-
公开(公告)号：US3915118A
公开(公告)日：1975-10-28
申请号：US50341274
申请日：1974-09-05
Applicant: ETEC CORP
Inventor： KOCH GEORGE R , PETERSEN CARL T
Abstract: An improved method and apparatus for facilitating specimen handling during freezing, coating and transfer to and from the main chamber of an SEM. A unique specimen shuttle manipulable by a control rod permits transfer of a specimen between the main chamber and an auxiliary air lock chamber alternatively defined by an air lock housing and a coating apparatus housing. Either housing is removably attached to an entrance flange communicating via a gate valve assembly with the main chamber and is provided with a sealable access aperture for enabling transfer of both frozen and unfrozen specimens to and from the airlock chamber. The specimen manipulator enables specimen attachment and removal from the shuttle and has a frost shield for eliminating frost formation on the specimen surface during handling after freezing. The coating apparatus has a shuttle rotating platform and a removable oscillating filament assembly for enabling deposition of a layer of electrically conductive material on the specimen surface at the SEM site. A heat conducting path provides shuttle cooling in the main chamber to maintain a frozen specimen at a low temperature. The entrance flange is coupled to a vacuum pump to permit independent evacuation and backfilling of the airlock chamber in order to eliminate main chamber pressurization during specimen transfer.
Abstract translation: 一种改进的方法和装置，用于在冷冻，涂覆和传送到SEM的主室的过程中促进样品处理。 通过控制棒可操作的独特的试样梭可以允许样品在主室和辅助空气锁定室之间传输，该辅助气锁室由气锁壳体和涂覆装置壳体交替地限定。 任一壳体可移除地连接到通过闸阀组件与主室连通的入口凸缘，并且设置有可密封的进入孔，用于使冷冻和未冷冻的样品能够从气锁室传递到冷气室。 样品机械手能够使试样从梭中附着和移除，并具有防冻护罩，用于在冷冻后的处理期间消除样品表面上的霜冻。 涂覆装置具有穿梭旋转平台和可移除的振荡丝组件，用于使得能够在SEM位置处将一层导电材料沉积在样品表面上。 导热路径在主室中提供穿梭冷却，以将冷冻样品保持在低温。 入口法兰联接到真空泵，以允许气密室的独立排空和回填，以便在样品转移期间消除主室加压。
-
2.发明授权
公开(公告)号：US3886305A
公开(公告)日：1975-05-27
申请号：US24707272
申请日：1972-04-24
Applicant: ETEC CORP
Inventor： YEW NELSON C , COLBY DAVID H
CPC classification number: H01J37/28
Abstract: A scanning electron microscope in which the contrast and the dark level of the video signal is automatically controlled. Specifically, the peak-to-peak video signal level or contrast is detected and compared with a reference signal. The difference signal therebetween is employed to control the gain imparted to the video signal and to thereby automatically control the video signal contrast. Similarly, the dark level is detected and compared with a reference signal. The difference signal therebetween is employed to bias the video signal and thereby automatically control the dark level of the video signal.
Abstract translation: 其中视频信号的对比度和暗电平被自动控制的扫描电子显微镜。 具体地，检测峰 - 峰视频信号电平或对比度并将其与参考信号进行比较。 它们之间的差分信号用于控制赋予视频信号的增益，从而自动控制视频信号对比度。 类似地，检测暗电平并与参考信号进行比较。 它们之间的差分信号用于偏移视频信号，从而自动控制视频信号的暗电平。
-
Patent Agency Ranking
公开(公告)号：US3711711A
公开(公告)日：1973-01-16
申请号：US3711711D
申请日：1970-11-09
Applicant: ETEC CORP
IPC: H01J37/147 , H01J37/28 , H01J37/26
CPC classification number: H01J37/1475 , H01J37/28
Abstract: A scanning system for scanning electron microscopes in which the electron beams of the electron-optical column and the cathode ray tube are deflected in response to the number of electrons collected, the amplitude of the cathode ray tube beam being maintained constant. This may be accomplished by amplifying and integrating the collected electrons, and appropriately controlling the deflection of the electron beams in response thereto. Accordingly, the scanning system provides synchronous velocity modulation of the electron beams of the cathode ray tube and the electron-optical column.
