公开(公告)号：US4061871A

公开(公告)日：1977-12-06

申请号：US681634

申请日：1976-04-29

申请人： Peter Sommerkamp ,  Walter Heil

发明人： Peter Sommerkamp ,  Walter Heil

IPC分类号： H01J3/02 ,  C23C14/30 ,  H01J37/06 ,  H01J37/063 ,  H01J37/30 ,  H01J37/305 ,  H05B7/18

CPC分类号： H01J37/305 ,  H01J37/063

摘要： Electron gun for heating, melting and vaporizing purposes having an electron-emitting cathode, at least one beam-forming electrode associated with the cathode, an accelerating anode, an electromagnetic lens and a beam guiding-tube extending in the direction of the beam path and surrounded by an electromagnetic deflection system for the x-axis deflection and one for the y-axis deflection. An envelope tube is disposed outside of the deflection systems and is joined at its extremity to the end of the beam guiding tube by an end plate through which the pole shoes of the x-axis deflection system are brought. The end plate is inclined towards the cathode beginning from the pole shoes of the x-axis deflection system.

摘要翻译： 用于加热，熔化和汽化目的的电子枪具有电子发射阴极，至少一个与阴极相关的光束形成电极，加速阳极，电磁透镜和沿光束路径的方向延伸的光束引导管，以及 由用于x轴偏转的电磁偏转系统和用于y轴偏转的电磁偏转系统包围。 信封管设置在偏转系统的外部，并通过端板连接到梁引导管的端部，通过该端板使x轴偏转系统的极靴穿过。 端板从x轴偏转系统的极靴开始向阴极倾斜。

公开(公告)号：US4328763A

公开(公告)日：1982-05-11

申请号：US145632

申请日：1980-05-01

申请人： Peter Sommerkamp ,  Walter Heil

发明人： Peter Sommerkamp ,  Walter Heil

IPC分类号： C23C14/24 ,  C23C14/30 ,  C23C13/12

CPC分类号： C23C14/24 ,  C23C14/30

摘要： A vaporizer for vacuum deposition installations has at least one crucible and a plurality of crucible-receiving recesses movable into a vaporizing position, a vapor-conducting device and a shutter for interrupting the flow of vapor. The vaporizer is capable of enabling a plurality of different substances to be vaporized in succession without mutual contamination by providing the vapor-conducting device wherein the device has a plurality of vapor screens which can be individually set down at the edges of the crucible-receiving recesses by relative movement between the vapor-conducting device and the crucible. The shutters have a plurality of lobes which can be individually moved over the particular vapor screen located in the vaporizing position. The drives associated with the vapor-conducting device and shutter are interconnected such that the same vapor screen and the same shutter lobe are always associated with a particular crucible-receiving recess.

摘要翻译： 用于真空沉积装置的蒸发器具有至少一个坩埚和可移动到蒸发位置的多个坩埚接收凹部，用于中断蒸汽流动的蒸气传导装置和快门。 蒸发器能够通过提供蒸汽传导装置使多个不同物质相继蒸发而不会相互污染，其中该装置具有多个蒸气筛，该蒸气屏可在坩埚接收凹槽的边缘处分别放下 通过蒸气传导装置和坩埚之间的相对运动。 百叶窗具有多个叶片，其可以单独地移动到位于蒸发位置的特定蒸气筛上。 与蒸汽传导装置和快门相关联的驱动器互连，使得相同的蒸气屏幕和相同的快门叶片总是与特定的坩埚容纳凹槽相关联。

