguchi ,  Yukio Kembo ,  Hiroshi Morioka ,  Hiroshi Yamaguchi ,  Makiko Kohno ,  Yoshimasa Ohshima

IPC: G01N21/94 ,  G01N21/956 ,  G01Q10/00 ,  G01Q30/02 ,  G01Q30/04 ,  G01Q30/14 ,  G01Q60/10 ,  G01R31/311 ,  H01J37/256 ,  H01L21/00 ,  H01L21/66

CPC classification number: H01L21/67253 ,  G01R31/311 ,  H01J37/256 ,  H01L21/67276 ,  H01L21/67288 ,  H01L22/20 ,  B82Y35/00 ,  G01N2021/8822 ,  G01N21/94 ,  G01N21/95623

Abstract: Method and apparatus of detecting, analyzing and evaluating the content of foreign matters such as dusts and impurities contained in various materials, units, processes and environment standing for constituting components of a mass production line during mass production start-up and during mass production, in order to manage a semiconductor production process. A mass production off-line system including an apparatus for detecting, analyzing and evaluating the content of foreign matters during the mass production start-up is separated from the production line and installed independently thereof. Monitors for detection of foreign matters are provided at necessary locations in the production line and monitor data is evaluated through various units to manage the content of foreign matters in the production line, permitting efficient and economical mass production start-up and mass production. The kind of element of a foreign matter on sampling wafer detected in the mass production line is analyzed by means of STM/STS and the results are compared with a data base to effect identification. A foreign matter or a contaminant is detected by detecting a scatttered beam, of a light spot which scans the surface of a substrate. The detection of the scattered beam is carried out under the condition that Rayleigh scattering of the light spot on the light spot irradiation and reflection paths and Rayleigh scattering of the scattered beam on the scattered beam detection path are suppressed to a minimum. For the suppression of Rayleigh scattering, a low-pressure or low-temperature atmosphere may be used.

Abstract translation: 检测，分析和评估大规模生产启动期间和批量生产期间大规模生产线组成部件的各种材料，单位，工艺和环境中所含的灰尘和杂质等杂质的含量， 为了管理半导体生产过程。 包括用于在批量生产启动期间检测，分析和评估异物含量的装置的批量生产离线系统与生产线分离并独立安装。 在生产线必需的位置提供检测异物的监测器，通过各种单位对监测数据进行评估，对生产线内的异物含量进行管理，实现高效，经济的批量生产启动和批量生产。 通过STM / STS分析在大规模生产线上检测到的采样晶圆上的异物元素的种类，并将结果与​​数据库进行比较以进行识别。 通过检测扫描基板表面的光斑的光斑光束来检测异物或污染物。 在光点照射和反射路径上的光斑的瑞利散射和散射光束检测路径上的散射光束的瑞利散射被抑制到最小的条件下进行散射光束的检测。 为了抑制瑞利散射，可以使用低压或低温气氛。

公开(公告)号：US4633084A

公开(公告)日：1986-12-30

申请号：US691825

申请日：1985-01-16

Applicant: Dieter M. Gruen ,  Michael J. Pellin ,  Charles E. Young

Inventor： Dieter M. Gruen ,  Michael J. Pellin ,  Charles E. Young

IPC: H01J37/256 ,  H01J49/16 ,  G01N23/00

CPC classification number: H01J49/162 ,  H01J37/256 ,  H01J49/0463 ,  H01J49/142 ,  H01J2237/31749

Abstract: A method and apparatus are provided for trace and other quantitative analysis with high efficiency of a component in a sample, with the analysis involving the removal by ion or other bombardment of a small quantity of ion and neutral atom groups from the sample, the conversion of selected neutral atom groups to photoions by laser initiated resonance ionization spectroscopy, the selective deflection of the photoions for separation from original ion group emanating from the sample, and the detection of the photoions as a measure of the quantity of the component. In some embodiments, the original ion group is accelerated prior to the RIS step for separation purposes. Noise and other interference are reduced by shielding the detector from primary and secondary ions and deflecting the photoions sufficiently to avoid the primary and secondary ions.

Abstract translation: 提供了一种方法和装置，用于对样品中组分的高效率进行痕量和其他定量分析，分析涉及通过离子或其他轰击从样品中除去少量离子和中性原子团，转化为 选择的中性原子团通过激光引发的共振电离光谱法进行光致变色，用于与从样品发出的原始离子基团分离的光离子的选择性偏转，以及作为组分量的量度的光电离检测。 在一些实施方案中，在用于分离目的的RIS步骤之前加速原始离子组。 通过将检测器与初级和次级离子屏蔽，并充分偏转光照以避免初级和次级离子，降低了噪声和其他干扰。

公开(公告)号：US4219730A

公开(公告)日：1980-08-26

申请号：US936928

申请日：1978-08-25

Applicant: Isao Ishikawa ,  Yoshitaka Goto ,  Michiyasu Itoh

Inventor： Isao Ishikawa ,  Yoshitaka Goto ,  Michiyasu Itoh

IPC: G01N23/227 ,  G01N23/225 ,  G01Q30/02 ,  G01Q90/00 ,  G01T1/36 ,  G21K1/087 ,  H01J37/256 ,  H01J49/44 ,  H01J49/48 ,  H01J39/00

CPC classification number: H01J37/256 ,  G01N23/225 ,  G21K1/087 ,  H01J49/482

Abstract: A charged-particle energy analyzer having means for irradiating a sample with a primary electron beam, deflecting electrode means which focus charged particle flux emitted from the sample onto a center axis of the primary electron beam or onto an identical circumference with its center on the axis, a slit disposed at the focus point of the charged particles, an energy analyzer whose object point lies at the focus point, a detector for detecting the charged particles analyzed by the energy analyzer, and charged particle flux deflecting means provided between the sample and the detector, for shielding by one part of the charged particle flux focused in a true circular form, to thereby make it possible not only to set a wide accepted solid angle for signals but also to get an information as to the concave or convex surface condition of the sample at the measured portion.

