公开(公告)号：US4632057A

公开(公告)日：1986-12-30

申请号：US762231

申请日：1985-08-05

申请人： J. B. Price ,  Matthew L. Bunch ,  Robert W. Stitz

发明人： J. B. Price ,  Matthew L. Bunch ,  Robert W. Stitz

IPC分类号： C23C16/50 ,  C23C16/48 ,  C23C16/509 ,  H01L21/205 ,  H01L21/31 ,  C23C13/04

CPC分类号： C23C16/5096 ,  C23C16/481

摘要： Chemical vapor deposition on a semiconductor wafer is obtained in a plasma reactor having a plurality of lamps for radiantly heating the wafer. Calibrated temperature sensing means remote from the wafer is used to control the heating of the wafer. Gases are supplied by way of a plurality of tubes extending radially inwardly from the sides of the chamber. A baffle is provided to form an antechamber which aids in the uniformity of the deposition. The plasma is ignited for less than the whole deposition cycle for deposition of tungsten disilicide.

摘要翻译： 在具有用于辐射加热晶片的多个灯的等离子体反应器中获得在半导体晶片上的化学气相沉积。 使用远离晶片的校准温度感测装置来控制晶片的加热。 气体通过从腔室的侧面径向向内延伸的多个管道供给。 提供挡板以形成有助于沉积的均匀性的前室。 等离子体点火少于整个沉积循环以沉积二硅化钨。

公开(公告)号：US4491606A

公开(公告)日：1985-01-01

申请号：US492545

申请日：1983-05-09

申请人： Richard S. Rosler ,  George M. Engle

发明人： Richard S. Rosler ,  George M. Engle

IPC分类号： C23C16/509 ,  H01J37/32 ,  C23C13/08 ,  C23C13/04

CPC分类号： H01J37/32568 ,  C23C16/509 ,  H01J37/32 ,  H01J2237/3321

摘要： An improved spacer means for separating and inhibiting the shorting together of conductive plates in an RF plasma reactor used in Plasma Enhanced Chemical Vapor Deposition (PECVD) processing of semiconductor devices. The improved spacer means inhibits the accumulation of conductive films on the surface of the separating means by substantially precluding the plasma field, and hence, inhibiting depositions in areas where recessed grooves are in the surface of the separating means. Accordingly, a direct electrical path on the spacer means between the multiple conductive plates of the RF plasma reactor is inhibited. As a result, the reactors can run for longer periods of time and deposit greater thicknesses of conductive films without the conductive plates shorting together causing shutdown of the process.

摘要翻译： 用于在用于半导体器件的等离子体增强化学气相沉积（PECVD）处理中的RF等离子体反应器中分离和抑制导电板的短路的改进的隔离装置。 改进的间隔装置通过基本上排除等离子体场，从而抑制在分离装置的表面上的导电膜的积累，并因此抑制在分离装置的表面中的凹槽的区域中的沉积。 因此，RF等离子体反应器的多个导电板之间的隔离件装置上的直接电路被禁止。 因此，反应器可以运行更长的时间，并且沉积更大厚度的导电膜，而不会导致导电板短路在一起导致该过程的关闭。

公开(公告)号：US4386137A

公开(公告)日：1983-05-31

申请号：US330822

申请日：1981-12-15

申请人： Nobuatsu Watanabe ,  Tsuyoshi Nakajima ,  Hiroaki Yamada ,  Noboru Ohsawa

发明人： Nobuatsu Watanabe ,  Tsuyoshi Nakajima ,  Hiroaki Yamada ,  Noboru Ohsawa

IPC分类号： B05D3/04 ,  B05D5/08 ,  B05D7/24 ,  C23C26/00 ,  B32B15/04 ,  C23C13/04

CPC分类号： B05D1/60 ,  B05D3/0433 ,  B05D5/08 ,  C23C26/00 ,  Y10T428/31678

摘要： A process for producing a novel graphite fluoride type film on the surface of an aluminum substrate in which an aluminum substrate and a carbonaceous material or polycarbon monofluoride represented by the formula (CF).sub.n are heated in an atmosphere of fluorine gas. The film has a luster, and not only exhibits high degree of hydrophobicity but also has corrosion resistance to aqueous solutions of acid and alkali as well as a mechanical strength.

摘要翻译： 在铝基板的表面上制造新颖的氟化石墨型薄膜的方法，其中铝基材和由式（CF）n表示的碳质材料或单氟代碳氟在氟气氛中加热。 该膜具有光泽，不仅具有高度的疏水性，而且对酸和碱的水溶液以及机械强度具有耐腐蚀性。

公开(公告)号：US4144359A

公开(公告)日：1979-03-13

申请号：US854019

申请日：1977-11-22

申请人： Karim Zahedi ,  Jeffery Alexander ,  Peter Zieve

发明人： Karim Zahedi ,  Jeffery Alexander ,  Peter Zieve

IPC分类号： B01D46/30 ,  B01D50/00 ,  B03C3/017 ,  B03C3/145 ,  B03C3/60 ,  B03C3/88 ,  B05D1/00 ,  C23C13/04

CPC分类号： B03C3/60 ,  B01D46/30 ,  B01D50/00 ,  B03C3/017 ,  B03C3/145 ,  B03C3/88

摘要： Pollutant emissions produced in the manufacture of asphaltic roofing are controlled by the use of electrified bed filters. Filter bed granules coated with pollutants are removed from the beds periodically and are used in the manufacture of the roofing. A prefilter is employed to remove varnishing pollutant components in the supermicron size range to prevent fouling of an electrical charger.

