公开(公告)号：US3986025A

公开(公告)日：1976-10-12

申请号：US477466

申请日：1974-06-07

Applicant: Mitsuo Fujiwara ,  Hifumi Tamura ,  Toshio Kondo

Inventor： Mitsuo Fujiwara ,  Hifumi Tamura ,  Toshio Kondo

IPC: G01N23/225 ,  H01J37/252 ,  H01J37/256 ,  H01J49/30 ,  H01J49/32 ,  H01J37/26

CPC classification number: H01J49/324 ,  H01J37/256 ,  H01J49/30

Abstract: In an ion microanalyzer wherein the secondary ions emitted from a sample as a result of the bombardment of the sample by a primary ion beam are mass-analyzed and selected in accordance with their mass to electric charge ratios and the selected secondary ions are then detected by a detector, the image of the secondary ions emitted from the sample is formed through the converging action of a modified electrostatic lens on a slit disposed between the mass analyzing means and the detector or in front of the mass analyzing means.

Abstract translation: 在离子微量分析仪中，其中由于通过一次离子束轰击样品而从样品发射的二次离子根据其质量与电荷比进行质量分析和选择，然后通过以下方式检测所选择的二次离子： 检测器，通过改变的静电透镜在设置在质量分析装置和检测器之间或狭缝分析装置前面的狭缝上的会聚作用形成从样品发射的二次离子的图像。