Invention Grant
- Patent Title: Specimen coating device for an SEM
- Patent Title (中): 用于SEM的试样涂布装置
-
Application No.: US50341274Application Date: 1974-09-05
-
Publication No.: US3915118APublication Date: 1975-10-28
- Inventor: KOCH GEORGE R , PETERSEN CARL T
- Applicant: ETEC CORP
- Assignee: Etec Corp
- Current Assignee: Etec Corp
- Priority: US50341274 1974-09-05; US39810173 1973-09-17
- Main IPC: C23C14/22
- IPC: C23C14/22 ; H01J37/18 ; H01J37/20 ; C23C13/08
Abstract:
An improved method and apparatus for facilitating specimen handling during freezing, coating and transfer to and from the main chamber of an SEM. A unique specimen shuttle manipulable by a control rod permits transfer of a specimen between the main chamber and an auxiliary air lock chamber alternatively defined by an air lock housing and a coating apparatus housing. Either housing is removably attached to an entrance flange communicating via a gate valve assembly with the main chamber and is provided with a sealable access aperture for enabling transfer of both frozen and unfrozen specimens to and from the airlock chamber. The specimen manipulator enables specimen attachment and removal from the shuttle and has a frost shield for eliminating frost formation on the specimen surface during handling after freezing. The coating apparatus has a shuttle rotating platform and a removable oscillating filament assembly for enabling deposition of a layer of electrically conductive material on the specimen surface at the SEM site. A heat conducting path provides shuttle cooling in the main chamber to maintain a frozen specimen at a low temperature. The entrance flange is coupled to a vacuum pump to permit independent evacuation and backfilling of the airlock chamber in order to eliminate main chamber pressurization during specimen transfer.
Information query
IPC分类: