Method for manufacturing vibrator, vibrator, and vibrator device

    公开(公告)号:US12089498B2

    公开(公告)日:2024-09-10

    申请号:US17361478

    申请日:2021-06-29

    发明人: Seiichiro Ogura

    CPC分类号: H10N30/01 H10N30/20 H10N30/87

    摘要: A vibrator includes: a base portion; a vibrating arm including an arm portion which extends from the base portion, and a weight portion which is located on a tip end side of the arm portion and which has a first main surface and a second main surface that are in a front-back relationship; and a weight film disposed at the first main surface of the weight portion. The first main surface includes a first planar surface, a second planar surface which is located closer to the second main surface than is the first planar surface and which is parallel to the first planar surface, and an inclined surface which couples the first planar surface and the second planar surface and which forms an angle of 100° or less with the first planar surface. A method for manufacturing a vibrator includes: a preparation step of preparing the above-described vibrator; and a removing step of removing a part of the weight film by emitting an energy ray to the weight film from a normal direction of the first planar surface.

    LITHIUM NIOBATE SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20230165152A1

    公开(公告)日:2023-05-25

    申请号:US17771351

    申请日:2020-12-28

    申请人: NANKAI UNIVERSITY

    IPC分类号: H10N30/853 H10N30/01

    CPC分类号: H10N30/8542 H10N30/01

    摘要: A lithium niobate semiconductor structure includes: a first lithium niobate material layer, a second lithium niobate material layer and a third lithium niobate material layer. A polarization direction of a ferroelectric domain of the first lithium niobate material layer is a first direction. The second lithium niobate material layer is spaced apart from the first lithium niobate material layer, and a polarization direction of a ferroelectric domain of the second lithium niobate material layer is the first direction. The third lithium niobate material layer is sandwiched between the first lithium niobate material layer and the second lithium niobate material layer, and a polarization direction of a ferroelectric domain of the third lithium niobate material layer is a second direction; the first direction is opposite to the second direction.