公开(公告)号：US4034256A

公开(公告)日：1977-07-05

申请号：US691041

申请日：1976-05-27

申请人： Peter Sommerkamp ,  Walter Heil

发明人： Peter Sommerkamp ,  Walter Heil

IPC分类号： H01J37/06 ,  H01J37/067 ,  H01J37/30 ,  H01J37/301 ,  H01J37/305 ,  H01J37/315 ,  H01J7/24 ,  H01J29/76

CPC分类号： H01J37/301 ,  H01J37/067 ,  H01J37/305 ,  H01J37/315

摘要： An electron gun for heating, fusing and vaporizing having a high voltage portion, an electron emitting cathode and at least one beam forming electrode associated with the cathode. An accelerating anode, a beam guiding tube extending in the direction of the beam path and surrounded by a jacket tube and an electromatic lens are also provided. One or more deflection systems are positioned in the space formed between the beam guiding tube and the jacket tube. The beam guiding tube, the jacket tube, the electromatic lens and the deflection systems are contained in a single, replaceable unit which is joined by a plurality of hollow posts parallel to the gun axis to the high-voltage portion of the gun. The space for the electromagnetic lens and the deflection systems communicates with the atmosphere through at least one of the hollow posts.

摘要翻译： 一种用于加热，熔化和汽化具有高电压部分的电子枪，电子发射阴极和与阴极相关的至少一个光束形成电极。 还提供加速阳极，沿着光束路径的方向延伸并被套管和电子透镜包围的光束引导管。 一个或多个偏转系统定位在形成在光束引导管和护套管之间的空间中。 光束引导管，护套管，电子透镜和偏转系统被包含在单个可更换单元中，其通过平行于枪轴线的多个中空柱连接到枪的高压部分。 用于电磁透镜和偏转系统的空间通过至少一个空心柱与大气连通。

公开(公告)号：US4219183A

公开(公告)日：1980-08-26

申请号：US957583

申请日：1978-11-03

申请人： Otto-Horst Hoffmann ,  Walter Heil ,  Friedrich Stark

发明人： Otto-Horst Hoffmann ,  Walter Heil ,  Friedrich Stark

IPC分类号： F16K3/10 ,  F16K31/44 ,  F16K25/00

CPC分类号： F16K3/10 ,  F16K31/44

摘要： An operating mechanism for valves and the like comprises a housing with a port situated therein which is to be opened and closed. Associated with the port is a seat and a valve plate for closing the port. A rotatable shaft drive mechanism for the valve plate includes a shaft which rotates in one direction to effect movement of the valve plate from its open position to its closed position followed by a pressing movement over the valve plate against the seat and rotates in the other direction to effect movement of the valve plate in the opposite direction. The rotatable shaft drive mechanism includes an intermittent drive for the transformation of the rotatory movement of the shaft to the desired movement of the valve plate.

摘要翻译： 用于阀门等的操作机构包括一个壳体，其中位于其中的开口和关闭的端口。 与端口相关联的是用于关闭端口的阀座和阀板。 用于阀板的可旋转轴驱动机构包括一个轴，该轴在一个方向上旋转以实现阀板从其打开位置到其关闭位置的移动，随后在阀板上抵靠座椅的按压运动并沿另一方向旋转 以实现阀板沿相反方向的移动。 可旋转轴驱动机构包括用于将轴的旋转运动转换为阀板的期望运动的间歇驱动。

公开(公告)号：US5273636A

公开(公告)日：1993-12-28

申请号：US899461

申请日：1992-06-16

申请人： Walter Heil

发明人： Walter Heil

IPC分类号： C23C14/50 ,  H01J37/34 ,  C23C14/34

CPC分类号： H01J37/34 ,  C23C14/505

摘要： A substrate table (4) is fixed to a rotatably mounted hollow shaft (3) in a vacuum coating tank (1). The shaft (3) has a first portion passing sealingly through a wall of the tank and a second portion which has a larger diameter than the first portion in the tank. The first portion has axial supply passages connected to a chamber in the second portion where electrical connectors and coolant distribution means are housed.

摘要翻译： 基板台（4）固定在真空镀膜槽（1）中的可旋转地安装的空心轴（3）上。 轴（3）具有密封地穿过罐的壁的第一部分和具有比罐中的第一部分更大的直径的第二部分。 第一部分具有连接到容纳电连接器和冷却剂分配装置的第二部分中的室的轴向供应通道。