Abstract translation: 用于扫描电子显微镜的扫描系统，其中电子 - 光学列和阴极射线管的电子束响应于所收集的电子数量而偏转，阴极射线管束的振幅保持恒定。 这可以通过放大和积分所收集的电子并且适当地控制响应于此的电子束的偏转来实现。 因此，扫描系统提供阴极射线管和电子 - 光学柱的电子束的同步速度调制。
-
公开(公告)号：US3878392A
公开(公告)日：1975-04-15
申请号：US42545773
申请日：1973-12-17
Applicant: ETEC CORP
Inventor： YEW NELSON C , LANE WYMAN C
IPC: G01N23/225 , H01J37/252 , H01J37/256 , G01N21/26 , G01N23/12
CPC classification number: H01J37/256 , G01N23/225
Abstract: A method and apparatus employing ion and electron beams for chemically analyzing a specimen. A specimen is mounted on a movable platform in an evacuated chamber and irradiated with an ion beam over a predetermined area of interest to liberate secondary ions. The secondary ion spectrum is analyzed with a mass filter and display unit to provide a spectral distribution. Ions having a particular mass-to-charge ratio are selected for spatial distribution analysis and the mass filter is tuned to the selected mass-to-charge ratio. The filtered beam of secondary ions passed through the mass filter is detected by an ion detector which generates a signal representative of secondary ion abundance at that mass-to-charge ratio. The ion detector output signals are used to control the intensity or deflection of a CRT beam. An independently generated electron beam is scanned over the specimen area irradiated by the ion beam and the CRT beam is swept in synchronism with the scanned electron beam. The electron beam, scanned over the ion irradiated specimen area, modulates the secondary ion yield at the point where both the electron beam and the ion beam are coincident on the specimen. The resulting display is a two dimensional spatial distribution map of the species in the specimen to which the mass filter is tuned.
Abstract translation: 一种使用离子束和电子束进行化学分析的方法和装置。 将样品安装在真空室中的可移动平台上，并在预定的感兴趣区域上用离子束照射以释放二次离子。 用质量过滤器和显示单元分析二次离子光谱以提供光谱分布。 选择具有特定质荷比的离子进行空间分布分析，并将质量过滤器调整到选定的质荷比。 通过质量过滤器的过滤的二次离子束由离子检测器检测，该离子检测器产生代表该质荷比的二次离子丰度的信号。 离子检测器输出信号用于控制CRT光束的强度或偏转。 在由离子束照射的样本区域上扫描独立生成的电子束，并且与扫描的电子束同步地扫描CRT光束。 在离子照射的样品区域上扫描的电子束在电子束和离子束在样品上重合的点处调制二次离子产率。 所得到的显示是质量过滤器调谐到的样本中物种的二维空间分布图。
-
公开(公告)号：US3858049A
公开(公告)日：1974-12-31
申请号：US39810173
申请日：1973-09-17
Applicant: ETEC CORP
Inventor： KOCH G , PETERSEN C
Abstract: An improved method and apparatus for facilitating specimen handling during freezing, coating and transfer to and from the main chamber of an SEM. A unique specimen shuttle manipulable by a control rod permits transfer of a specimen between the main chamber and an auxiliary air lock chamber alternatively defined by an air lock housing and a coating apparatus housing. Either housing is removably attached to an entrance flange communicating via a gate valve assembly with the main chamber and is provided with a sealable access aperture for enabling transfer of both frozen and unfrozen specimens to and from the airlock chamber. The specimen manipulator enables specimen attachment and removal from the shuttle and has a frost shield for eliminating frost formation on the specimen surface during handling after freezing. The coating apparatus has a shuttle rotating platform and a removable oscillating filament assembly for enabling deposition of a layer of electrically conductive material on the specimen surface at the SEM site. A heat conducting path provides shuttle cooling in the main chamber to maintain a frozen specimen at a low temperature. The entrance flange is coupled to a vacuum pump to permit independent evacuation and backfilling of the airlock chamber in order to eliminate main chamber pressurization during specimen transfer.