Abstract translation: 一种带电粒子能量分析仪，其具有用于用一次电子束照射样品的装置，将从样品发射的带电粒子通量聚焦到一次电子束的中心轴上的偏转电极装置或与其一致的圆周上的中心在轴上的偏转电极装置 设置在带电粒子的聚焦点的狭缝，物点在焦点处的能量分析器，用于检测由能量分析器分析的带电粒子的检测器，以及设置在样品和样品之间的带电粒子通量偏转装置 检测器，用于通过以真圆形形式聚焦的一部分带电粒子通量进行屏蔽，从而不仅能够为信号设置广泛接受的立体角，而且可以获得关于凹面或凸面状况的信息 在测量部分的样品。

公开(公告)号：US3986025A

公开(公告)日：1976-10-12

申请号：US477466

申请日：1974-06-07

Applicant: Mitsuo Fujiwara ,  Hifumi Tamura ,  Toshio Kondo

Inventor： Mitsuo Fujiwara ,  Hifumi Tamura ,  Toshio Kondo

IPC: G01N23/225 ,  H01J37/252 ,  H01J37/256 ,  H01J49/30 ,  H01J49/32 ,  H01J37/26

CPC classification number: H01J49/324 ,  H01J37/256 ,  H01J49/30

Abstract: In an ion microanalyzer wherein the secondary ions emitted from a sample as a result of the bombardment of the sample by a primary ion beam are mass-analyzed and selected in accordance with their mass to electric charge ratios and the selected secondary ions are then detected by a detector, the image of the secondary ions emitted from the sample is formed through the converging action of a modified electrostatic lens on a slit disposed between the mass analyzing means and the detector or in front of the mass analyzing means.

Abstract translation: 在离子微量分析仪中，其中由于通过一次离子束轰击样品而从样品发射的二次离子根据其质量与电荷比进行质量分析和选择，然后通过以下方式检测所选择的二次离子： 检测器，通过改变的静电透镜在设置在质量分析装置和检测器之间或狭缝分析装置前面的狭缝上的会聚作用形成从样品发射的二次离子的图像。

公开(公告)号：US3878392A

公开(公告)日：1975-04-15

申请号：US42545773

申请日：1973-12-17

Applicant: ETEC CORP

Inventor： YEW NELSON C ,  LANE WYMAN C

IPC: G01N23/225 ,  H01J37/252 ,  H01J37/256 ,  G01N21/26 ,  G01N23/12

CPC classification number: H01J37/256 ,  G01N23/225

Abstract: A method and apparatus employing ion and electron beams for chemically analyzing a specimen. A specimen is mounted on a movable platform in an evacuated chamber and irradiated with an ion beam over a predetermined area of interest to liberate secondary ions. The secondary ion spectrum is analyzed with a mass filter and display unit to provide a spectral distribution. Ions having a particular mass-to-charge ratio are selected for spatial distribution analysis and the mass filter is tuned to the selected mass-to-charge ratio. The filtered beam of secondary ions passed through the mass filter is detected by an ion detector which generates a signal representative of secondary ion abundance at that mass-to-charge ratio. The ion detector output signals are used to control the intensity or deflection of a CRT beam. An independently generated electron beam is scanned over the specimen area irradiated by the ion beam and the CRT beam is swept in synchronism with the scanned electron beam. The electron beam, scanned over the ion irradiated specimen area, modulates the secondary ion yield at the point where both the electron beam and the ion beam are coincident on the specimen. The resulting display is a two dimensional spatial distribution map of the species in the specimen to which the mass filter is tuned.

Abstract translation: 一种使用离子束和电子束进行化学分析的方法和装置。 将样品安装在真空室中的可移动平台上，并在预定的感兴趣区域上用离子束照射以释放二次离子。 用质量过滤器和显示单元分析二次离子光谱以提供光谱分布。 选择具有特定质荷比的离子进行空间分布分析，并将质量过滤器调整到选定的质荷比。 通过质量过滤器的过滤的二次离子束由离子检测器检测，该离子检测器产生代表该质荷比的二次离子丰度的信号。 离子检测器输出信号用于控制CRT光束的强度或偏转。 在由离子束照射的样本区域上扫描独立生成的电子束，并且与扫描的电子束同步地扫描CRT光束。 在离子照射的样品区域上扫描的电子束在电子束和离子束在样品上重合的点处调制二次离子产率。 所得到的显示是质量过滤器调谐到的样本中物种的二维空间分布图。

公开(公告)号：US3229087A

公开(公告)日：1966-01-11

申请号：US14049361

申请日：1961-09-25

Applicant: FIRST PENNSYLVANIA BANKING AND

Inventor： LOUIS SHAPIRO

IPC: H01J37/24 ,  H01J37/244 ,  H01J37/256

CPC classification number: H01J37/24 ,  H01J37/244 ,  H01J37/256 ,  H01J2237/24485 ,  H01J2237/24507