摘要翻译： 在沥青屋面制造中产生的污染物排放通过使用带电床过滤器来控制。 涂覆有污染物的滤床颗粒定期从床上除去，并用于屋顶的制造。 采用预过滤器去除超大尺寸范围内的上光污染物成分，以防止充电器结垢。

公开(公告)号：US4139659A

公开(公告)日：1979-02-13

申请号：US799839

申请日：1977-05-23

申请人： Axel G. Ronnquist ,  Erik T. Lindahl ,  Nicolay S. Stoilov

发明人： Axel G. Ronnquist ,  Erik T. Lindahl ,  Nicolay S. Stoilov

IPC分类号： B23D61/18 ,  C23C16/28 ,  C23C16/32 ,  C23C16/34 ,  C23C11/08 ,  C23C11/10 ,  C23C11/14 ,  C23C13/04

CPC分类号： B23D61/185 ,  C23C16/28 ,  C23C16/32 ,  C23C16/325 ,  C23C16/34

摘要： A composite metal wire saw having a thin wire core and integral therewith hard cutting crystals with cutting edges projecting irregularly from the wire core surface. The cutting crystals form a layer between 1.5 and 10 .mu.m. Preferably, the composite saw has an intermediate fine-grained layer between 1 and 5 .mu.m and being thinner than the surface layer. The composite saw is prepared by heating the core wire and depositing the cutting crystals from the vapor phase.

摘要翻译： 一种复合金属线锯，其具有细线芯并且与硬切割晶体成一体，切割边缘从线芯表面不规则地突出。 切割晶体形成介于1.5至10微米之间的层。 优选地，复合锯具有1-5μm之间的中间细晶层并且比表面层更薄。 通过加热芯线并从气相沉积切割晶体来制备复合锯。

公开(公告)号：US4139443A

公开(公告)日：1979-02-13

申请号：US834158

申请日：1977-09-19

申请人： Kunio Sakurai

发明人： Kunio Sakurai

IPC分类号： C23C14/08 ,  C23C14/18 ,  G03F1/00 ,  G03F1/46 ,  G03F1/54 ,  H01L21/027 ,  C23C15/00 ,  C23C13/02 ,  C23C13/04

CPC分类号： G03F1/46 ,  C23C14/083 ,  C23C14/18 ,  G03F1/58

摘要： The photomask blank comprises a transparent substrate, a first chromium film formed on the substrate by sputtering, a second chromium film formed on the first chromium film by vacuum evaporation and a chromium oxide film by vacuum evaporation. The relative thickness of the two chromium films and the chromium oxide film is adjusted to improve resolution of a pattern and to decrease reflectance.

摘要翻译： 光掩模坯料包括透明基板，通过溅射形成在基板上的第一铬膜，通过真空蒸发在第一铬膜上形成的第二铬膜和通过真空蒸发形成的氧化铬膜。 调整两个铬膜和氧化铬膜的相对厚度以提高图案的分辨率并降低反射率。

公开(公告)号：US4016331A

公开(公告)日：1977-04-05

申请号：US652611

申请日：1976-01-26

申请人： Anthony Frank Garito ,  Alan J. Heeger ,  Alan G. MacDiarmid ,  Arthur A. Bright ,  Marshall J. Cohen ,  Chester M. Mikulski

发明人： Anthony Frank Garito ,  Alan J. Heeger ,  Alan G. MacDiarmid ,  Arthur A. Bright ,  Marshall J. Cohen ,  Chester M. Mikulski

IPC分类号： B29D11/00 ,  G02B1/10 ,  B05D5/12 ,  B32B27/06 ,  C23C13/02 ,  C23C13/04

CPC分类号： G02B1/10 ,  B29D11/00865 ,  Y10S428/91 ,  Y10T428/3154 ,  Y10T428/31544 ,  Y10T428/31786 ,  Y10T428/31938

摘要： A composite polymeric material having metallic surface properties is prepared by subliming solid crystalline polymeric sulfur nitride to a vapor, and thereafter condensing the polymeric sulfur nitride vapor onto the surface of a highly-oriented thermoplastic polymeric substrate to thereby form on the substrate an epitaxial crystalline polymeric sulfur nitride film. The polymeric sulfur nitride film is completely oriented parallel to the direction of orientation of the substrate and has a relatively high degree of anisotropy with respect to its electrical conductivity and optical properties.

