METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE SAME

    公开(公告)号:US20240363494A1

    公开(公告)日:2024-10-31

    申请号:US18765069

    申请日:2024-07-05

    发明人: LIANG-PIN CHOU

    摘要: The present disclosure provides a semiconductor device. The semiconductor device includes a die stack, an intervening bonding layer, and a carrier structure. The intervening bonding layer is positioned on the die stack. The carrier structure is disposed on the intervening bonding layer opposite to the die stack. The carrier structure includes a heat dissipation unit configured to transfer heat generated from the die stack. The heat dissipation unit includes composite vias and conductive plates. Each of the composite vias includes a first through semiconductor via and a second through semiconductor via. The conductive plates are couple to the composite vias.

    SEMICONDUCTOR DEVICE AND ELECTRONIC SYSTEM
    8.
    发明公开

    公开(公告)号:US20240357825A1

    公开(公告)日:2024-10-24

    申请号:US18760980

    申请日:2024-07-01

    IPC分类号: H10B43/50 H01L23/48 H10B43/27

    摘要: A semiconductor device includes a lower structure including a peripheral circuit, a lower insulating structure covering the peripheral circuit, and a pattern structure on the lower insulating structure; a stack structure including interlayer insulating layers and horizontal layers alternately stacked on the lower structure, wherein the horizontal layers include gate horizontal layers in a gate region of the stack structure and first insulating horizontal layers in a first insulating region of the stack structure; a memory vertical structure including a portion penetrating the gate horizontal layers; dummy vertical structures including a portion penetrating the gate horizontal layers; a first peripheral contact plug including a portion penetrating the first insulating region; and gate contact plugs on gate pads of the gate horizontal layers, wherein upper surface of the gate contact plugs and the first peripheral contact plugs are coplanar with each other, wherein the memory vertical structure and the dummy vertical structure are contacting the pattern structure, and wherein at least one of the dummy vertical structures extend further into the pattern structure than the memory vertical structure in a downward direction.