公开(公告)号：US3886305A

公开(公告)日：1975-05-27

申请号：US24707272

申请日：1972-04-24

Applicant: ETEC CORP

Inventor： YEW NELSON C ,  COLBY DAVID H

IPC: H01J37/22 ,  G01Q30/00 ,  H01J37/28 ,  H04N5/57 ,  H04N7/18

CPC classification number: H01J37/28

Abstract: A scanning electron microscope in which the contrast and the dark level of the video signal is automatically controlled. Specifically, the peak-to-peak video signal level or contrast is detected and compared with a reference signal. The difference signal therebetween is employed to control the gain imparted to the video signal and to thereby automatically control the video signal contrast. Similarly, the dark level is detected and compared with a reference signal. The difference signal therebetween is employed to bias the video signal and thereby automatically control the dark level of the video signal.

Abstract translation: 其中视频信号的对比度和暗电平被自动控制的扫描电子显微镜。 具体地，检测峰 - 峰视频信号电平或对比度并将其与参考信号进行比较。 它们之间的差分信号用于控制赋予视频信号的增益，从而自动控制视频信号对比度。 类似地，检测暗电平并与参考信号进行比较。 它们之间的差分信号用于偏移视频信号，从而自动控制视频信号的暗电平。

公开(公告)号：US3878392A

公开(公告)日：1975-04-15

申请号：US42545773

申请日：1973-12-17

Applicant: ETEC CORP

Inventor： YEW NELSON C ,  LANE WYMAN C

IPC: G01N23/225 ,  H01J37/252 ,  H01J37/256 ,  G01N21/26 ,  G01N23/12

CPC classification number: H01J37/256 ,  G01N23/225

Abstract: A method and apparatus employing ion and electron beams for chemically analyzing a specimen. A specimen is mounted on a movable platform in an evacuated chamber and irradiated with an ion beam over a predetermined area of interest to liberate secondary ions. The secondary ion spectrum is analyzed with a mass filter and display unit to provide a spectral distribution. Ions having a particular mass-to-charge ratio are selected for spatial distribution analysis and the mass filter is tuned to the selected mass-to-charge ratio. The filtered beam of secondary ions passed through the mass filter is detected by an ion detector which generates a signal representative of secondary ion abundance at that mass-to-charge ratio. The ion detector output signals are used to control the intensity or deflection of a CRT beam. An independently generated electron beam is scanned over the specimen area irradiated by the ion beam and the CRT beam is swept in synchronism with the scanned electron beam. The electron beam, scanned over the ion irradiated specimen area, modulates the secondary ion yield at the point where both the electron beam and the ion beam are coincident on the specimen. The resulting display is a two dimensional spatial distribution map of the species in the specimen to which the mass filter is tuned.

Abstract translation: 一种使用离子束和电子束进行化学分析的方法和装置。 将样品安装在真空室中的可移动平台上，并在预定的感兴趣区域上用离子束照射以释放二次离子。 用质量过滤器和显示单元分析二次离子光谱以提供光谱分布。 选择具有特定质荷比的离子进行空间分布分析，并将质量过滤器调整到选定的质荷比。 通过质量过滤器的过滤的二次离子束由离子检测器检测，该离子检测器产生代表该质荷比的二次离子丰度的信号。 离子检测器输出信号用于控制CRT光束的强度或偏转。 在由离子束照射的样本区域上扫描独立生成的电子束，并且与扫描的电子束同步地扫描CRT光束。 在离子照射的样品区域上扫描的电子束在电子束和离子束在样品上重合的点处调制二次离子产率。 所得到的显示是质量过滤器调谐到的样本中物种的二维空间分布图。

公开(公告)号：US3676670A

公开(公告)日：1972-07-11

申请号：US3676670D

申请日：1970-10-09

Applicant: ETEC CORP

Inventor： DAO JAMES ,  YEW NELSON C

IPC: H01J37/24 ,  H01J37/26 ,  G01N23/00

CPC classification number: H01J37/243

Abstract: An electron gun biasing system, particularly adapted for use in an electron microscope, in which a plurality of resistors are provided in series with the cathode of the electron gun. In parallel with each of the resistors is a photoconductor, and means are provided for selectively illuminating the various photoconductors so as to short out various resistors, and thus vary the bias. Typically, the resistors and photoconductors may be located inside a shielded box, and a plurality of light pipes may be directed through openings in the shielded box, so that the ends of the light pipes will be adjacent the photoconductors. A plurality of lamps may then be disposed at the ends of the light pipes outside the box, the lamps being selectively illuminated by a simple lamp illumination circuit.

Abstract translation: 一种特别适用于电子显微镜的电子枪偏压系统，其中多个电阻器与电子枪的阴极串联设置。 与每个电阻器并联的是光电导体，并且提供用于选择性地照射各种光电导体以便短路各种电阻器并因此改变偏压的装置。 通常，电阻器和感光体可以位于屏蔽箱内，并且多个光管可以被引导通过屏蔽箱中的开口，使得光管的端部将与光电导体相邻。 然后，多个灯可以设置在盒外的光管的端部，灯被选择性地由简单的灯照明电路照明。