摘要翻译： 具有金属表面性质的复合聚合物材料通过将固体结晶聚合硫氮化物升华成蒸气来制备，然后将聚合硫氮化物蒸气冷凝到高度取向的热塑性聚合物基材的表面上，从而在基材上形成外延晶体聚合物 硫化氮膜。 聚合硫化氮膜完全取向为平行于衬底的取向方向，并且相对于其导电性和光学性质具有相对高的各向异性。

公开(公告)号：US3928659A

公开(公告)日：1975-12-23

申请号：US32342473

申请日：1973-01-15

申请人： BAXTER ALEXANDER SAMUEL

发明人： BAXTER ALEXANDER SAMUEL

IPC分类号： C23C14/24 ,  C23C14/26 ,  C23C13/02 ,  C23C13/04

CPC分类号： C23C14/26 ,  C23C14/246

摘要： Method of coating a surface of an article comprises steps of carbonizing organic material to provide a flexible elongated electrically conductive heater element, forming a solid coating of a vaporizable coating material on said element, positioning the said article and heater element in a vacuum chamber with said heater element stretched between two spaced electrodes and heating said element by passing electrical current through said electrodes and heating element to vaporize the vaporizable coating thereon.

摘要翻译： 涂覆制品表面的方法包括将有机材料碳化以提供柔性细长导电加热器元件的步骤，在所述元件上形成可汽化涂层材料的固体涂层，将所述制品和加热器元件定位在具有所述 加热器元件在两个间隔开的电极之间延伸并且通过使电流通过所述电极和加热元件来加热所述元件以使其上的可蒸发涂层蒸发。

公开(公告)号：US3849181A

公开(公告)日：1974-11-19

申请号：US26802472

申请日：1972-06-30

申请人： DU PONT

发明人： GREEN JAMES RALPH ,  TIETZ RAYMOND FRANK

IPC分类号： C04B14/46 ,  C04B20/10 ,  C04B35/10 ,  C04B35/622 ,  C04B41/45 ,  C04B41/81 ,  F02B75/02 ,  C23C13/04

CPC分类号： C04B41/81 ,  C04B14/46 ,  C04B20/1055 ,  C04B35/10 ,  C04B35/62231 ,  C04B35/62236 ,  C04B35/62245 ,  C04B41/4584 ,  F02B2075/027 ,  Y10T428/296 ,  Y10T428/2978

摘要： High-strength fiber is prepared by coating a small grain, small diameter polycrystalline refractory oxide fiber with a specified amount of a glass-forming oxide or its precursor, and heating the coated fiber at a temperature sufficient to decompose the precursor to the oxide and/or to vitrify the oxide coating into an adherent, optically uniform, thin layer. The coating significantly increases the tensile strength of the fiber, while the fiber retains a substantial percentage of its original modulus. The fibers are especially suitable for reinforcement uses.

摘要翻译： 通过用规定量的玻璃形成氧化物或其前体涂覆小颗粒，小直径的多晶耐火氧化物纤维并在足以将前体分解成氧化物和/或氧化物的温度下加热涂覆的纤维来制备高强度纤维，和/ 或将氧化物涂层玻璃化成粘附的光学均匀的薄层。 涂层显着增加了纤维的拉伸强度，而纤维保留了其原始模量的相当大的百分比。 纤维特别适用于加固用途。

公开(公告)号：US3837884A

公开(公告)日：1974-09-24

申请号：US27054772

申请日：1972-07-10

申请人： BALZERS PATENT BETEILIG AG

发明人： RHEINBERGER P

IPC分类号： C03C17/245 ,  G02B5/22 ,  C23C13/04

CPC分类号： C03C17/245 ,  C03C2217/23 ,  C03C2218/151 ,  G02B5/22

摘要： A powdery mixture of cobalt hydroxide, aluminium oxide, and oxides which absorb substantially no visible light, preferably silicon dioxide, is vacuum evaporated in an oxidizing atmosphere and deposited on a base material and subsequently heat treating at approximately 300*C. The coating of the base material thereby obtained is a hard, well adherent, pure blue colored and transparent film. The proportions of the principal components of the primary mixture used for evaporation are 30 to 40 percent of cobalt hydroxide and 5 to 15 percent of aluminium oxide, the refractive index of the whole mixture is approximately equal to the refractive index of the base material and the thickness of the film produced is approximately 1/1000 mm.

摘要翻译： 在氧化气氛中真空蒸发氢氧化钴，氧化铝和基本上不可见光的氧化物的粉末混合物，优选二氧化硅，并沉积在基材上，随后在约300℃下进行热处理。 由此获得的基材是硬的，良好粘附的，纯蓝色和透明的薄膜。 用于蒸发的主要混合物的主要组分的比例为氢氧化钴的30-40％和氧化铝的5-15％，整个混合物的折射率近似等于基材的折射率， 所制膜的厚度约为1/1000mm。