公开(公告)号：US4532888A

公开(公告)日：1985-08-06

申请号：US518473

申请日：1983-07-29

申请人： Manfred Neumann ,  Henry Morgner ,  Harry Forster ,  Gunter Jasch ,  Wilfried Kunack ,  Martin Godenschweg ,  Peter Unganz

发明人： Manfred Neumann ,  Henry Morgner ,  Harry Forster ,  Gunter Jasch ,  Wilfried Kunack ,  Martin Godenschweg ,  Peter Unganz

IPC分类号： C23C14/30 ,  H01J37/305 ,  C23C13/12

CPC分类号： H01J37/3053 ,  C23C14/30

摘要： Electron-beam (EB) coating of broad strips with improved film quality, and without undue scattering and deflection of the electron beam at long beam paths is accomplished with a shielding mantle, placed between the EB gun and the evaporation crucible, providing vacuum-tight shielding of the beam path from the coating chamber.

摘要翻译： 电子束（EB）涂层具有改善的膜质量，并且在长波束路径下电子束没有不适当的散射和偏转的情况下，用放置在EB喷枪和蒸发坩埚之间的屏蔽罩实现真空密封 光束路径与涂层室的屏蔽。

公开(公告)号：US4359493A

公开(公告)日：1982-11-16

申请号：US74581

申请日：1979-09-12

申请人： Vern A. Henery

发明人： Vern A. Henery

IPC分类号： C23C16/448 ,  C23C16/453 ,  C23C11/00 ,  C23C13/12

CPC分类号： C23C16/453 ,  C23C16/4481 ,  Y10S118/05

摘要： A method is disclosed for fluidizing and vaporizing particulate solid coating reactants by establishing a fluidized bed of dispersed particulate solid coating reactants, drawing a volume of fluidizing gas and suspended particulate solid coating reactant into a vaporizer while mixing an additional volume of gas therewith, and vaporizing the dispersed particulate solid coating reactant in the reactant gas mixture. The vaporized coating reactant may then be directed into contact with a substrate to be coated in order to deposit a film thereon.

摘要翻译： 公开了一种通过建立分散的颗粒状固体涂层反应物的流化床，将一定体积的流化气体和悬浮的颗粒状固体涂料反应物吸入蒸发器同时与其混合附加体积的气体，并蒸发 反应物气体混合物中分散的颗粒固体涂料反应物。 然后，蒸发的涂层反应物可以被引导与待涂覆的基底接触以便在其上沉积膜。

公开(公告)号：US4328763A

公开(公告)日：1982-05-11

申请号：US145632

申请日：1980-05-01

申请人： Peter Sommerkamp ,  Walter Heil

发明人： Peter Sommerkamp ,  Walter Heil

IPC分类号： C23C14/24 ,  C23C14/30 ,  C23C13/12

CPC分类号： C23C14/24 ,  C23C14/30

摘要： A vaporizer for vacuum deposition installations has at least one crucible and a plurality of crucible-receiving recesses movable into a vaporizing position, a vapor-conducting device and a shutter for interrupting the flow of vapor. The vaporizer is capable of enabling a plurality of different substances to be vaporized in succession without mutual contamination by providing the vapor-conducting device wherein the device has a plurality of vapor screens which can be individually set down at the edges of the crucible-receiving recesses by relative movement between the vapor-conducting device and the crucible. The shutters have a plurality of lobes which can be individually moved over the particular vapor screen located in the vaporizing position. The drives associated with the vapor-conducting device and shutter are interconnected such that the same vapor screen and the same shutter lobe are always associated with a particular crucible-receiving recess.

摘要翻译： 用于真空沉积装置的蒸发器具有至少一个坩埚和可移动到蒸发位置的多个坩埚接收凹部，用于中断蒸汽流动的蒸气传导装置和快门。 蒸发器能够通过提供蒸汽传导装置使多个不同物质相继蒸发而不会相互污染，其中该装置具有多个蒸气筛，该蒸气屏可在坩埚接收凹槽的边缘处分别放下 通过蒸气传导装置和坩埚之间的相对运动。 百叶窗具有多个叶片，其可以单独地移动到位于蒸发位置的特定蒸气筛上。 与蒸汽传导装置和快门相关联的驱动器互连，使得相同的蒸气屏幕和相同的快门叶片总是与特定的坩埚容纳凹槽相关联。

公开(公告)号：US4323031A

公开(公告)日：1982-04-06

申请号：US194560

申请日：1980-10-06

申请人： Alan Kaplan

发明人： Alan Kaplan

IPC分类号： C23C14/04 ,  C23C14/54 ,  C30B33/00 ,  C23C13/08 ,  C23C13/12

CPC分类号： C23C14/042 ,  C23C14/54 ,  C23C14/546 ,  C30B33/00

摘要： A crystal plating device and method thereof in which a crystal to be plated and thereby set at a desired frequency is placed in an external removable holder or slug for insertion into a chamber of a plating device. The device is connected to a vacuum pump which is activated after the slug is loaded. Spring loaded filament posts carry a filament of precious metal such as gold or silver. The crystal is oscillated at a predetermined frequency prior to the filament being energized to evaporate or atomize the metal which plates the crystal and sets it frequency identical to that of the oscillator.The slug is externally loaded and can carry different size crystals. It is fitted with masks to accurately direct the deposit of the metal upon either or both sides of the crystal. After plating the slug is easily removed from the plating device.

