公开(公告)号：US3858049A

公开(公告)日：1974-12-31

申请号：US39810173

申请日：1973-09-17

Applicant: ETEC CORP

Inventor： KOCH G ,  PETERSEN C

IPC: H01J37/18 ,  H01J37/20

CPC classification number: H01J37/20 ,  H01J37/18

Abstract: An improved method and apparatus for facilitating specimen handling during freezing, coating and transfer to and from the main chamber of an SEM. A unique specimen shuttle manipulable by a control rod permits transfer of a specimen between the main chamber and an auxiliary air lock chamber alternatively defined by an air lock housing and a coating apparatus housing. Either housing is removably attached to an entrance flange communicating via a gate valve assembly with the main chamber and is provided with a sealable access aperture for enabling transfer of both frozen and unfrozen specimens to and from the airlock chamber. The specimen manipulator enables specimen attachment and removal from the shuttle and has a frost shield for eliminating frost formation on the specimen surface during handling after freezing. The coating apparatus has a shuttle rotating platform and a removable oscillating filament assembly for enabling deposition of a layer of electrically conductive material on the specimen surface at the SEM site. A heat conducting path provides shuttle cooling in the main chamber to maintain a frozen specimen at a low temperature. The entrance flange is coupled to a vacuum pump to permit independent evacuation and backfilling of the airlock chamber in order to eliminate main chamber pressurization during specimen transfer.

Abstract translation: 一种改进的方法和装置，用于在冷冻，涂覆和传送到SEM的主室的过程中促进样品处理。 通过控制棒可操作的独特的试样梭可以允许样品在主室和辅助空气锁定室之间传输，该辅助气锁室由气锁壳体和涂覆装置壳体交替地限定。 任一壳体可移除地连接到通过闸阀组件与主室连通的入口凸缘，并且设置有可密封的进入孔，用于使冷冻和未冷冻的样品能够从气锁室传递到冷气室。 样品机械手能够使试样从梭中附着和移除，并具有防冻护罩，用于在冷冻后的处理期间消除样品表面上的霜冻。 涂覆装置具有穿梭旋转平台和可移除的振荡丝组件，用于使得能够在SEM位置处将一层导电材料沉积在样品表面上。 导热路径在主室中提供穿梭冷却，以将冷冻样品保持在低温。 入口法兰联接到真空泵，以允许气密室的独立排空和回填，以便在样品转移期间消除主室加压。