Abstract translation: 一种改进的方法和装置，用于在冷冻，涂覆和传送到SEM的主室的过程中促进样品处理。 通过控制棒可操作的独特的试样梭可以允许样品在主室和辅助空气锁定室之间传输，该辅助气锁室由气锁壳体和涂覆装置壳体交替地限定。 任一壳体可移除地连接到通过闸阀组件与主室连通的入口凸缘，并且设置有可密封的进入孔，用于使冷冻和未冷冻的样品能够从气锁室传递到冷气室。 样品机械手能够使试样从梭中附着和移除，并具有防冻护罩，用于在冷冻后的处理期间消除样品表面上的霜冻。 涂覆装置具有穿梭旋转平台和可移除的振荡丝组件，用于使得能够在SEM位置处将一层导电材料沉积在样品表面上。 导热路径在主室中提供穿梭冷却，以将冷冻样品保持在低温。 入口法兰联接到真空泵，以允许气密室的独立排空和回填，以便在样品转移期间消除主室加压。
-
公开(公告)号：US3676670A
公开(公告)日：1972-07-11
申请号：US3676670D
申请日：1970-10-09
Applicant: ETEC CORP
Inventor： DAO JAMES , YEW NELSON C
CPC classification number: H01J37/243
Abstract: An electron gun biasing system, particularly adapted for use in an electron microscope, in which a plurality of resistors are provided in series with the cathode of the electron gun. In parallel with each of the resistors is a photoconductor, and means are provided for selectively illuminating the various photoconductors so as to short out various resistors, and thus vary the bias. Typically, the resistors and photoconductors may be located inside a shielded box, and a plurality of light pipes may be directed through openings in the shielded box, so that the ends of the light pipes will be adjacent the photoconductors. A plurality of lamps may then be disposed at the ends of the light pipes outside the box, the lamps being selectively illuminated by a simple lamp illumination circuit.
Abstract translation: 一种特别适用于电子显微镜的电子枪偏压系统，其中多个电阻器与电子枪的阴极串联设置。 与每个电阻器并联的是光电导体，并且提供用于选择性地照射各种光电导体以便短路各种电阻器并因此改变偏压的装置。 通常，电阻器和感光体可以位于屏蔽箱内，并且多个光管可以被引导通过屏蔽箱中的开口，使得光管的端部将与光电导体相邻。 然后，多个灯可以设置在盒外的光管的端部，灯被选择性地由简单的灯照明电路照明。
-
公开(公告)号：US3787696A
公开(公告)日：1974-01-22
申请号：US3787696D
申请日：1972-03-15
Applicant: ETEC CORP
Abstract: A scanning electron microscope in which the electron-optical column is formed by a plurality of magnetic coils disposed around a removable tube, an electron beam being directed axially through the tube. The tube is suitably sealed at respective ends to the electron gun and specimen-containing portions of the electronoptical column, and thus functions to contain the vacuum thereon. Preferably, the tube comprises a thin, non-magnetic stainless steel tube having a wall thickness of less than 10 mils, to prevent electrostatic charging while minimizing eddy current losses. Alternatively, the tube may comprise a thin metallic layer or inner tube within an insulating, reinforcing outer tube, to impart strength and rigidity to the tube structure.
Abstract translation: 扫描电子显微镜，其中电子 - 光学柱由设置在可移除管周围的多个磁性线圈形成，电子束轴向地穿过管。 该管适当地密封在电子枪的电子枪和含有试样的部分的各个端部处，因此用于在其上容纳真空。 优选地，管包括壁厚小于10密耳的薄的非磁性不锈钢管，以防止静电充电同时使涡流损耗最小化。 或者，管可以包括在绝缘加强外管内的薄金属层或内管，以赋予管结构强度和刚性。
-
-
-
-
-
-
Search Results
7
records
(took 0.01 seconds)