摘要翻译： 一种晶体电镀装置及其方法，其中将待镀层的晶体设置为期望的频率放置在外部可移除的保持器或块中，以插入电镀装置的腔室中。 设备连接到真空泵，在真空泵装载后，该真空泵被激活。 弹簧加载的细丝柱带有贵金属丝如金或银。 在灯丝通电之前，晶体以预定的频率振荡，以蒸发或雾化沉积晶体的金属并将其设置为与振荡器的频率相同。 子弹是外部装载的，可以携带不同大小的晶体。 它配有面罩，以精确地将金属沉积物引导到晶体的两面或两面。 电镀后，容易从电镀装置中取出芯块。

公开(公告)号：US4303694A

公开(公告)日：1981-12-01

申请号：US145727

申请日：1980-05-01

申请人： Daniel Bois

发明人： Daniel Bois

IPC分类号： C23C14/30 ,  H01J37/305 ,  C23C13/12

CPC分类号： H01J37/3053 ,  C23C14/30

摘要： A method and device for depositing through vacuum evaporation. In a first step of said method, and in order to deposit a material on the substrates, the latter is placed in a vacuum enclosure opposite a target of the said material then the target is bombarded by means of an electron-beam; in the subsequent steps, the said beam is modulated and a screen opaque to X-rays is moved between the target and the substrate in synchronism with said modulation, in such manner that said screen be permanently placed between said substrates and the target impact area, and that said substrates be directly seen only from those areas of the target that have just been bombarded.

摘要翻译： 一种通过真空蒸发沉积的方法和装置。 在所述方法的第一步骤中，为了将材料沉积在基板上，将后者放置在与所述材料的靶材相对的真空外壳中，然后通过电子束轰击靶材; 在随后的步骤中，所述光束被调制，并且对于X射线不透明的屏幕与所述调制同步地在目标和衬底之间移动，使得所述屏幕被永久地放置在所述衬底和目标冲击区域之间， 并且所述底物只能直接从刚被轰炸的目标区域看到。

公开(公告)号：US4290384A

公开(公告)日：1981-09-22

申请号：US135042

申请日：1980-03-28

申请人： Christopher P. Ausschnitt ,  David A. Huchital

发明人： Christopher P. Ausschnitt ,  David A. Huchital

IPC分类号： G03F7/16 ,  C23C13/04 ,  C23C13/12

CPC分类号： G03F7/167

摘要： An apparatus and method for coating a substrate with a thin film of material. The coating material is converted to a mist by means of an ultrasonic nebulizer and transported by a carrier gas to a chamber which contains the substrate where the mist is allowed to settle onto the substrate under the force of gravity. Sonic means are also provided to increase the settling rate of the mist droplets to lessen the settling time. Means are also provided to maintain the volume and concentration of the coating material in the nebulizer chamber over successive coatings.

摘要翻译： 一种用薄膜材料涂覆基板的设备和方法。 涂料通过超声波雾化器转化成雾状，并通过载气输送到包含基板的室中，在该室内允许雾在重力作用下沉积到基板上。 还提供声波装置以增加雾滴的沉降速率以减少沉降时间。 还提供了用于将喷雾器室中的涂层材料的体积和浓度保持在连续涂层上的手段。

公开(公告)号：US4286545A

公开(公告)日：1981-09-01

申请号：US80219

申请日：1979-10-01

申请人： Toshinori Takagi ,  Kiyoshi Morimoto ,  Hiroshi Watanabe

发明人： Toshinori Takagi ,  Kiyoshi Morimoto ,  Hiroshi Watanabe

IPC分类号： C01G15/00 ,  B01J12/00 ,  B01J12/02 ,  C23C14/06 ,  C23C14/22 ,  C23C14/24 ,  C23C14/32 ,  C30B23/02 ,  C30B23/08 ,  C30B25/06 ,  H01L21/203 ,  C23C13/12

CPC分类号： C23C14/228 ,  C23C14/221 ,  C23C14/24 ,  C23C14/243 ,  C30B23/02 ,  C30B23/08 ,  Y10S148/006 ,  Y10S148/045 ,  Y10S148/064 ,  Y10S148/065 ,  Y10S148/072 ,  Y10S148/169 ,  Y10S438/935 ,  Y10S438/961 ,  Y10S438/971

摘要： A method of producing compounds which comprises the steps of separately vaporizing a plurality of substances containing the component elements of a desired compound and placed in a plurality of crucibles to form vapors of the substances, mixing the vapors in a heated mixing chamber to form a mixed vapor, jetting the mixed vapor into a vacuum region to form clusters, ionizing the clusters to form cluster ions, and accelerating the cluster ions to make them impinge on a substrate.An apparatus for producing compounds which comprises a plurality of crucibles for separately vaporizing substances containing the component elements of a desired compound to form vapors of the substances, a mixing chamber for heating and mixing the vapors introduced therein to form a mixed vapor, the mixing chamber having at least one injection hole for jetting the mixed vapor into a vacuum region, communication pipes for connecting the mixing chamber to the crucibles, an ionization chamber for ionizing clusters produced from the mixed vapor jetted from the mixing chamber, means for accelerating cluster ions produced in the ionization chamber and making them impinge on a substrate, and a substrate holder for holding the substrate.

摘要翻译： 一种制备化合物的方法，其包括以下步骤：将含有所需化合物的组分元素的多种物质分开蒸发并放置在多个坩埚中以形成物质的蒸气，将蒸气混合在加热的混合室中以形成混合 蒸汽，将混合的蒸气喷射到真空区域中以形成团簇，使簇离子形成簇离子，并加速团簇离子使其碰撞在基底上。 一种用于生产化合物的装置，包括用于分别蒸发含有所需化合物的组分元素的物质的坩埚以形成物质的蒸气;混合室，用于加热和混合引入其中的蒸气以形成混合蒸气;混合室 具有用于将混合蒸气喷射到真空区域中的至少一个喷射孔，用于将混合室连接到坩埚的连通管，用于从由混合室喷射的混合蒸气产生的离子簇的离子化室，用于加速产生的簇离子的装置 在电离室中并使其撞击在基板上，以及用于保持基板的基板支架。

公开(公告)号：US4029045A

公开(公告)日：1977-06-14

申请号：US671294

申请日：1976-03-29

申请人： Dennis E. Cielaszyk ,  Andrew J. Meyer

发明人： Dennis E. Cielaszyk ,  Andrew J. Meyer

IPC分类号： B01J2/00 ,  C23C14/22 ,  H05H1/22 ,  C23C13/12

CPC分类号： C23C14/223 ,  B01J2/006 ,  C23C14/22 ,  G21B1/19 ,  B22F2998/00 ,  Y02E30/16 ,  Y10S376/916

摘要： An apparatus for applying coatings to very small objects which includes levitating the objects in an environment established for vapor deposition or sputtering in such a way that a uniform coating can be applied. The design includes a permanent magnet and a retaining diaphragm together with a variable frequency oscillator and amplifier to achieve vibrations of the diaphragm during the coating operation in such magnitude as to keep the selected particles suspended above the diaphragm to expose the entire surface to the coating being applied.

摘要翻译： 一种用于将涂层施加到非常小的物体上的装置，其包括在建立用于气相沉积或溅射的环境中悬浮物体，使得能够施加均匀的涂层。 该设计包括永磁体和保持膜以及可变频率振荡器和放大器，以在涂覆操作期间实现振膜的振动，使得将选定的颗粒悬浮在隔膜上方以将整个表面暴露于涂层 应用。

公开(公告)号：US3989004A

公开(公告)日：1976-11-02

申请号：US661791

申请日：1976-02-26

申请人： Addison B. Scholes

发明人： Addison B. Scholes

IPC分类号： C03C17/00 ,  C23C13/12

CPC分类号： C03C17/005

摘要： This invention pertains to apparatus for coating vitreous surfaces, advantageously precoated with a metal oxide, including a continuous treating chamber exposing the vitreous surfaces to the chemically unchanged vapor of a coating composition, particularly fatty acids, and also including heaters, vaporizers and fans in a special type of hooded enclosure for continuous recirculation of the coating composition to accomplish the method.

摘要翻译： 本发明涉及用于涂覆玻璃体表面的设备，其有利地预涂有金属氧化物，包括将玻璃表面暴露于涂料组合物，特别是脂肪酸的化学不变蒸气的连续处理室，并且还包括加热器，蒸发器和风扇 特殊类型的连帽外壳，用于连续再循环涂料组合物以实现该方法。

公开(公告)号：US3980044A

公开(公告)日：1976-09-14

申请号：US552215

申请日：1975-02-24

申请人： Erich Zollinger

发明人： Erich Zollinger

IPC分类号： C23C14/00 ,  C23C14/32 ,  H01J37/32 ,  C23C13/12

CPC分类号： H01J37/32422 ,  C23C14/0021 ,  C23C14/32

摘要： An apparatus for depositing thin coatings by vaporization onto substrates under the simultaneous action of an ionized gas comprises a gas chamber which is subdivided into first and second compartments which are connected to each other through a gas flow restrictor. The first compartment has a gas discharge electrode and has a connection to a supply line for the gas to be ionized. The second compartment contains a counterelectrode, an evaporator and means for holding the objects to be coated and is also connected to a pump to maintain a pressured gradient between the two compartments during vaporization.

摘要翻译： 一种用于在电离气体同时作用下通过汽化将薄涂层沉积到衬底上的装置包括一个气室，它被细分成通过气体流量限制器相互连接的第一和第二隔室。 第一隔室具有气体放电电极，并且具有与待离子化气体的供应管线的连接。 第二隔室包含反电极，蒸发器和用于保持待涂覆物体的装置，并且还连接到泵以在蒸发期间保持两个室之间的加压梯度。